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11. 发明授权

US09083300B2 Electromechanical systems piezoelectric contour mode differential resonators and filters 有权
标题翻译：机电系统压电轮廓模式差动谐振器和滤波器
公开(公告)号：US09083300B2
公开(公告)日：2015-07-14
申请号：US13094707
申请日：2011-04-26
申请人： Chi Shun Lo , Jonghae Kim , Sang-June Park , Sanghoon Joo , Chengjie Zuo , Changhan Yun
发明人： Chi Shun Lo , Jonghae Kim , Sang-June Park , Sanghoon Joo , Chengjie Zuo , Changhan Yun
IPC分类号： H03H9/70 , H03H9/00 , H01P1/213 , H03H9/02 , H03H9/24 , H03H9/56 , G09G3/34 , H03H3/02
CPC分类号： H03H9/0095 , G09G3/3493 , G09G2310/0267 , G09G2310/027 , H01P1/2135 , H03H9/0014 , H03H9/02228 , H03H9/2431 , H03H9/2436 , H03H9/2463 , H03H9/564 , H03H2003/027 , H03H2009/02496 , H03H2009/02527 , H03H2009/241
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。一方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。压电层设置在第一导电层和第二导电层之间。压电层包括压电材料。压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。

12. 发明授权

US09496255B2 Stacked CMOS chipset having an insulating layer and a secondary layer and method of forming same 有权
标题翻译：具有绝缘层和二次层的叠层CMOS芯片组及其形成方法
公开(公告)号：US09496255B2
公开(公告)日：2016-11-15
申请号：US13356717
申请日：2012-01-24
申请人： Chengjie Zuo , Changhan Yun , Sang-June Park , Chi Shun Lo , Mario F. Velez , Jonghae Kim
发明人： Chengjie Zuo , Changhan Yun , Sang-June Park , Chi Shun Lo , Mario F. Velez , Jonghae Kim
IPC分类号： H01L21/00 , H01L27/06
CPC分类号： H01L27/0688 , H01L2224/18
摘要： A chipset includes a sheet of glass, quartz or sapphire and a first wafer having at least one first circuit layer on a first side of a first substrate layer. The first wafer is connected to the sheet such that the at least one first circuit layer is located between the first substrate layer and the sheet. A second wafer having at least one second circuit layer on a first side of a second substrate layer is connected to the first substrate layer such that the at least one second circuit layer is located between the second substrate layer and the first substrate layer. Also a method of forming a chipset.
摘要翻译：芯片组包括玻璃板，石英或蓝宝石片，以及在第一基底层的第一面上具有至少一个第一电路层的第一晶片。第一晶片连接到片材，使得至少一个第一电路层位于第一基片层和片之间。具有在第二衬底层的第一侧上的至少一个第二电路层的第二晶片连接到第一衬底层，使得至少一个第二电路层位于第二衬底层和第一衬底层之间。还有一种形成芯片组的方法。

13. 发明申请

US20120050236A1 ELECTROMECHANICAL SYSTEMS PIEZOELECTRIC CONTOUR MODE DIFFERENTIAL RESONATORS AND FILTERS 有权
标题翻译：电动系统压电体模式差分共振器和过滤器
公开(公告)号：US20120050236A1
公开(公告)日：2012-03-01
申请号：US13094707
申请日：2011-04-26
申请人： Chi Shun Lo , Jonghae Kim , Sang-June Park , Sanghoon Joo , Chengjie Zuo , Changhan Yun
发明人： Chi Shun Lo , Jonghae Kim , Sang-June Park , Sanghoon Joo , Chengjie Zuo , Changhan Yun
IPC分类号： H01P7/00 , H04B1/04 , H04B1/06 , H01P5/12 , G09G5/00
CPC分类号： H03H9/0095 , G09G3/3493 , G09G2310/0267 , G09G2310/027 , H01P1/2135 , H03H9/0014 , H03H9/02228 , H03H9/2431 , H03H9/2436 , H03H9/2463 , H03H9/564 , H03H2003/027 , H03H2009/02496 , H03H2009/02527 , H03H2009/241
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. In one aspect, a contour mode resonator device includes a first conductive layer with a plurality of first layer electrodes including a first electrode at which a first input signal can be provided and a second electrode at which a first output signal can be provided. A second conductive layer includes a plurality of second layer electrodes including a first electrode proximate the first electrode of the first conductive layer and a second electrode proximate the second electrode of the first conductive layer. A second signal can be provided at the first electrode or the second electrode of the second conductive layer to cooperate with the first input signal or the first output signal to define a differential signal. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. The piezoelectric layer includes a piezoelectric material. The piezoelectric layer is substantially oriented in a plane and capable of movement in the plane responsive to an electric field between the first electrodes or the second electrodes.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。一方面，轮廓模式谐振器装置包括具有多个第一层电极的第一导电层，所述第一导电层包括能够提供第一输入信号的第一电极和可以提供第一输出信号的第二电极。第二导电层包括多个第二层电极，其包括靠近第一导电层的第一电极的第一电极和靠近第一导电层的第二电极的第二电极。可以在第二导电层的第一电极或第二电极处提供第二信号，以与第一输入信号或第一输出信号配合以限定差分信号。压电层设置在第一导电层和第二导电层之间。压电层包括压电材料。压电层基本上定向在平面中并且能够响应于第一电极或第二电极之间的电场在平面中移动。

