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11. 发明申请

US20050179451A1 Configurable prober for TFT LCD array testing 有权
标题翻译：用于TFT LCD阵列测试的可配置探头
公开(公告)号：US20050179451A1
公开(公告)日：2005-08-18
申请号：US10889695
申请日：2004-07-12
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez Frank Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/302 , G01R31/26 , G01R31/305 , G02F1/13 , G09G3/00 , H01L21/687
CPC分类号： G09G3/006 , G01R31/2893 , G01R31/305
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame.
摘要翻译：提供了一种用于电子设备测试系统的改进的探测器。探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。通常，玻璃基板是正方形的，框架也是正方形的。以这种方式，“x”和“y”轴由框架定义。

12. 发明授权

US07746088B2 In-line electron beam test system 有权
标题翻译：在线电子束测试系统
公开(公告)号：US07746088B2
公开(公告)日：2010-06-29
申请号：US12422164
申请日：2009-04-10
申请人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01R31/302
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

13. 发明申请

US20090195262A1 IN-LINE ELECTRON BEAM TEST SYSTEM 有权
标题翻译：在线电子束测试系统
公开(公告)号：US20090195262A1
公开(公告)日：2009-08-06
申请号：US12422164
申请日：2009-04-10
申请人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01R31/305
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

14. 发明授权

US07535238B2 In-line electron beam test system 有权
标题翻译：在线电子束测试系统
公开(公告)号：US07535238B2
公开(公告)日：2009-05-19
申请号：US11375625
申请日：2006-03-14
申请人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
发明人： Fayez E. Abboud , Sriram Krishnaswami , Benjamin M. Johnston , Hung T. Nguyen , Matthias Brunner , Ralf Schmid , John M. White , Shinichi Kurita , James C. Hunter
IPC分类号： G01R31/302
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.
摘要翻译：描述了用于测试形成在大面积基板上的多个电子装置的方法和装置。在一个实施例中，该装置在至少一个室内的一个线性轴线上对衬底进行测试，所述至少一个腔室比待测试衬底的尺寸略宽。由于系统的尺寸和体积较小，洁净室空间和处理时间被最小化。

15. 发明授权

US07355418B2 Configurable prober for TFT LCD array test 有权
标题翻译：可配置探针用于TFT LCD阵列测试
公开(公告)号：US07355418B2
公开(公告)日：2008-04-08
申请号：US10903216
申请日：2004-07-30
申请人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
发明人： Matthias Brunner , Shinichi Kurita , Ralf Schmid , Fayez E. Abboud , Benjamin Johnston , Paul Bocian , Emanuel Beer
IPC分类号： G01R31/305
CPC分类号： G01R1/07364 , G01R31/2893 , G01R31/305 , G09G3/006
摘要： An improved prober for an electronic devices test system is provided. The prober is “configurable,” meaning that it can be adapted for different device layouts and substrate sizes. The prober generally includes a frame, at least one prober bar having a first end and a second end, a frame connection mechanism that allows for ready relocation of the prober bar to the frame at selected points along the frame, and a plurality of electrical contact pins along the prober bar for placing selected electronic devices in electrical communication with a system controller during testing. In one embodiment, the prober is be used to test devices such as thin film transistors on a glass substrate. Typically, the glass substrate is square, and the frame is also square. In this way, “x” and “y” axes are defined by the frame. The electrical pins may be movable along the axial length of the prober bars, or may be selectively pushed down to contact selected contact pads on the substrate.
摘要翻译：提供了一种用于电子设备测试系统的改进的探测器。探测器是“可配置的”，这意味着它可以适用于不同的设备布局和基板尺寸。探测器通常包括框架，至少一个具有第一端和第二端的探测杆，框架连接机构，其允许在沿着框架的选定点准备将探测杆重新定位到框架，以及多个电触点沿着探测杆的引脚，用于在测试期间将选定的电子设备与系统控制器电连通。在一个实施例中，探测器用于测试诸如玻璃基板上的薄膜晶体管的器件。通常，玻璃基板是正方形的，框架也是正方形的。以这种方式，“x”和“y”轴由框架定义。电引脚可以沿着探针杆的轴向长度移动，或者可以选择性地向下推动以接触衬底上的所选择的接触垫。

16. 发明申请

US20060244467A1 In-line electron beam test system 有权
公开(公告)号：US20060244467A1
公开(公告)日：2006-11-02
申请号：US11375625
申请日：2006-03-14
申请人： Fayez Abboud , Sriram Krishnaswami , Benjamin Johnston , Hung Nguyen , Matthias Brunner , Ralf Schmid , John White , Shinichi Kurita , James Hunter
发明人： Fayez Abboud , Sriram Krishnaswami , Benjamin Johnston , Hung Nguyen , Matthias Brunner , Ralf Schmid , John White , Shinichi Kurita , James Hunter
IPC分类号： G01R31/302
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

