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11. 发明授权

US06202681B1 Vacuum pressure control system 有权
标题翻译：真空压力控制系统
公开(公告)号：US06202681B1
公开(公告)日：2001-03-20
申请号：US09496624
申请日：2000-02-02
申请人： Masayuki Kouketsu , Masayuki Watanabe , Shinichi Nitta , Hiroshi Takehara
发明人： Masayuki Kouketsu , Masayuki Watanabe , Shinichi Nitta , Hiroshi Takehara
IPC分类号： F16K3142
CPC分类号： F16K31/1221 , F16K37/0091 , F16K51/02 , G05D16/2093 , Y10T137/7762 , Y10T137/777
摘要： In a vacuum pressure control system constituted of a vacuum vessel, a vacuum pump sucking gas in the vacuum vessel, a vacuum proportional opening and closing valve disposed on a pipe connecting the vacuum vessel and the vacuum pump, the vacuum proportional opening and closing valve changing its opening to change the vacuum pressure in the vacuum vessel, a pressure sensor to measure the vacuum pressure in the vacuum vessel and a vacuum pressure control device to control the opening of the vacuum proportional opening and closing valve based on the output of the pressure sensor, the vacuum proportional opening and closing valve is provided with a valve seat, a valve member with a tapered surface in its outer periphery and a pilot valve, the valve member being movable along a center line of the valve seat to change a clearance area between the valve seat and the tapered surface, and the vacuum pressure control device controls a servo valve to change the pressure of air to be supplied to the pilot valve based on the output of the pressure sensor.
摘要翻译：在由真空容器，在真空容器中吸入气体的真空泵构成的真空压力控制系统中，设置在连接真空容器和真空泵的管道上的真空比例开关阀，真空比例开关阀变化其打开以改变真空容器中的真空压力，用于测量真空容器中的真空压力的压力传感器和真空压力控制装置，以根据压力传感器的输出来控制真空比例开关阀的打开所述真空比例开关阀具有阀座，在其外周具有锥形表面的阀构件和先导阀，所述阀构件可沿着所述阀座的中心线移动，以改变所述阀座之间的间隙面积阀座和锥形表面，并且真空压力控制装置控制伺服阀以改变要供应到的空气的压力基于压力传感器输出的先导阀。

12. 发明授权

US06913031B2 Pulse shot type flow controller and pulse shot type flow controlling method 有权
标题翻译：脉冲式流量控制器和脉冲射流式流量控制方法
公开(公告)号：US06913031B2
公开(公告)日：2005-07-05
申请号：US10491955
申请日：2002-10-16
申请人： Tokuhide Nawata , Yoshihisa Sudoh , Masayuki Kouketsu , Masayuki Watanabe , Hiroki Doi
发明人： Tokuhide Nawata , Yoshihisa Sudoh , Masayuki Kouketsu , Masayuki Watanabe , Hiroki Doi
IPC分类号： G05D7/06
CPC分类号： G05D7/0647 , G05D7/0635 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/86421
摘要： A flow controller and a flow controlling method are adapted to be released from conventional restrictions by using a novel type called a pulse shot type. A pulse shot (opening/closing operation of a first cutoff valve (12) and, after that, opening/closing operation of a second cutoff valve (17)) is repeated. Simultaneously, a volume flow Q of process gas exhausted from the second cutoff valve (17) per unit time on the basis of after-filling pressure and after-exhaust pressure of the process gas in a gas filling capacity (13) measure by a pressure sensor (14). Furthermore, a mode of the pulse shot is changed to control the volume flow Q of the process gas exhausted from the second cutoff valve (17) per unit time.
摘要翻译：流量控制器和流量控制方法适用于通过使用称为脉冲射击型的新颖型式从常规限制中解除。重复脉冲（第一截止阀（12）的打开/关闭操作），之后，重新开启第二截止阀（17）的打开/关闭操作。同时，基于填充气体（13）中的处理气体的补充压力和排气后压力，单位时间内从第二截止阀（17）排出的处理气体的体积流量Q通过压力传感器（14）。此外，改变脉冲射击的模式，以控制每单位时间从第二截止阀（17）排出的处理气体的体积流量Q。

