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11. 发明申请

US20050013047A1 Magnetic recording medium 失效
标题翻译：磁记录介质
公开(公告)号：US20050013047A1
公开(公告)日：2005-01-20
申请号：US10891055
申请日：2004-07-15
申请人： Mitsuru Takai , Kazuhiro Hattori
发明人： Mitsuru Takai , Kazuhiro Hattori
IPC分类号： G11B5/00 , G11B5/012 , G11B5/60 , G11B5/82 , G11B21/21
CPC分类号： B82Y10/00 , G11B5/012 , G11B5/6082 , G11B5/743 , G11B5/82 , G11B2005/001
摘要： A magnetic recording medium capable of preventing contact with a magnetic head for use in recording or reproduction, during recording or reproducing of record data. The magnetic recording medium has a disk-shaped substrate having a surface formed with an annular data-recording area, an outer area outward of the data-recording area, and an inner area inward of the same. The annular data-recording area has a plurality of tracks separated from each other by concentric separating grooves. At least one of the outer area and the inner is subjected to lift-adjusting treatment for enabling adjustment of lifts applied to the magnetic head. This makes it possible to effectively prevent the magnetic head from being inclined to be brought into contact with the magnetic recording medium.
摘要翻译：一种磁记录介质，能够在记录或再现记录数据期间防止与用于记录或再现的磁头的接触。磁记录介质具有一个具有形成有环形数据记录区域，数据记录区域外部的外部区域和其内部的内部区域的盘形基板。环形数据记录区域具有通过同心分隔槽彼此分离的多个轨道。对外部区域和内部中的至少一个进行升降调节处理，以便能够调节施加到磁头的电梯。这使得可以有效地防止磁头倾斜于与磁记录介质接触。

12. 发明授权

US07538041B2 Magnetic recording medium, method of manufacturing the same, and intermediate for magnetic recording medium 失效
标题翻译：磁记录介质，其制造方法和磁记录介质的中间体
公开(公告)号：US07538041B2
公开(公告)日：2009-05-26
申请号：US11206874
申请日：2005-08-19
申请人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
发明人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
IPC分类号： H01L21/302
CPC分类号： G11B5/855
摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.
摘要翻译：提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料，并且非磁性形成在非磁性材料的凹部的底面的非磁性材料形成的层16形成在凹凸图案的凸部上，同时凸部和凹部的表面基本平坦化，非磁性层16的厚度为1nm以下。

13. 发明授权

US07488429B2 Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium 失效
标题翻译：干蚀刻方法，制造磁记录介质的方法和磁记录介质
公开(公告)号：US07488429B2
公开(公告)日：2009-02-10
申请号：US11156469
申请日：2005-06-21
申请人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
IPC分类号： B44C1/22 , G11B5/82 , G11B5/65 , C03C15/00 , C03C25/68 , C23F1/00
CPC分类号： B82Y10/00 , C23F4/00 , G11B5/732 , G11B5/7325 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855
摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.
摘要翻译：在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。主掩模层主要由碳制成。在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

14. 发明授权

US07470374B2 Manufacturing method and manufacturing apparatus of magnetic recording medium 失效
标题翻译：磁记录介质的制造方法和制造装置
公开(公告)号：US07470374B2
公开(公告)日：2008-12-30
申请号：US10535265
申请日：2004-07-28
申请人： Kazuhiro Hattori , Mitsuru Takai , Shuichi Okawa
发明人： Kazuhiro Hattori , Mitsuru Takai , Shuichi Okawa
IPC分类号： C23F1/00 , H01L21/306
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium, and the like are provided, which can suppress misalignment of a processed shape of divided recording elements and magnetic degradation and can efficiently manufacture a magnetic recording medium having good magnetic characteristics. In the manufacturing method, ion beam etching is used as a dry etching technique for a continuous recording layer 20. Before dry etching of the continuous recording layer 20, a resist layer 26 is removed. As the material for a first mask layer covering the continuous recording layer, diamond like carbon is used.
摘要翻译：提供了一种磁记录介质的制造方法等，其可以抑制分割的记录元件的加工形状的不对准和磁性劣化，并且可以有效地制造具有良好磁特性的磁记录介质。在制造方法中，使用离子束蚀刻作为连续记录层20的干蚀刻技术。在连续记录层20的干蚀刻之前，去除抗蚀剂层26。作为覆盖连续记录层的第一掩模层的材料，使用类金刚石碳。

