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11. 发明授权

US09152051B2 Antireflective coating composition and process thereof 有权
标题翻译：防反射涂料组合物及其工艺
公开(公告)号：US09152051B2
公开(公告)日：2015-10-06
申请号：US13917022
申请日：2013-06-13
申请人： M. Dalil Rahman , Clement Anyadiegwu , Douglas McKenzie , Takanori Kudo , Elizabeth Wolfer , Salem K. Mullen
发明人： M. Dalil Rahman , Clement Anyadiegwu , Douglas McKenzie , Takanori Kudo , Elizabeth Wolfer , Salem K. Mullen
IPC分类号： G03F7/09 , G03F7/30 , G03F7/075 , C09D165/00 , C09D5/00
CPC分类号： G03F7/091 , C08G2261/314 , C08G2261/3424 , C09D5/006 , C09D165/00 , G03F7/0752 , G03F7/0757 , G03F7/30
摘要： The present invention relates to an absorbing hard mask antireflective coating composition comprising a novel polymer, where the novel polymer comprises in the backbone of the polymer four repeat units -A-, -B-, -C- and -D-, where A is repeat unit which comprises a fused aromatic ring in its backbone, B has the structure (1), C is a hydroxylbiphenyl of structure (2) and D is a derivatized fluorene of structure (3), where R1 is C1-C4alkyl, R2 is C1-C4alkyl, R3 and R4 are independently hydrogen or C1-C4 alkyl, and Ar′ and Ar″ are independently phenylenic, or naphthalenic derived moieties, R5 and R6 are independently —OH or —(CH2)nOH where n=2-4, and R7 and R8 are independently hydrogen or C1-C4 alkyl. This invention also relates to a process for forming an image using the novel antireflective coating composition.
摘要翻译：本发明涉及一种包含新型聚合物的吸收性硬掩模抗反射涂料组合物，其中新型聚合物在聚合物的主链中包含四个重复单元-A-， - B - ， - C-和-D-，其中A为重复单元在其骨架中包含稠合芳环，B具有结构（1），C是结构（2）的羟基联苯，D是结构式（3）的衍生化芴，其中R 1是C 1 -C 4烷基，R 2是 C 1 -C 4烷基，R 3和R 4独立地是氢或C 1 -C 4烷基，Ar'和Ar“独立地是苯基或萘衍生部分，R 5和R 6独立地是-OH或 - （CH 2）n OH，其中n = 2-4 ，R 7和R 8独立地为氢或C 1 -C 4烷基。本发明还涉及使用新型抗反射涂料组合物形成图像的方法。

12. 发明授权

US08906592B2 Antireflective coating composition and process thereof 有权
标题翻译：防反射涂料组合物及其工艺
公开(公告)号：US08906592B2
公开(公告)日：2014-12-09
申请号：US13563877
申请日：2012-08-01
申请人： M. Dalil Rahman , Clement Anyadiegwu , Douglas McKenzie , JoonYeon Cho
发明人： M. Dalil Rahman , Clement Anyadiegwu , Douglas McKenzie , JoonYeon Cho
IPC分类号： G03F7/11 , G03F7/30 , G03F7/09
CPC分类号： G03F7/091 , C08G61/02 , C08G2261/135 , C08G2261/1422 , C08G2261/1424 , C08G2261/148 , C08G2261/342 , C08G2261/45 , C08G2261/76 , C09D165/00 , G02B1/118 , G03F7/094 , H01L31/0216 , H01L31/02168 , H01L31/02327 , Y02E10/50
摘要： The invention relates to an antireflective coating composition comprising a crosslinkable polymer, where the crosslinkable polymer comprises at least one unit of fused aromatic moiety, at least one unit with a phenylene moiety in the backbone of the polymer, and at least one hydroxybiphenyl unit, furthermore where the polymer comprises a crosslinking moiety of structure (4), where R′3, R″3 and R′″3 are independently hydrogen or a C1-C4alkyl. The invention further relates to a process for forming an image using the composition.
摘要翻译：本发明涉及包含可交联聚合物的抗反射涂料组合物，其中可交联聚合物包含至少一个稠合芳族部分单元，至少一个在聚合物主链中具有亚苯基部分的单元和至少一个羟基联苯单元其中聚合物包含结构（4）的交联部分，其中R'3，R“3和R”3独立地是氢或C 1 -C 4烷基。本发明还涉及使用该组合物形成图像的方法。

