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    • 11. 发明授权
    • High-frequency switch and integrated high-frequency switch array
    • 高频开关和集成高频开关阵列
    • US6133807A
    • 2000-10-17
    • US270526
    • 1999-03-17
    • Shoichi AkiyamaKazuhiko AdachiYutaka Maita
    • Shoichi AkiyamaKazuhiko AdachiYutaka Maita
    • H01L21/203H01H59/00H01P1/12H01P1/15H01P1/185H01P1/10
    • H01P1/12H01H59/0009
    • A high-frequency switch includes a substrate, external conductors provided on the substrate, and a central conductor provided on the substrate, the external conductors and the central conductor constituting a coplanar high-frequency wave line on the substrate. A deflectable air-bridge is held on the external conductors via an air gap and extends out over the central conductor, the air-bridge being deflectable by an electrostatic field created by an actuation voltage applied between the wave line and the air-bridge. A control-signal conductor generates the actuation voltage between the wave line and the air-bridge. The central conductor acts as the control-signal conductor which generates the actuation voltage between the wave line and the air-bridge. The air-bridge contains a plurality of laminated thin films, the laminated thin films having variable internal stresses that are adjustable to match a particular actuation voltage selected for the switch.
    • 高频开关包括基板,设置在基板上的外部导体和设置在基板上的中心导体,外部导体和中心导体构成基板上的共面高频波纹线。 可偏转的空气桥通过气隙保持在外部导体上,并延伸出中心导体,空气桥可通过施加在波纹线和气桥之间的致动电压产生的静电场而偏转。 控制信号导体在波纹线和气桥之间产生致动电压。 中心导体充当控制信号导体,其在波纹线和气桥之间产生致动电压。 空气桥包含多个层压薄膜,层压薄膜具有可变的内部应力,其可调节以匹配为开关选择的特定致动电压。