17. 发明授权

US08115506B2 Localization of driver failures within liquid crystal displays 有权
标题翻译：液晶显示器内部驱动器故障的定位
公开(公告)号：US08115506B2
公开(公告)日：2012-02-14
申请号：US12119821
申请日：2008-05-13
申请人： Matthias Brunner
发明人： Matthias Brunner
IPC分类号： G01R31/26
CPC分类号： G09G3/006 , G09G3/3648
摘要： Methods and apparatus for determining whether a malfunctioning pixel in a large area substrate, such as a liquid crystal display (LCD) panel, is due to the pixel itself or to the driver circuit for that pixel and for localizing any driver circuit defects are provided. In an effort to localize the driver circuit defects, test pads coupled to the input and/or output of certain driver circuits may be fabricated on the substrate. The voltage or charge of these test pads may be detected using any suitable sensing device, such as an electron beam, an electro-optical sensor, or an electrode in close proximity to the surface of the pixels and/or drivers capacitively coupled to the pixel or driver. For some embodiments, the defective driver circuits may be repaired in the same area as the test area or may be transported via conveyor or robot to a separate repair station.
摘要翻译：提供了用于确定诸如液晶显示器（LCD）面板的大面积基板中的故障像素是由于像素本身还是由于该像素的驱动器电路以及用于定位任何驱动器电路缺陷的方法和装置。为了定位驱动器电路缺陷，可以在衬底上制造耦合到某些驱动器电路的输入和/或输出的测试焊盘。这些测试焊盘的电压或电荷可以使用任何合适的感测装置来检测，例如电子束，电光传感器或靠近像素表面的电极和/或与电容耦合到像素的驱动器或司机。对于一些实施例，有缺陷的驱动器电路可以在与测试区域相同的区域中修复，或者可以经由输送机或机器人被传送到单独的维修站。

18. 发明申请

US20090179656A1 LIGHT-ASSISTED TESTING OF AN OPTOELECTRONIC MODULE 有权
标题翻译：光电模块的光辅助测试
公开(公告)号：US20090179656A1
公开(公告)日：2009-07-16
申请号：US12296055
申请日：2007-04-04
申请人： Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
发明人： Bernhard Gunter Mueller , Ralf Schmid , Matthias Brunner
IPC分类号： G01R31/305 , G01N23/225 , G01N21/88
CPC分类号： G02F1/1309 , G02F2001/136254
摘要： The present invention relates to a device for testing an optoelectronic module, comprising a first source for generating an electromagnetic beam or particle beam, a second source for illuminating the optoelectronic module; and a detector. In addition, a method for testing an optoelectronic module is provided comprising illuminating the optoelectronic module, directing an electromagnetic beam or particle beam and detecting defects in the optoelectronic module. The illumination additional to the electromagnetic beam or particle beam makes defects visible which otherwise would not be detected.
摘要翻译：本发明涉及一种用于测试光电子模块的装置，包括用于产生电磁束或粒子束的第一源，用于照亮光电子模块的第二源; 和检测器。此外，提供了一种用于测试光电子模块的方法，包括照亮光电子模块，引导电磁束或粒子束并检测光电子模块中的缺陷。附加到电磁波束或粒子束的照明使缺陷可见，否则将不会被检测到。

19. 发明申请

US20070296437A1 MINI-PROBER FOR TFT-LCD TESTING 有权
标题翻译：用于TFT-LCD测试的微型探测器
公开(公告)号：US20070296437A1
公开(公告)日：2007-12-27
申请号：US11746515
申请日：2007-05-09
申请人： Benjamin Johnston , Sriram Krishnaswami , Hung Nguyen , Matthias Brunner , Yong Liu
发明人： Benjamin Johnston , Sriram Krishnaswami , Hung Nguyen , Matthias Brunner , Yong Liu
IPC分类号： G01R31/02
CPC分类号： G01R31/2808 , G09G3/006
摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.
摘要翻译：描述了用于测试大面积基板的装置和方法。大面积基板包括电连接到显示器的显示器和接触点的图案。该装置包括可相对于大面积基板移动的探测器组件，并且可以被配置为测试各种显示和接触点的图案。探测器组件还被配置成测试大面积衬底的分数段。该装置还包括被配置为在内部容积内存储至少两个探测器组件的测试室。

20. 发明申请

US20070296426A1 PROBER FOR ELECTRONIC DEVICE TESTING ON LARGE AREA SUBSTRATES 有权
标题翻译：电子设备测试大面积基板的探测器
公开(公告)号：US20070296426A1
公开(公告)日：2007-12-27
申请号：US11746530
申请日：2007-05-09
申请人： SRIRAM KRISHNASWAMI , Matthias Brunner , William Beaton , Yong Liu , Benjamin Johnston , Hung Nguyen , Ludwig Ledl , Ralf Schmid
发明人： SRIRAM KRISHNASWAMI , Matthias Brunner , William Beaton , Yong Liu , Benjamin Johnston , Hung Nguyen , Ludwig Ledl , Ralf Schmid
IPC分类号： G01R31/02
CPC分类号： G01R31/2887 , G09G3/006 , G09G3/3208 , G09G3/3611
摘要： An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays on the large area substrate. The apparatus includes a prober assembly that is movable relative to the large area substrate and/or the contact points, and may be configured to test various patterns of displays and contact points on various large area substrates. The prober assembly is also configured to test fractional sections of the large area substrate positioned on a testing table, and the prober assembly may be configured for different display and contact point patterns without removing the prober assembly from the testing table.
摘要翻译：描述了用于测试大面积基板的装置和方法。大面积基板包括电耦合到大面积基板上的显示器的显示器图案和接触点。该装置包括可相对于大面积基板和/或接触点移动的探测器组件，并且可以被配置为测试各种大面积基板上的各种显示图案和接触点。探测器组件还被配置为测试位于测试台上的大面积衬底的小数部分，并且探针组件可以被配置为用于不同的显示和接触点图案，而不从测试台移除探测器组件。

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