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11. 发明授权

US08815105B2 Method using block copolymers for making a master mold for nanoimprinting patterned magnetic recording disks with chevron servo patterns 有权
标题翻译：使用嵌段共聚物制造用于纳米压印具有人字形伺服图案的图案化磁记录盘的母模的方法
公开(公告)号：US08815105B2
公开(公告)日：2014-08-26
申请号：US13036346
申请日：2011-02-28
申请人： Elizabeth Ann Dobisz , Ricardo Ruiz , Guoliang Liu , Paul Franklin Nealey
发明人： Elizabeth Ann Dobisz , Ricardo Ruiz , Guoliang Liu , Paul Franklin Nealey
IPC分类号： B28B7/38 , B05D3/10 , B05D5/00 , G03F7/00 , G11B5/855 , B81C1/00
CPC分类号： G03F7/0002 , B81C1/0046 , B82Y10/00 , B82Y40/00 , G11B5/855
摘要： A method for making a master mold used to nanoimprint patterned magnetic recording disks that have chevron servo patterns with minimal defects uses directed self-assembly of block copolymers. A pattern of chemically modified polymer brush material is formed on the master mold substrate. The pattern includes sets of slanted stripes and interface strips between the sets of slanted stripes. A block copolymer material is deposited on the pattern, which results in directed self-assembly of the block copolymer as lamellae perpendicular to the substrate that are formed into alternating slanted stripes of alternating first and second components of the block copolymer. This component also forms on the interface strips, but as a lamella parallel to the substrate. One of the components is then removed, leaving the remaining component as a grid that acts as a mask for etching the substrate to form the master mold. The disks nanoimprinted by the master mold have reduced defective areas in the transition regions of the chevron servo patterns.
摘要翻译：用于制造具有最小缺陷的人字形伺服图案的用于纳米压印图案化磁记录盘的母模的方法使用嵌段共聚物的定向自组装。在母模基板上形成化学改性聚合物刷材料的图案。该图案包括在这些倾斜条纹组之间的一组倾斜条纹和界面条。嵌段共聚物材料沉积在图案上，这导致嵌段共聚物的定向自组装作为垂直于衬底的薄片，其形成为嵌段共聚物交替的第一和第二组分的交替倾斜条纹。该组件也形成在界面条上，而是形成平行于基底的薄片。然后除去其中一个部件，留下剩余的部件作为栅格，其用作蚀刻基板以形成母模的掩模。由主模具纳米压印的盘片减少了人字形伺服模式的过渡区域中的缺陷区域。

12. 发明授权

US08623223B2 Method using block copolymers for making a master disk with radial binary encoded nondata marks for nanoimprinting patterned magnetic recording disks 失效
标题翻译：使用嵌段共聚物制造具有用于纳米压印图案化磁记录盘的径向二进制编码非标记标记的母盘的方法
公开(公告)号：US08623223B2
公开(公告)日：2014-01-07
申请号：US13299664
申请日：2011-11-18
申请人： Elizabeth Ann Dobisz , Jeffrey S. Lille , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
发明人： Elizabeth Ann Dobisz , Jeffrey S. Lille , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
IPC分类号： B44C1/22
CPC分类号： G11B5/746 , B82Y30/00 , G11B5/743 , G11B5/855 , G11B5/86
摘要： A method using directed self-assembly of BCPs enables the making of a master disk for nanoimprinting magnetic recording disks that have patterned data islands and patterned binary encoded nondata marks. The method uses guided self-assembly of a BCP to form patterns of sets of radial lines and circumferential gaps of one of the BCP components, which can be used as an etch mask to make the master disk. The sets of radial lines and circumferential gaps can be patterned so as to encode binary numbers. The pattern is replicated as binary encoded nondata marks into the nanoimprinted disks, with the marks functioning as binary numbers for data sector numbers and/or servo sector numbers. If the disks also use a chevron servo pattern, the binary numbers can function to identify groups of tracks associated with the chevron servo pattern.
摘要翻译：使用BCP的定向自组装的方法使得能够制造具有图案化数据岛和图案化二进制编码非标记的纳米压印磁记录盘的母盘。该方法使用BCP的引导自组装来形成一组BCP组件的径向线和圆周间隙的图案，其可用作蚀刻掩模以制造母盘。径向线和圆周间隙的组可以被图案化以便编码二进制数。该图案作为二进制编码的非标记标记复制到纳米压印盘中，其标记用作数据扇区号和/或伺服扇区号的二进制数。如果磁盘还使用人字形伺服模式，则二进制数字可用于识别与人字形伺服模式相关联的磁道组。

