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    • 11. 发明申请
    • Inspection device, inspection method, and program
    • 检验装置,检验方法和程序
    • US20100079758A1
    • 2010-04-01
    • US12591744
    • 2009-11-30
    • Toru Yoshikawa
    • Toru Yoshikawa
    • G01J4/00
    • G01N21/9501G01N21/21G01N21/956
    • An illuminating optical system of an inspection device selects an arbitrary wavelength region from the light source, and epi-illuminates the sample via the polarizer and the objective lens. A detecting optical system includes an analyzer having a polarization plane intersected with a polarization direction of the polarizer. Then, the detecting optical system detects light from the sample via the objective lens and the analyzer, and acquires a Fourier image of a sample surface based on this light. An imaging section images the Fourier image. An analyzing section performs computation for processing for determining a notable area to be affected by a state of the pattern more than other areas in the Fourier image.
    • 检查装置的照明光学系统从光源中选择任意的波长区域,并且经由偏振器和物镜对样品进行外照射。 检测光学系统包括具有与偏振器的偏振方向相交的偏振面的分析器。 然后,检测光学系统通过物镜和分析器检测来自样品的光,并且基于该光获取样品表面的付里叶图像。 成像部分对傅里叶图像进行成像。 分析部分执行用于处理的计算,用于确定要受图像状态影响的显着区域超过傅立叶图像中的其他区域。
    • 13. 发明授权
    • Film cartridge storage apparatus
    • 胶片暗盒存储装置
    • US5825462A
    • 1998-10-20
    • US569790
    • 1995-12-08
    • Takahisa MiyamoriYoshiyuki YamajiToru Yoshikawa
    • Takahisa MiyamoriYoshiyuki YamajiToru Yoshikawa
    • G03B27/62G03D13/00G03B27/00G03D17/00
    • G03D13/003G03B27/6285
    • A film cartridge storage apparatus for storing a plurality of film cartridges 20 stacked one on another. The stored film cartridges 20 are extracted from the apparatus one after another from the lowermost cartridge in association with a pivotal member 83 of an individual feed mechanism 80; 18; 280 having a first arm portion 83a and a second arm portion 83b. The first arm portion 83a of the pivotal member 83 pivots between a first area and a second area to hold the lowermost film cartridge in the first area and also to feed the lowermost film cartridge in the second area. The second arm portion 83b of the pivotal member allows a film cartridge to fall toward the first arm portion in the first area and also prevents a film cartridge from falling toward the first arm portion in the second area. An elastic escape means 90; 190; 290 is provided for avoiding mutual interference between a film cartridge contacting the second arm portion and a pivotal locus of the second arm portion in the course of the pivotal movement of the second arm portion from the first area to the second area.
    • 一种用于存储多个彼此堆叠的胶片暗盒20的暗盒存储装置。 存储的暗盒20从与单个进给机构80的枢转构件83相关联的最下面的盒中一个接一个地从装置中取出; 18; 280具有第一臂部83a和第二臂部83b。 枢转构件83的第一臂部83a在第一区域和第二区域之间枢转,以将最下面的暗盒保持在第一区域中,并且还将最下面的暗盒送入第二区域。 枢转构件的第二臂部分83b允许暗盒在第一区域中朝向第一臂部分落下,并且还防止暗盒在第二区域中朝向第一臂部落下。 弹性逃逸装置90; 190; 290被设置用于在第二臂部分从第一区域到第二区域的枢转运动的过程中避免与第二臂部分接触的胶片暗盒与第二臂部分的枢转轨迹之间的相互干涉。
    • 14. 发明授权
    • Inspection device, inspection method, and program
    • 检验装置,检验方法和程序
    • US08040512B2
    • 2011-10-18
    • US12591744
    • 2009-11-30
    • Toru Yoshikawa
    • Toru Yoshikawa
    • G01J4/00
    • G01N21/9501G01N21/21G01N21/956
    • An illuminating optical system of an inspection device selects an arbitrary wavelength region from the light source, and epi-illuminates the sample via the polarizer and the objective lens. A detecting optical system includes an analyzer having a polarization plane intersected with a polarization direction of the polarizer. Then, the detecting optical system detects light from the sample via the objective lens and the analyzer, and acquires a Fourier image of a sample surface based on this light. An imaging section images the Fourier image. An analyzing section performs computation for processing for determining a notable area to be affected by a state of the pattern more than other areas in the Fourier image.