15. 发明授权

US07223439B2 Method for manufacturing magnetic recording medium and magnetic recording medium 失效
标题翻译：磁记录介质和磁记录介质的制造方法
公开(公告)号：US07223439B2
公开(公告)日：2007-05-29
申请号：US10805434
申请日：2004-03-22
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori
IPC分类号： B05D5/12
CPC分类号： G11B5/855 , G11B5/8408
摘要： A magnetic recording medium and a method for manufacturing the same are provided, which provide high surface recording density and high recording/reading performance. The magnetic recording medium is manufactured by forming an intermediate protective layer between a continuous recording layer and a first mask layer, dividing the continuous recording layer to form divided recording elements, and then removing the first mask layer while leaving the intermediate protective layer on the top of the divided recording elements. Further, gaps between the divided recording elements are filled with a non-magnetic material before removing the first mask layer.
摘要翻译：提供一种提供高表面记录密度和高记录/读取性能的磁记录介质及其制造方法。通过在连续记录层和第一掩模层之间形成中间保护层，分割连续记录层以形成分割的记录元件，然后在将中间保护层留在顶部的同时除去第一掩模层来制造磁记录介质的分割记录元素。此外，在去除第一掩模层之前，用非磁性材料填充划分的记录元件之间的间隙。

16. 发明授权

US07166318B2 Production method and production apparatus for magnetic recording medium 失效
标题翻译：磁记录介质的制造方法和制造装置
公开(公告)号：US07166318B2
公开(公告)日：2007-01-23
申请号：US10791712
申请日：2004-03-04
申请人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
发明人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
IPC分类号： B05D5/12
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/74 , G11B5/743 , G11B5/851 , G11B11/10582
摘要： A production method and a production apparatus for a magnetic recording medium, which enable the efficient production of a discrete type magnetic recording medium, while reliably preventing any deterioration of the partitioned recording elements. The magnetic recording medium production apparatus includes: recording layer processing device, which by forming a plurality of grooves, with a spacing therebetween in a planar direction, in an intermediate product of a magnetic recording medium comprising a continuous recording layer, partitions the continuous recording layer into a plurality of partitioned recording elements; non-magnetic body filling device for filling the grooves between the partitioned recording elements with a non-magnetic body; smoothing device for smoothing the surface of the partitioned recording elements and the non-magnetic body; protective layer formation device for forming a protective layer on the partitioned recording elements and the non-magnetic body; and vacuum retention device which houses the recording layer processing device, the non-magnetic body filling device, the smoothing device, and the protective layer formation device, and maintains the environment surrounding the intermediate product in a state of vacuum.
摘要翻译：一种用于磁记录介质的制造方法和制造装置，其能够有效地生产离散型磁记录介质，同时可靠地防止分隔的记录元件的任何劣化。磁记录介质制造装置包括：记录层处理装置，其在包括连续记录层的磁记录介质的中间产物中，在平面方向上以间隔形成多个凹槽，分隔连续记录层分成多个划分的记录元件; 非磁性体填充装置，用于用非磁性体填充分隔的记录元件之间的凹槽; 平滑装置，用于使划分的记录元件和非磁性体的表面平滑; 用于在分隔的记录元件和非磁性体上形成保护层的保护层形成装置; 以及容纳记录层处理装置，非磁性体填充装置，平滑装置和保护层形成装置的真空保持装置，并且在真空状态下保持围绕中间产品的环境。