13. 发明申请

US20130105437A1 METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER DISK WITH RADIAL NONDATA MARKS FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 失效
标题翻译：使用块状共聚物制备具有径向非标记标记的主磁盘的方法用于纳刻图形磁记录磁盘
公开(公告)号：US20130105437A1
公开(公告)日：2013-05-02
申请号：US13287761
申请日：2011-11-02
申请人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
发明人： Thomas R. Albrecht , Elizabeth Ann Dobisz , Guoliang Liu , Ricardo Ruiz , Gabriel Zeltzer
IPC分类号： C23F1/02 , B05D3/10 , B05D3/02 , B05D5/00
CPC分类号： B82Y10/00 , G11B5/746 , G11B5/855 , G11B5/865
摘要： A method for making a master disk for nanoimprinting patterned-media magnetic recording disks has patterns for both the data islands and the nondata regions. The method uses guided self-assembly of a block copolymer (BCP) to form patterns of generally radial lines and/or generally concentric rings as well as patterns of gap regions of one of the BCP components. The pattern of lines and/or rings have the BCP components aligned as lamellae perpendicular to the substrate, while the pattern of gap regions has the BCP components aligned as lamellae parallel to the substrate. One of the BCP components is removed, leaving the other BCP component as an etch mask to fabricate either the final master disk or two separate molds that are then used to fabricate the master disk.
摘要翻译：用于制造用于纳米压印图案化介质磁记录盘的母盘的方法具有用于数据岛和非数据区的图案。该方法使用嵌段共聚物（BCP）的引导自组装形成大体上径向线和/或大致同心环的图案以及一种BCP组分的间隙区域的图案。线和/或环的图案具有垂直于衬底的薄片对准的BCP组分，而间隙区域的图案将BCP组分排列成平行于衬底的薄片。 BCP组件中的一个被去除，另一个BCP组件作为蚀刻掩模来制造最终的主磁盘或两个单独的模具，然后用于制造主磁盘。

14. 发明申请

US20120217220A1 METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS WITH CHEVRON SERVO PATTERNS 有权
标题翻译：使用块状共聚物制备主要模具的方法，用于对具有CHEVRON SERVO模式的图形磁记录盘进行纳米压印
公开(公告)号：US20120217220A1
公开(公告)日：2012-08-30
申请号：US13036346
申请日：2011-02-28
申请人： Elizabeth Ann Dobisz , Ricardo Ruiz , Guoliang Liu , Paul Franklin Nealey
发明人： Elizabeth Ann Dobisz , Ricardo Ruiz , Guoliang Liu , Paul Franklin Nealey
IPC分类号： B28B7/38 , B05D3/10 , B05D5/00
CPC分类号： G03F7/0002 , B81C1/0046 , B82Y10/00 , B82Y40/00 , G11B5/855
摘要： A method for making a master mold used to nanoimprint patterned magnetic recording disks that have chevron servo patterns with minimal defects uses directed self-assembly of block copolymers. A pattern of chemically modified polymer brush material is formed on the master mold substrate. The pattern includes sets of slanted stripes and interface strips between the sets of slanted stripes. A block copolymer material is deposited on the pattern, which results in directed self-assembly of the block copolymer as lamellae perpendicular to the substrate that are formed into alternating slanted stripes of alternating first and second components of the block copolymer. This component also forms on the interface strips, but as a lamella parallel to the substrate. One of the components is then removed, leaving the remaining component as a grid that acts as a mask for etching the substrate to form the master mold. The disks nanoimprinted by the master mold have reduced defective areas in the transition regions of the chevron servo patterns.
摘要翻译：用于制造具有最小缺陷的人字形伺服图案的用于纳米压印图案化磁记录盘的母模的方法使用嵌段共聚物的定向自组装。在母模基板上形成化学改性聚合物刷材料的图案。该图案包括在这些倾斜条纹组之间的一组倾斜条纹和界面条。嵌段共聚物材料沉积在图案上，这导致嵌段共聚物的定向自组装作为垂直于衬底的薄片，其形成为嵌段共聚物交替的第一和第二组分的交替倾斜条纹。该组件也形成在界面条上，而是形成平行于基底的薄片。然后除去其中一个部件，留下剩余的部件作为栅格，其用作蚀刻基板以形成母模的掩模。由主模具纳米压印的盘片减少了人字形伺服模式的过渡区域中的缺陷区域。

