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    • 11. 发明授权
    • Polishing process monitoring method and apparatus, its endpoint detection method, and polishing machine using same
    • 抛光过程监控方法和装置,其端点检测方法和使用该抛光机的抛光机
    • US06425801B1
    • 2002-07-30
    • US09324080
    • 1999-06-01
    • Akira TakeishiHideo MitsuhashiKatsuhisa OhkawaYoshihiro HayashiTakahiro Onodera
    • Akira TakeishiHideo MitsuhashiKatsuhisa OhkawaYoshihiro HayashiTakahiro Onodera
    • B24B100
    • B24B37/013B24B37/042B24B49/04B24B49/12
    • A polishing process monitoring apparatus of a semiconductor wafer is provided, which is capable of monitoring correctly the process independent of various factors affecting optical measurement, such as the configuration, material, and size of a layered structure on the wafer, and the geometric shapes of patterns and their arrangement for respective semiconductor chips. This apparatus is comprised of (a) a light irradiating means for irradiating a detection light beam to a semiconductor wafer, (b) a first light receiving means for receiving a specular-reflected light beam generated by reflection of the detection light beam at the wafer and for outputting a first signal according to an amount of the specular-reflected light beam, (c) a second light receiving means for receiving a scattered/diffracted light beam generated by scattering or diffraction of the detection light beam at the wafer and for outputting a second signal according to an amount of the scattered/diffracted light beam, and (d) a monitoring means for monitoring a polishing process of the wafer by using the first and second signals.
    • 提供了一种半导体晶片的抛光处理监视装置,其能够独立于影响光学测量的各种因素,例如晶片上的分层结构的配置,材料和尺寸,以及几何形状 图案及其各自半导体芯片的布置。 该装置包括(a)用于将检测光束照射到半导体晶片的光照射装置,(b)第一光接收装置,用于接收由晶片上的检测光束的反射产生的镜面反射光束 并且用于根据镜面反射光束的量输出第一信号,(c)第二光接收装置,用于接收由晶片上的检测光束的散射或衍射产生的散射/衍射光束,并输出 根据散射/衍射光束的量的第二信号,以及(d)用于通过使用第一和第二信号监视晶片的抛光处理的监视装置。
    • 13. 发明授权
    • Control system for an internal combustion engine
    • 内燃机控制系统
    • US09109475B2
    • 2015-08-18
    • US13405702
    • 2012-02-27
    • Hideo Mitsuhashi
    • Hideo Mitsuhashi
    • F02D28/00F01L1/344F01L13/08
    • F01L1/3442F01L13/08F01L2800/01
    • An internal combustion engine includes a hydraulically-driven variable valve timing device for adjusting the opening timing and the closing timing of an intake valve and configured to include a start retard position for decompression that is retarded further from the most retarded position during a normal operating state, and a control system configured to start a cranking operation of the internal combustion engine while the variable valve timing device is positioned in the start retard position for decompression, to determine during the cranking operation whether operating oil has drained from the variable valve timing device, when it has been determined that oil has drained from the variable valve timing device, to set a delay time between the cranking operation start and an advance operation of the variable valve timing device longer than the situation in which operating oil is replete.
    • 内燃机包括用于调节进气门的打开正时和关闭正时的液压驱动的可变气门正时装置,并被构造为包括在正常操作状态期间进一步从最大延迟位置延迟的减压开始延迟位置 以及控制系统,其构造成在可变气门正时装置位于用于减压的开始延迟位置的同时开始内燃机的起动操作,以在起动操作期间确定工作油是否已经从可变气门正时装置排出, 当确定油已经从可变气门正时装置排出时,设定起动运转开始与可变气门正时装置的提前运转之间的延迟时间比工作油充满的情况更长。
    • 15. 发明申请
    • INFORMATION INPUT SYSTEM, METHOD FOR INPUTTING INFORMATION AND INFORMATION INPUT PROGRAM
    • 信息输入系统,用于输入信息和信息输入程序的方法
    • US20110134082A1
    • 2011-06-09
    • US13057369
    • 2009-06-25
    • Hideo MitsuhashiShin Norieda
    • Hideo MitsuhashiShin Norieda
    • G06F3/043
    • G06F3/011G06F1/1684G06F3/043
    • Provided is an information input system, wherein an operator can easily conduct information input actions to a small information device. The information input system is provided with a vibration element that applies a vibration to a forefinger of an operator, a vibration sensor that measures the vibration transmitted through the forefinger and the thumb, and a first input information specifying module that specifies the position on the thumb where another finger of the operator is in contact with the thumb based on a change in transmission property of the transmission system caused by the fact that the finger of the operator, which is in contact with the thumb, is in contact with the vibration transmission system formed by including the forefinger and the thumb. The information input system outputs the detected position of the contact of the finger as positional information.
    • 提供了一种信息输入系统,其中操作者可以容易地向小信息设备进行信息输入动作。 该信息输入系统设置有对操作者的食指施加振动的振动元件,测量通过食指和拇指传递的振动的振动传感器,以及指定拇指位置的第一输入信息指定模块 其中操作者的另一个手指基于由与拇指接触的操作者的手指与振动传播系统接触的事实而导致的传输系统的传输特性的变化而与拇指接触 通过包括食指和拇指形成。 信息输入系统输出检测到的手指的接触位置作为位置信息。