17. 发明申请

US20050196650A1 Magnetic recording medium 失效
标题翻译：磁记录介质
公开(公告)号：US20050196650A1
公开(公告)日：2005-09-08
申请号：US11065142
申请日：2005-02-24
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
IPC分类号： G11B5/65 , G11B5/82
CPC分类号： G11B5/855 , Y10T428/24355 , Y10T428/24479 , Y10T428/24488 , Y10T428/24537 , Y10T428/2457
摘要： A magnetic recording medium includes at least a disk substrate 1, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1, and a non-magnetic layer 6 formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer 5 or the non-magnetic layer 6. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width (W1 or W2) is made smaller than width W5 of each convex portion of the magnetic recording layer 5 or width W6 of each concave portion where the non-magnetic layer 6 is formed.
摘要翻译：磁记录介质至少包括盘基板1，在盘基板1上形成有预定的凹凸图案的磁记录层5以及形成在凹凸图案的凹部中的非磁性层6。在磁记录层5或非磁性层6上形成由非磁性材料形成的凸形。每个凸形形成为例如上表面宽度（W 1或W 2）的山形）被制成小于磁记录层5的每个凸部的宽度W 5或形成非磁性层6的每个凹部的宽度W 6。

18. 发明申请

US20050086795A1 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US20050086795A1
公开(公告)日：2005-04-28
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/127 , G11B5/84 , G11B5/855
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译：一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率用于形成较低的非磁性膜。

19. 发明申请

US20050079448A1 Method for forming resist pattern 审中-公开
标题翻译：形成抗蚀剂图案的方法
公开(公告)号：US20050079448A1
公开(公告)日：2005-04-14
申请号：US10925038
申请日：2004-08-25
申请人： Katsuyuki Nakada , Mitsuru Takai , Kazuhiro Hattori
发明人： Katsuyuki Nakada , Mitsuru Takai , Kazuhiro Hattori
IPC分类号： G03F7/09 , G03F7/00 , G03F7/20 , G11B5/84 , G11B5/855 , H01L21/027
CPC分类号： G11B5/855 , G03F7/0017
摘要： A material having an amorphous structure is used as a ground material on which a resist layer is applied. After the resist layer is irradiated with an exposure electron beam to form latent images, the latent images are developed so that a predetermined line-and-space pattern is formed in the resist layer.
摘要翻译：使用具有非晶结构的材料作为施加抗蚀剂层的研磨材料。在用曝光电子束照射抗蚀剂层以形成潜像之后，潜像显影，使得在抗蚀剂层中形成预定的线间距图案。

20. 发明授权

US07531103B2 Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium 失效
标题翻译：掩模形成方法，掩模形成功能层，干蚀刻方法和信息记录介质的制造方法
公开(公告)号：US07531103B2
公开(公告)日：2009-05-12
申请号：US10947289
申请日：2004-09-23
申请人： Shuichi Okawa , Kazuhiro Hattori , Katsuyuki Nakada , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Katsuyuki Nakada , Mitsuru Takai
IPC分类号： B44C1/22
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/24802
摘要： A mask forming method forms an A mask forming functional layer with an amorphous structure so as to cover an etched body, forms a B mask forming functional layer so as to cover the formed A mask forming functional layer, forms a convex/concave pattern in the formed B mask forming functional layer by carrying out a predetermined process to form a B mask on the A mask forming functional layer, and forms an A mask on the etched body by forming a convex/concave pattern in the A mask forming functional layer by dry etching the A mask forming functional layer using the B mask. By doing so, a convex/concave pattern with extremely small pattern fluctuations can be formed in the A mask forming functional layer.
摘要翻译：掩模形成方法形成具有非晶结构的A掩模形成功能层以覆盖蚀刻体，形成B掩模形成功能层，以覆盖所形成的A掩模形成功能层，在其中形成凸/凹图案通过在A掩模形成功能层上进行预定处理以形成B掩模形成B掩模形成功能层，并且通过在A掩模形成功能层中通过干燥形成凸/凹图案在蚀刻体上形成A掩模使用B掩模蚀刻形成A掩模的功能层。通过这样做，可以在A掩模形成功能层中形成具有极小图案波动的凸/凹图案。

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