14. 发明授权

US09406865B2 Composite piezoelectric laterally vibrating resonator 有权
标题翻译：复合压电横向振动谐振器
公开(公告)号：US09406865B2
公开(公告)日：2016-08-02
申请号：US13587618
申请日：2012-08-16
申请人： Chengjie Zuo , Changhan Hobie Yun , Jonghae Kim
发明人： Chengjie Zuo , Changhan Hobie Yun , Jonghae Kim
IPC分类号： H01L41/09 , H01L41/18 , H03H9/02 , H01L41/277
CPC分类号： H01L41/183 , H01L41/277 , H03H9/02015 , H03H9/02228 , Y10T29/42
摘要： A resonator is described. The resonator includes multiple electrodes. The resonator also includes a composite piezoelectric material. The composite piezoelectric material includes at least one layer of a first piezoelectric material and at least one layer of a second piezoelectric material. At least one electrode is coupled to a bottom of the composite piezoelectric material. At least one electrode is coupled to a top of the composite piezoelectric material.
摘要翻译：描述谐振器。谐振器包括多个电极。谐振器还包括复合压电材料。复合压电材料包括至少一层第一压电材料和至少一层第二压电材料。至少一个电极耦合到复合压电材料的底部。至少一个电极耦合到复合压电材料的顶部。

15. 发明申请

US20130214643A1 COMPOSITE PIEZOELECTRIC LATERALLY VIBRATING RESONATOR 有权
标题翻译：复合压电侧向振动谐振器
公开(公告)号：US20130214643A1
公开(公告)日：2013-08-22
申请号：US13587618
申请日：2012-08-16
申请人： Chengjie Zuo , Changhan Hobie Yun , Jonghae Kim
发明人： Chengjie Zuo , Changhan Hobie Yun , Jonghae Kim
IPC分类号： H01L41/18 , H01L41/277
CPC分类号： H01L41/183 , H01L41/277 , H03H9/02015 , H03H9/02228 , Y10T29/42
摘要： A resonator is described. The resonator includes multiple electrodes. The resonator also includes a composite piezoelectric material. The composite piezoelectric material includes at least one layer of a first piezoelectric material and at least one layer of a second piezoelectric material. At least one electrode is coupled to a bottom of the composite piezoelectric material. At least one electrode is coupled to a top of the composite piezoelectric material.
摘要翻译：描述谐振器。谐振器包括多个电极。谐振器还包括复合压电材料。复合压电材料包括至少一层第一压电材料和至少一层第二压电材料。至少一个电极耦合到复合压电材料的底部。至少一个电极耦合到复合压电材料的顶部。