    • 检查装置的照明光学系统从光源中选择任意的波长区域,并且经由偏振器和物镜对样品进行外照射。 检测光学系统包括具有与偏振器的偏振方向相交的偏振面的分析器。 然后,检测光学系统通过物镜和分析器检测来自样品的光,并且基于该光获取样品表面的付里叶图像。 成像部分对傅里叶图像进行成像。 分析部分执行用于处理的计算,用于确定要受图像状态影响的显着区域超过傅立叶图像中的其他区域。
    • 18. 发明授权
    • Optical amplifying apparatus
    • 光放大装置
    • US07852550B2
    • 2010-12-14
    • US12014514
    • 2008-01-15
    • Takeo OkaniwaJie WuNobuyuki KagiToru Yoshikawa
    • Takeo OkaniwaJie WuNobuyuki KagiToru Yoshikawa
    • H01S3/00
    • H04B10/294H01S3/06754H01S3/09415H01S3/10015H01S3/10069H01S3/1301H01S3/1305H04B10/2931
    • The present invention provides an optical amplifying apparatus having: a CPU 11 for processing various signals; a plurality of circuits 17, 18 for controlling respective devices 4, 9 required for optical amplification; a first storing unit 14 for storing a program supplied from a user a gate array 12 for storing various parameters for controlling the devices 4, 9, the gate array being updated based on the program which is stored in the first storing unit 14 and sent via the CPU 11; a latch unit 13, provided between the gate array 12 and the circuits 17, 18, for interrupting a signal path from the gate array 12 to the circuits 17, 18 after receiving a starting signal of an update from the CPU 11 until the update being finished and for controlling the circuits 17, 18 based on the parameters stored in the gate array 12 before the signal path is interrupted; and a second storing unit 16 for, at least during the update, storing the various parameters which are stored in the gate array 12 before the update.
    • 本发明提供一种具有:用于处理各种信号的CPU 11的光放大装置; 用于控制光放大所需的各个装置4,9的多个电路17,18; 第一存储单元14,用于存储从用户提供的程序,用于存储用于控制设备4,9的各种参数的门阵列12,基于存储在第一存储单元14中的程序更新门阵列,并经由 CPU 11; 锁存单元13,设置在门阵列12和电路17,18之间,用于在接收到来自CPU 11的更新的起始信号直到更新为止之后中断从门阵列12到电路17,18的信号路径 在信号路径被中断之前基于存储在门阵列12中的参数来完成并控制电路17,18; 以及第二存储单元16,用于至少在更新期间,存储在更新之前存储在门阵列12中的各种参数。
    • 19. 发明申请
    • Surface Inspecting Apparatus
    • 表面检测仪
    • US20090046922A1
    • 2009-02-19
    • US11988119
    • 2006-06-29
    • Toru Yoshikawa
    • Toru Yoshikawa
    • G06K9/00
    • G06T7/001G01N21/9501G01R31/311G06T2207/30148
    • A wafer to be inspected W is placed on an XY stage 1, and is positioned so that the location to be inspected is under an objective lens 2, after which an inspection image (RBG signals) is captured by a camera 3. Then, the incorporated reference image and inspection image are converted to hue by a computer 4. The two images that have been converted to hue are then compared, and defects are detected on the basis of this result. In this case, there is a table of combinations of RGB values with a high probability that pseudo-defects will occur in defect detection, and any pixels in the reference image having RGB values present in this table are not considered defects even if a defect is detected.
    • 要检查的晶片W放置在XY平台1上,并且被定位成使得被检查的位置在物镜2下方,之后由照相机3捕获检查图像(RBG信号)。然后, 通过计算机4将合并的参考图像和检查图像转换为色调。然后比较已经转换为色调的两个图像,并且基于该结果检测缺陷。 在这种情况下,存在RGB值的组合的表,在缺陷检测中会发生伪缺陷的高概率,并且在该表中存在的具有RGB值的参考图像中的任何像素都不被认为是缺陷,即使缺陷是 检测到。
    • 20. 发明授权
    • Surface mounting crystal oscillator
    • 表面贴装晶体振荡器
    • US07190238B2
    • 2007-03-13
    • US11156416
    • 2005-06-20
    • Yasunori HosokawaToru YoshikawaHeiji Takado
    • Yasunori HosokawaToru YoshikawaHeiji Takado
    • H03B5/32
    • H03H9/0514H03H9/0547
    • The present invention relates to a surface mounting crystal oscillator in which an IC chip, a crystal element, and a circuit component are connected together by wire bonding and are housed within a main container having a concave section. The main container has a pair of opposing inner wall step portions along both sides in the longitudinal direction, and this pair of inner wall step portions are also each divided into an upper step portion and a lower-step portion of different heights along the longitudinal direction. At least one of the upper step portions of the pair of inner wall step portions supports one end portion in the lengthwise direction of the crystal element so that the lengthwise direction of the crystal element is aligned in the widthwise direction of the main container. The circuit component is disposed on an inner base surface of the main container below the crystal element.
    • 本发明涉及一种表面安装晶体振荡器,其中IC芯片,晶体元件和电路元件通过引线接合连接在一起,并且容纳在具有凹形部分的主容器内。 主容器沿纵向方向具有一对相对的内壁台阶部分,并且这对内壁台阶部分也分别被分成上下台阶部分和沿纵向的不同高度的下台阶部分 。 所述一对内壁台阶部的上部台阶部中的至少一个支撑在所述结晶体的长度方向上的一个端部,使得所述结晶体的长度方向在所述主容器的宽度方向上排列。 该电路部件设置在该主容器的内底面下方的晶体元件的下方。