13. 发明授权

US06508268B1 Vacuum pressure control apparatus 有权
标题翻译：真空压力控制装置
公开(公告)号：US06508268B1
公开(公告)日：2003-01-21
申请号：US09438956
申请日：1999-11-12
申请人： Masayuki Kouketsu
发明人： Masayuki Kouketsu
IPC分类号： F16K3142
CPC分类号： F16K1/46 , F16K41/10 , F16K51/02 , Y10S251/90 , Y10T137/7761 , Y10T137/7762
摘要： A vacuum pressure control apparatus includes a vacuum proportional opening and closing valve 18 which is disposed on a pipe connecting a vacuum chamber 11 and a vacuum pump 19 and changes its opening to control the vacuum pressure in the vacuum chamber 11, and a pressure sensor 17 which measures the current vacuum pressure in the chamber 11. The vacuum proportional opening and closing valve 18 has a valve seat 36 and a valve member 33 provided with an O-ring 35 which is made contact with or separate from the valve seat 36. The vacuum pressure control apparatus configured as above controls the pressure in the chamber 11 by changing an elastic deformation amount of the O-ring 35 which is in contact with the valve seat 36 and thereby changing the flow quantity of gas leaking between the valve seat 36 and the O-ring 35.
摘要翻译：真空压力控制装置包括真空比例开关阀18，其设置在连接真空室11和真空泵19的管道上，并改变其开度以控制真空室11中的真空压力，以及压力传感器17 其测量室11中的当前真空压力。真空比例开关阀18具有阀座36和设置有与阀座36接触或分离的O形环35的阀构件33。如上构造的真空压力控制装置通过改变与阀座36接触的O形环35的弹性变形量来控制室11中的压力，从而改变阀座36与阀座36之间的泄漏气体的流量 O形圈35。

14. 发明授权

US6041814A Vacuum pressure control system 失效
标题翻译：真空压力控制系统
公开(公告)号：US6041814A
公开(公告)日：2000-03-28
申请号：US580358
申请日：1995-12-28
申请人： Masayuki Kouketsu , Masayuki Watanabe , Shinichi Nitta , Hiroshi Takehara
发明人： Masayuki Kouketsu , Masayuki Watanabe , Shinichi Nitta , Hiroshi Takehara
IPC分类号： F15B5/00 , F16K31/122 , F16K37/00 , F16K51/02 , G05D16/16 , F16K31/42
CPC分类号： F16K31/1221 , F16K37/0091 , F16K51/02 , G05D16/2093 , Y10T137/7762 , Y10T137/777
摘要： In a vacuum pressure control system constituted of a vacuum vessel, a vacuum pump sucking gas in the vacuum vessel, a vacuum proportional opening and closing valve disposed on a pipe connecting the vacuum vessel and the vacuum pump, the vacuum proportional opening and closing valve changing its opening to change the vacuum pressure in the vacuum vessel, a pressure sensor to measure the vacuum pressure in the vacuum vessel and a vacuum pressure control device to control the opening of the vacuum proportional opening and closing valve based on the output of the pressure sensor, the vacuum proportional opening and closing valve is provided with a valve seat, a valve member with a tapered surface in its outer periphery and a pilot valve, the valve member being movable along a center line of the valve seat to change a clearance area between the valve seat and the tapered surface, and the vacuum pressure control device controls a servo valve to change the pressure of air to be supplied to the pilot valve based on the output of the pressure sensor.
摘要翻译：在由真空容器，在真空容器中吸入气体的真空泵构成的真空压力控制系统中，设置在连接真空容器和真空泵的管道上的真空比例开关阀，真空比例开关阀变化其打开以改变真空容器中的真空压力，用于测量真空容器中的真空压力的压力传感器和真空压力控制装置，以根据压力传感器的输出来控制真空比例开关阀的打开所述真空比例开关阀具有阀座，在其外周具有锥形表面的阀构件和先导阀，所述阀构件可沿着所述阀座的中心线移动，以改变所述阀座之间的间隙面积阀座和锥形表面，并且真空压力控制装置控制伺服阀以改变要供应到的空气的压力基于压力传感器输出的先导阀。

15. 发明授权

US06289737B1 Vacuum pressure control system 有权
标题翻译：真空压力控制系统
公开(公告)号：US06289737B1
公开(公告)日：2001-09-18
申请号：US09449979
申请日：1999-11-26
申请人： Masayuki Kouketsu , Masayuki Watanabe , Hiroshi Kagohashi
发明人： Masayuki Kouketsu , Masayuki Watanabe , Hiroshi Kagohashi
IPC分类号： G01L700
CPC分类号： G05D16/2093
摘要： In a vacuum pressure control system, the vacuum pressure in a reaction chamber 10 is measured by vacuum pressure sensors 14 and 15 (S22), the measured value is changed at a set vacuum pressure changing speed commanded from the exterior or determined and stored in advance in a controller of the system (S24). The changed value is sequentially generated as an internal command. In response to the sequentially generated internal commands, a desired value of the feedback control is changed in sequence (S26), so that the feedback control is executed as follow-up control (S27). Accordingly, the vacuum pressure in the reaction chamber 10 can be uniformly changed to a desired vacuum at a set vacuum pressure changing speed.
摘要翻译：在真空压力控制系统中，通过真空压力传感器14和15测量反应室10中的真空压力（S22），测量值以从外部命令的设定真空压力变化速度改变或预先确定和存储在系统的控制器中（S24）。作为内部命令顺序生成更改的值。响应于顺序产生的内部命令，反馈控制的期望值按顺序改变（S26），从而作为后续控制执行反馈控制（S27）。因此，能够以设定的真空压力变化速度将反应室10内的真空压力均匀地变更为期望的真空。

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