16. 发明申请

US20130113076A1 METAL-SEMICONDUCTOR WAFER BONDING FOR HIGH-Q DEVICES 有权
公开(公告)号：US20130113076A1
公开(公告)日：2013-05-09
申请号：US13293075
申请日：2011-11-09
申请人： Changhan YUN , Chengjie Zuo , Chi Shun Lo , Jonghae Kim , Mario F. Velez
发明人： Changhan YUN , Chengjie Zuo , Chi Shun Lo , Jonghae Kim , Mario F. Velez
IPC分类号： H01L21/02 , H01L29/92
CPC分类号： H01L29/66174 , H01G4/1272 , H01G4/33 , H01L28/40 , H01L28/75
摘要： Methods and apparatus for metal semiconductor wafer bonding for high-Q devices are provided. An exemplary capacitor includes a first plate formed on a glass substrate, a second plate, and a dielectric layer. No organic bonding agent is used between the first plate and the glass substrate, and the dielectric layer can be an intrinsic semiconductor. A extrinsic semiconductor layer that is heavily doped contacts the dielectric layer. The dielectric and extrinsic semiconductor layers are sandwiched between the first and second plates. An intermetallic layer is formed between the first plate and the dielectric layer. The intermetallic layer is thermo compression bonded to the first plate and the dielectric layer. The capacitor can be coupled in a circuit as a high-Q capacitor and/or a varactor, and can be integrated with a mobile device.

17. 发明申请

US20130076209A1 PIEZOELECTRIC RESONATOR HAVING COMBINED THICKNESS AND WIDTH VIBRATIONAL MODES 有权
标题翻译：具有组合厚度和宽度振动模式的压电谐振器
公开(公告)号：US20130076209A1
公开(公告)日：2013-03-28
申请号：US13241356
申请日：2011-09-23
申请人： Chengjie Zuo , Chi Shun Lo , Sanghoon Joo , Changhan Yun , Jonghae Kim
发明人： Chengjie Zuo , Chi Shun Lo , Sanghoon Joo , Changhan Yun , Jonghae Kim
IPC分类号： H01L41/107 , H01L41/04 , H01L41/047
CPC分类号： H03H9/02157 , H03H9/02062 , H03H9/56
摘要： A method and apparatus for a piezoelectric resonator having combined thickness and width vibrational modes are disclosed. A piezoelectric resonator may include a piezoelectric substrate and a first electrode coupled to a first surface of the piezoelectric substrate. The piezoelectric resonator may further include a second electrode coupled to a second surface of the piezoelectric substrate, where the first surface and the second surface are substantially parallel and define a thickness dimension of the piezoelectric substrate. Furthermore, the thickness dimension and the width dimension of the piezoelectric substrate are configured to produce a resonance from a coherent combination of a thickness vibrational mode and a width vibrational mode when an excitation signal is applied to the electrodes.
摘要翻译：公开了一种具有组合的厚度和宽度振动模式的压电谐振器的方法和装置。压电谐振器可以包括压电衬底和耦合到压电衬底的第一表面的第一电极。压电谐振器还可以包括耦合到压电基板的第二表面的第二电极，其中第一表面和第二表面基本平行并且限定压电基板的厚度尺寸。此外，压电基板的厚度尺寸和宽度尺寸被构造成当激励信号施加到电极时，从厚度振动模式和宽度振动模式的相干组合产生谐振。

18. 发明申请

US20130021304A1 PIEZOELECTRIC LATERALLY VIBRATING RESONATOR STRUCTURES WITH ACOUSTICALLY COUPLED SUB-RESONATORS 审中-公开
标题翻译：具有声学耦合子谐振器的压电侧向振动谐振器结构
公开(公告)号：US20130021304A1
公开(公告)日：2013-01-24
申请号：US13186277
申请日：2011-07-19
申请人： Chengjie Zuo , Chi Shun Lo , Changhan Yun , Jonghae Kim
发明人： Chengjie Zuo , Chi Shun Lo , Changhan Yun , Jonghae Kim
IPC分类号： G06F3/038 , H01L41/047
CPC分类号： H03H9/173 , H03H9/02228
摘要： This disclosure provides implementations of electromechanical systems resonator structures, devices, apparatus, systems, and related processes. A resonator structure generally includes a first conductive layer with an input electrode, an output electrode, and a ground electrode. The ground electrode is disposed between the input electrode and the output electrode. In some implementations, the second conductive layer includes an input electrode, an output electrode, and a ground electrode. In some other implementations, a second conductive layer includes a pair of ground electrodes and a signal electrode in the form of an input or output electrode disposed between the ground electrodes. A piezoelectric layer is disposed between the first conductive layer and the second conductive layer. Sub-resonators can be defined in different regions of the structure, such that the piezoelectric layer is capable of moving to produce an output signal having frequencies at a first resonant frequency and a second resonant frequency.
摘要翻译：本公开提供了机电系统谐振器结构，设备，装置，系统和相关过程的实现。谐振器结构通常包括具有输入电极，输出电极和接地电极的第一导电层。接地电极设置在输入电极和输出电极之间。在一些实施方案中，第二导电层包括输入电极，输出电极和接地电极。在一些其他实施方案中，第二导电层包括一对接地电极和设置在接地电极之间的输入或输出电极形式的信号电极。压电层设置在第一导电层和第二导电层之间。次谐振器可以在结构的不同区域中定义，使得压电层能够移动以产生具有第一谐振频率和第二谐振频率的频率的输出信号。