13. 发明授权

US08906590B2 Antireflective coating composition and process thereof 有权
标题翻译：防反射涂料组合物及其工艺
公开(公告)号：US08906590B2
公开(公告)日：2014-12-09
申请号：US13351681
申请日：2012-01-17
申请人： Dalil M Rahman , Douglas McKenzie , Jianhui Shan , JoonYeon Cho , Salem K. Mullen , Clement Anyadiegwu
发明人： Dalil M Rahman , Douglas McKenzie , Jianhui Shan , JoonYeon Cho , Salem K. Mullen , Clement Anyadiegwu
IPC分类号： G03F7/004 , G03F7/30
CPC分类号： H01L21/3081 , C08G61/02 , C08G2261/3424 , C09D165/00 , G03F7/091 , H01L21/0276
摘要： The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1): -A-B-C- (1) where A is a fused aromatic ring, B has a structure (2), and C is a hydroxybiphenyl of structure (3) where R1 is C1-C4alkyl and R2 is C1-C4alkyl. The invention further relates to a process for forming an image using the composition.
摘要翻译：本发明涉及一种抗反射涂料组合物，其包含能够由交联剂交联的交联剂和可交联聚合物，其中可交联聚合物包含由结构（1）表示的单元：-ABC-（1）其中A是稠合芳环 B具有结构（2），C是结构式（3）的羟基联苯，其中R 1是C 1 -C 4烷基，R 2是C 1 -C 4烷基。本发明还涉及使用该组合物形成图像的方法。

14. 发明申请

US20100119979A1 Antireflective Coating Composition Comprising Fused Aromatic Rings 审中-公开
标题翻译：包含熔融芳环的防反射涂料组合物
公开(公告)号：US20100119979A1
公开(公告)日：2010-05-13
申请号：US12270189
申请日：2008-11-13
申请人： M. Dalil Rahman , Douglas McKenzie , Clement Anyadiegwu
发明人： M. Dalil Rahman , Douglas McKenzie , Clement Anyadiegwu
IPC分类号： C08G65/40 , C08L71/10 , G03F7/20
CPC分类号： G03F7/091 , C08G61/02 , C08G2261/342 , H01L21/0276 , H01L21/3081
摘要： The present invention relates to an organic spin coatable antireflective coating composition comprising with (i) at least one unit with fused aromatic rings in the backbone of the polymer of structure (1), (ii) at least one aromatic unit ring in the backbone of the polymer of structure (2) where the aromatic ring has a pendant alkylene(fusedaromatic) group and a pendant hydroxy group, and, (iii) at least one unit with an aliphatic moiety in the backbone of the polymer of structure (3). where, Fr1 is a substituted or unsubstituted fused aromatic ring moiety with 3 or more fused aromatic rings, Fr2 is a fused aromatic ring moiety with 2 or more fused aromatic rings, Ar is a substituted or unsubstituted aromatic ring moiety, R′ and R″ are independently selected from hydrogen and C1-C4 alkyl, y=1-4, and B is a substituted or unsubstituted aliphatic moiety, and R1 is selected from hydrogen or aromatic moiety. The invention further relates to a process for imaging the present composition.
摘要翻译：本发明涉及有机可旋涂抗反射涂料组合物，其包含（i）至少一个在结构（1）的聚合物的主链中具有稠合芳环的单元，（ii）至少一个芳族单元环，其主链为结构（2）的聚合物，其中芳环具有侧链亚烷基（稠合芳基）基团和侧羟基，和（iii）至少一个在结构（3）的聚合物主链中具有脂族部分的单元。其中，Fr1是具有3个以上稠合芳环的取代或未取代的稠合芳香环部分，Fr2是具有2个以上稠合芳香环的稠合芳环部分，Ar是取代或未取代的芳环部分，R'和R“ 独立地选自氢和C 1 -C 4烷基，y = 1-4，B是取代或未取代的脂族部分，R 1选自氢或芳族部分。本发明还涉及用于对本发明组合物进行成像的方法。

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