15. 发明授权

US07976715B2 Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks 有权
标题翻译：使用嵌段共聚物制造用于纳米压印图案化磁记录盘的高位纵横比的母模的方法
公开(公告)号：US07976715B2
公开(公告)日：2011-07-12
申请号：US12539818
申请日：2009-08-12
申请人： Elizabeth Ann Dobisz , Ricardo Ruiz
发明人： Elizabeth Ann Dobisz , Ricardo Ruiz
IPC分类号： C25F3/00 , B44C1/22 , G11B5/706
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/743 , G11B5/82
摘要： A method for making a master mold that is used in the nanoimprinting process to make patterned-media disks with patterned data islands uses guided self-assembly of a block copolymer into its components. Conventional or e-beam lithography is used to first form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is then deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines. Various methods, including conventional lithography, guided self-assembly of a second block copolymer, and e-beam lithography, are then used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has a pattern of either pillars or holes, depending on the method used.
摘要翻译：用于制造在纳米压印过程中制造具有图案化数据岛的图案化介质盘的主模具的方法使用嵌段共聚物向其组分的引导自组装。使用常规或电子束光刻来首先在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或带。然后将嵌段共聚物材料沉积在图案上，导致嵌段共聚物向其组分的引导自组装，以将大致径向的条纹乘以大致的径向线。然后使用各种方法，包括常规光刻，第二嵌段共聚物的引导自组装和电子束光刻，以在大致径向线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有任何柱或孔的图案，这取决于所使用的方法。

16. 发明申请

US20090311363A1 METHOD USING BLOCK COPOLYMERS FOR MAKING A MASTER MOLD WITH HIGH BIT-ASPECT-RATIO FOR NANOIMPRINTING PATTERNED MAGNETIC RECORDING DISKS 有权
标题翻译：使用块状共聚物制备具有高比特比例的主模的纳米压印图形磁记录盘的方法
公开(公告)号：US20090311363A1
公开(公告)日：2009-12-17
申请号：US12539818
申请日：2009-08-12
申请人： Elizabeth Ann Dobisz , Ricardo Ruiz
发明人： Elizabeth Ann Dobisz , Ricardo Ruiz
IPC分类号： C23F1/00 , B05D5/00 , B29C33/00
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/743 , G11B5/82
摘要： A method for making a master mold that is used in the nanoimprinting process to make patterned-media disks with patterned data islands uses guided self-assembly of a block copolymer into its components. Conventional or e-beam lithography is used to first form a pattern of generally radial stripes on a substrate, with the stripes being grouped into annular zones or bands. A block copolymer material is then deposited on the pattern, resulting in guided self-assembly of the block copolymer into its components to multiply the generally radial stripes into generally radial lines. Various methods, including conventional lithography, guided self-assembly of a second block copolymer, and e-beam lithography, are then used to form concentric rings over the generally radial lines. After etching and resist removal, the master mold has a pattern of either pillars or holes, depending on the method used.
摘要翻译：用于制造在纳米压印过程中制造具有图案化数据岛的图案化介质盘的主模具的方法使用嵌段共聚物向其组分的引导自组装。使用常规或电子束光刻来首先在基底上形成大致径向条纹的图案，其中条纹被分组成环形区域或带。然后将嵌段共聚物材料沉积在图案上，导致嵌段共聚物向其组分的引导自组装，以将大致径向的条纹乘以大致的径向线。然后使用各种方法，包括常规光刻，第二嵌段共聚物的引导自组装和电子束光刻，以在大致径向线上形成同心环。在蚀刻和抗蚀剂去除之后，主模具有任何柱或孔的图案，这取决于所使用的方法。

17. 发明授权

US07085110B2 Thermally stable oxidized bias layer structure for magnetoresistive magnetic head for a hard disk drive 失效
标题翻译：用于硬盘驱动器的磁阻磁头的热稳定氧化偏压层结构
公开(公告)号：US07085110B2
公开(公告)日：2006-08-01
申请号：US10615554
申请日：2003-07-07
申请人： Elizabeth Ann Dobisz , James Mac Freitag , Mustafa Michael Pinarbasi , Patrick Rush Webb
发明人： Elizabeth Ann Dobisz , James Mac Freitag , Mustafa Michael Pinarbasi , Patrick Rush Webb
IPC分类号： G11B5/33
CPC分类号： G11B5/3906 , Y10T29/49032
摘要： The magnetic head of the present invention includes a magnetoresistive read head element in which a magnetic bias layer is deposited across the surface of the wafer above the free magnetic layer. Central portions of the biasing layer that correspond to the read head track width are oxidized to essentially remove the magnetic moment of the bias layer material in those central locations. An oxygen diffusion barrier layer is then deposited upon the oxidized central portions of the biasing layer to prevent diffusion or migration of oxygen from the oxidized central regions of the biasing layer. An insulation layer, a second magnetic shield layer and further structures of the magnetic head are subsequently fabricated.
摘要翻译：本发明的磁头包括磁阻读头元件，其中磁偏置层跨过自由磁层上的晶片表面。对应于读头磁道宽度的偏置层的中心部分被氧化以基本上去除那些中心位置处的偏置层材料的磁矩。然后将氧扩散阻挡层沉积在偏置层的氧化中心部分上，以防止氧从偏置层的氧化中心区域扩散或迁移。随后制造绝缘层，第二磁屏蔽层和磁头的其它结构。

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