19. 发明授权

US09270254B2 Cross-sectional dilation mode resonators and resonator-based ladder filters 有权
标题翻译：横截面扩张模式谐振器和基于谐振器的梯形滤波器
公开(公告)号：US09270254B2
公开(公告)日：2016-02-23
申请号：US13295978
申请日：2011-11-14
申请人： Chengjie Zuo , Changhan Yun , Chi Shun Lo , Wesley Nathaniel Allen , Mario Francisco Velez , Jonghae Kim , Sanghoon Joo
发明人： Chengjie Zuo , Changhan Yun , Chi Shun Lo , Wesley Nathaniel Allen , Mario Francisco Velez , Jonghae Kim , Sanghoon Joo
IPC分类号： H03H9/15 , H03H9/46 , H03H9/24 , H03H9/54 , H03H9/02
CPC分类号： H03H9/462 , H03H9/02228 , H03H9/2405 , H03H9/2426 , H03H2009/02503 , H03H2009/241
摘要： Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.
摘要翻译：公开了机电系统扩张模式谐振器（DMR）结构。 DMR包括第一电极层，第二电极层和由压电材料形成的压电层。压电体层具有在与X轴正交的X轴和Y轴的平面内的横向距离（D）和与X轴正交的Z轴的厚度（T）。厚度和横向距离T / D的数值比被配置为提供压电层的振动模式，其具有沿Z轴的位移并且沿着X轴和Y轴的平面响应所提供的信号到一个或多个电极。梯形滤波器电路可以用DMR构造为串联和/或分流元件，并且谐振器可以具有螺旋配置。

20. 发明授权

US08987976B2 Piezoelectric resonator having combined thickness and width vibrational modes 有权
标题翻译：具有组合厚度和宽度振动模式的压电谐振器
公开(公告)号：US08987976B2
公开(公告)日：2015-03-24
申请号：US13241356
申请日：2011-09-23
申请人： Chengjie Zuo , Chi Shun Lo , Sanghoon Joo , Changhan Yun , Jonghae Kim
发明人： Chengjie Zuo , Chi Shun Lo , Sanghoon Joo , Changhan Yun , Jonghae Kim
IPC分类号： H01L41/047 , H03H9/02 , H03H9/56
CPC分类号： H03H9/02157 , H03H9/02062 , H03H9/56
摘要： A method and apparatus for a piezoelectric resonator having combined thickness and width vibrational modes are disclosed. A piezoelectric resonator may include a piezoelectric substrate and a first electrode coupled to a first surface of the piezoelectric substrate. The piezoelectric resonator may further include a second electrode coupled to a second surface of the piezoelectric substrate, where the first surface and the second surface are substantially parallel and define a thickness dimension of the piezoelectric substrate. Furthermore, the thickness dimension and the width dimension of the piezoelectric substrate are configured to produce a resonance from a coherent combination of a thickness vibrational mode and a width vibrational mode when an excitation signal is applied to the electrodes.
摘要翻译：公开了一种具有组合的厚度和宽度振动模式的压电谐振器的方法和装置。压电谐振器可以包括压电衬底和耦合到压电衬底的第一表面的第一电极。压电谐振器还可以包括耦合到压电基板的第二表面的第二电极，其中第一表面和第二表面基本平行并且限定压电基板的厚度尺寸。此外，压电基板的厚度尺寸和宽度尺寸被构造成当激励信号施加到电极时，从厚度振动模式和宽度振动模式的相干组合产生谐振。

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