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    • 15. 发明授权
    • Inspection apparatus and method
    • 检验仪器及方法
    • US06559937B2
    • 2003-05-06
    • US09727143
    • 2000-11-30
    • Hitoshi TamadaYutaka ImaiAyumu TaguchiHiroyuki Wada
    • Hitoshi TamadaYutaka ImaiAyumu TaguchiHiroyuki Wada
    • G01N2100
    • G01N21/956G01N21/9501
    • An image of an inspection target having a concave and convex pattern is picked up in an off-focus state by an image pickup element 4. Further, the image of the inspection target picked up in the off-focus state is taken in by an image processing computer 6. Based on the image, the image processing computer 6 prepares a light intensity profile having a peak corresponding to a boundary portion between a concave portion and a convex portion of the concave and convex pattern of the inspection target. For example, a change of the width of the concave or convex portion of the concave and convex portion can be detected very accurately, by measuring the width of the concave or convex portion of the concave and convex portion on the basis of the intensity profile.
    • 通过图像拾取元件4在离焦状态下拾取具有凹凸图案的检查对象的图像。此外,以离焦状态拍摄的检查对象的图像被摄像 基于图像,图像处理计算机6准备具有对应于检查对象的凹凸图案的凹部和凸部之间的边界部分的峰值的光强度分布。 例如,通过基于强度分布测量凹凸部的凹部或凸部的宽度,可以非常精确地检测凹凸部的凹部或凸部的宽度的变化。