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    • 12. 发明授权
    • Plasma processing apparatus and method thereof
    • 等离子体处理装置及其方法
    • US07332039B2
    • 2008-02-19
    • US10547078
    • 2004-03-04
    • Mitsuhide NogamiEiji Miyamoto
    • Mitsuhide NogamiEiji Miyamoto
    • H01L21/306C23C16/00
    • H01L21/3065C23C16/5093H01J37/32009H01J37/32541H01J37/32724
    • A nozzle head NH of a plasma processing apparatus comprises an annular inner holder 3, an annular inner electrode 11 surrounding this holder 3, an annular outer electrode 21 surrounding this electrode 11, and an annular outer holder 4 surrounding this electrode 21. The inner holder 3 is provided with a plurality of bolts 7 spacedly arranged in the peripheral direction and adapted to push the inner electrode 11 radially outwardly. The outer holder 4 is provided with a plurality of bolts 8 spacedly arranged in the peripheral direction and adapted to push the outer electrode 21 radially inwardly. Owing to this arrangement, the operation for disassembling, assembling and centering the annular electrodes 11, 21 can be carried out with ease.
    • 等离子体处理装置的喷嘴头NH包括环形内保持件3,围绕该保持件3的环形内电极11,围绕该电极11的环形外电极21和围绕该电极21的环形外保持件4。 内保持器3设置有沿圆周方向间隔布置并且适于将内电极11径向向外推的多个螺栓7。 外保持器4设置有沿圆周方向间隔布置并适于径向向内推动外电极21的多个螺栓8。 由于这种结构,可以容易地进行拆卸,组装和定心环形电极11,21的操作。
    • 14. 发明申请
    • Plasma processing apparatus and method
    • 等离子体处理装置及方法
    • US20060260748A1
    • 2006-11-23
    • US10547078
    • 2004-03-04
    • Mitsuhide NogamiEiji Miyamoto
    • Mitsuhide NogamiEiji Miyamoto
    • H01L21/306C23C16/00
    • H01L21/3065C23C16/5093H01J37/32009H01J37/32541H01J37/32724
    • A nozzle head NH of a plasma processing apparatus comprises an annular inner holder 3, an annular inner electrode 11 surrounding this holder 3, an annular outer electrode 21 surrounding this electrode 11, and an annular outer holder 4 surrounding this electrode 21. The inner holder 3 is provided with a plurality of bolts 7 spacedly arranged in the peripheral direction and adapted to push the inner electrode 11 radially outwardly. The outer holder 4 is provided with a plurality of bolts 8 spacedly arranged in the peripheral direction and adapted to push the outer electrode 21 radially inwardly. Owing to this arrangement, the operation for disassembling, assembling and centering the annular electrodes 11, 21 can be carried out with ease.
    • 等离子体处理装置的喷嘴头NH包括环形内保持件3,围绕该保持件3的环形内电极11,围绕该电极11的环形外电极21和围绕该电极21的环形外保持件4。 内保持器3设置有沿圆周方向间隔布置并且适于将内电极11径向向外推的多个螺栓7。 外保持器4设置有沿圆周方向间隔布置并适于径向向内推动外电极21的多个螺栓8。 由于这种结构,可以容易地进行拆卸,组装和定心环形电极11,21的操作。