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    • 20. 发明申请
    • Method of Fabricating Semiconductor Device and Semiconductor Device Fabricated Thereby
    • 由此制造半导体器件和半导体器件的方法
    • US20070298600A1
    • 2007-12-27
    • US11425841
    • 2006-06-22
    • Bong-seok SuhHong-jae ShinSun-jung LeeMin-chul SunJung-hoon Lee
    • Bong-seok SuhHong-jae ShinSun-jung LeeMin-chul SunJung-hoon Lee
    • H01L21/3205
    • H01L21/76846
    • A method of fabricating a semiconductor device and a semiconductor device fabricated thereby. The method of fabricating the semiconductor device includes forming gate electrodes on a semiconductor substrate; forming source/drain regions within the semiconductor substrate so as to be located at both sides of each of the gate electrodes; forming a nickel silicide layer on surfaces of the gate electrodes and the source/drain regions by evaporating nickel or nickel alloy on the semiconductor substrate formed with the gate electrodes and the source/drain regions and then performing a thermal process on the nickel or the nickel alloy; forming an interlayer insulating layer, which is formed with contact holes through which a surface of the nickel silicide layer is exposed, on a surface obtained after the above processes have been performed; forming an ohmic layer by evaporating a refractory metal conformably along the contact holes, the refractory metal being converted to silicide at a temperature of 500° C. or more; forming a diffusion barrier on the ohmic layer conformably along the contact holes; and forming a metal layer by burying a metal material within the contact holes.
    • 一种制造半导体器件的方法及其制造的半导体器件。 制造半导体器件的方法包括在半导体衬底上形成栅电极; 在半导体衬底内形成源/漏区,以便位于每个栅电极的两侧; 通过在形成有栅电极和源极/漏极区域的半导体衬底上蒸发镍或镍合金,然后在镍或镍上进行热处理,在栅电极和源/漏区的表面上形成硅化镍层 合金; 形成层间绝缘层,所述层间绝缘层在进行上述处理后得到的表面上形成有暴露所述镍硅化物层的表面的接触孔; 通过沿着接触孔顺应蒸发难熔金属形成欧姆层,难熔金属在500℃或更高的温度下转化为硅化物; 在欧姆层上沿着接触孔顺应地形成扩散阻挡层; 以及通过在接触孔内埋入金属材料来形成金属层。