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    • 11. 发明授权
    • Method for processing substrate
    • 基板处理方法
    • US06221743B1
    • 2001-04-24
    • US09111377
    • 1998-07-07
    • Takao FujikawaYutaka NarukawaItaru MasuokaKohei Suzuki
    • Takao FujikawaYutaka NarukawaItaru MasuokaKohei Suzuki
    • H01L21425
    • H01L21/26533H01L21/76243
    • The present invention provides a method for processing a substrate in which crystal defects occurring according to ion implantation can be prevented from being integrated to form defects such as dislocation or large vacancies in the manufacture of a SIMOX substrate by implanting oxygen atom to a Si base by ion implantation and reacting it with Si to form a buried oxide film. The annealing after ion implantation is performed under a gas atmosphere pressurized to, for example, about 100 MPa. In the pressurized state, a structure having a smaller volume is thermodynamically more stable, and a behavior as increases crystal distortion is arrested in the annealing. Thus, crystal defects can be laid in uniformly dispersed state, vacancies can be also extinguished, and a Si base of good quality suitable for manufacture of ULSI in which defects such as dislocation are reduced can be provided.
    • 本发明提供了一种处理衬底的方法,其中可以防止根据离子注入发生的晶体缺陷被集成在SIMOX衬底的制造中,通过将氧原子注入到Si衬底中而形成诸如位错或大空位的缺陷 离子注入并与Si反应形成掩埋氧化膜。 离子注入后的退火在加压至例如约100MPa的气体气氛下进行。 在加压状态下,具有较小体积的结构在热力学上更稳定,并且在退火中阻止增加晶体变形的行为。 因此,可以以均匀分散的状态铺设晶体缺陷,空位也可以熄灭,并且可以提供适合制造其中诸如位错的缺陷减少的ULSI的良好质量的Si基底。
    • 17. 发明授权
    • X-ray semiconductor detector
    • X射线半导体探测器
    • US06323490B1
    • 2001-11-27
    • US09271981
    • 1999-03-19
    • Mitsushi IkedaManabu TanakaMasaki AtsutaAkira KinnoKohei SuzukiNorihiko Kamiura
    • Mitsushi IkedaManabu TanakaMasaki AtsutaAkira KinnoKohei SuzukiNorihiko Kamiura
    • H05G164
    • H01L27/14692H01L27/14659H01L27/14676H04N5/32H04N5/3658
    • An X-ray semiconductor detector has a pixel array structure in which a plurality of pixel elements are arrayed in a matrix. Each pixel element includes an X-ray/charge conversion film for generating charges in accordance with an incident X-ray, a storage capacitor for storing the signal charges generated in the X-ray/charge conversion film, a signal read transistor for reading the signal charges from the storage capacitor, and a protective diode arranged to remove excessive charges from the storage capacitor and prevent dielectric breakdown of the signal read transistor. The protective diode is arranged below the storage capacitor. Since the protective diode is arranged below the storage capacitor, it does not decrease the pixel density. Since the protective diode is covered with the storage capacitor, it can be shielded from an X-ray. Therefore, variations in OFF current of the protective diode by an X-ray and dielectric breakdown of the protective diode can be prevented.
    • X射线半导体检测器具有其中多个像素元件以矩阵排列的像素阵列结构。 每个像素元件包括用于根据入射的X射线产生电荷的X射线/电荷转换膜,用于存储在X射线/电荷转换膜中产生的信号电荷的存储电容器,用于读取X射线/ 来自存储电容器的信号电荷,以及保护二极管,被配置为从存储电容器去除过多的电荷并防止信号读取晶体管的电介质击穿。 保护二极管布置在存储电容器的下方。 由于保护二极管布置在存储电容器的下方,因此不会降低像素密度。 由于保护二极管被存储电容器覆盖,所以可以屏蔽X射线。 因此,可以防止保护二极管通过X射线的截止电流的变化和保护二极管的介电击穿。
    • 19. 发明授权
    • Syringe holder attachment structure
    • 注射器支架附件结构
    • US5372343A
    • 1994-12-13
    • US54446
    • 1993-04-27
    • Kohei Suzuki
    • Kohei Suzuki
    • B05C5/00F16M13/02H01L21/52F16M11/00
    • F16M13/02H01L24/743H01L2224/743Y10T156/1798
    • A quick and easy mounting and dismounting of a syringe holder to and from a syringe holder mount of a dispensing device of, for example, a bonding machine is accomplished by a combination of a locking member of the syringe holder mount and an engagement recess of one of two attachment pins of the syringe holder. The locking member is urged, via a spring force and at right angles, towards one of two attachment holes formed in the syringe holder mount. The two attachment pins are inserted into the attachment holes of the syringe holder mount when the syringe holder is mounted, and the tip end of the locking member is brought, via the spring force, to engage with the engagement recess of the attachment pin, thus retaining the syringe holder on the syringe holder mount. When dismounting the syringe holder from the mount, the locking member is pulled, thus releasing the engagement between the tip end of the locking member and the engagement recess of the attachment pin.
    • 将注射器固定器快速且容易地安装到例如粘合机的分配装置的注射器支架安装件上并通过注射器支架安装件的锁定构件与一个接合凹部的组合来实现 的注射器支架的两个连接销。 锁定构件通过弹簧力并且以直角推动到形成在注射器保持器座中的两个附接孔中的一个。 当安装注射器保持器时,两个附接销插入注射器支架安装件的附接孔中,并且通过弹簧力使锁定构件的末端与附接销的接合凹部接合,因此 将注射器支架保持在注射器支架支架上。 当从安装座上卸下注射器保持器时,拉动锁定件,从而释放锁定件的末端和连接销的接合凹槽之间的接合。