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    • 11. 发明申请
    • Low cost fabrication method for high voltage, high drain current MOS transistor
    • 低成本高漏极电流MOS晶体管制造方法
    • US20050118753A1
    • 2005-06-02
    • US10725642
    • 2003-12-02
    • Taylor EflandJozef MitrosImran Khan
    • Taylor EflandJozef MitrosImran Khan
    • H01L21/336H01L21/8234H01L29/08H01L29/10H01L29/423H01L29/78
    • H01L29/0847H01L29/0878H01L29/1083H01L29/1087H01L29/42368H01L29/66659H01L29/7835
    • A method for reducing the drain resistance of a drain-extended MOS transistor in a semiconductor wafer, while maintaining a high transistor breakdown voltage. The method provides a first well (502) of a first conductivity type, operable as the extension of the transistor drain (501) of the first conductivity type; portions of the well are covered by a first insulator (503) having a first thickness. A second well (504) of the opposite conductivity type is intended to contain the transistor source (506) of the first conductivity type; portions of the second well are covered by a second insulator (507) thinner than the first insulator. The first and second wells form a junction (505) that terminates at the second insulator (530a, 530b). The method deposits a photoresist layer (510) over the wafer, which is patterned by opening a window (510a) that extends from the drain to the junction termination. Next, ions (540) of the first conductivity type are implanted through the window into the first well; these said ions have an energy to limit the penetration depth (541) to the first insulator thickness, and a dose to create a well region (560) of high doping concentration adjacent to the junction termination (530a).
    • 一种在保持高晶体管击穿电压的同时降低半导体晶片中的漏极扩展MOS晶体管的漏极电阻的方法。 该方法提供第一导电类型的第一阱(50​​2),其可操作为第一导电类型的晶体管漏极(501)的延伸; 阱的一部分被具有第一厚度的第一绝缘体(503)覆盖。 相反导电类型的第二阱(504)旨在包含第一导电类型的晶体管源(506); 第二阱的部分被比第一绝缘体薄的第二绝缘体(507)覆盖。 第一和第二阱形成终止于第二绝缘体(530a,530b)的结(505)。 该方法将光致抗蚀剂层(510)沉积在晶片之上,其通过打开从漏极延伸到结终端的窗口(510a)而被图案化。 接下来,通过窗口将第一导电类型的离子(540)注入到第一阱中; 这些所述离子具有将穿透深度(541)限制到第一绝缘体厚度的能量,以及用于产生邻近连接终端(530a)的高掺杂浓度的阱区(560)的剂量。
    • 17. 发明授权
    • Method and apparatus for performing semiconductor memory operations
    • 用于执行半导体存储器操作的方法和装置
    • US08040738B2
    • 2011-10-18
    • US12346699
    • 2008-12-30
    • Hagop NazarianImran KhanChieu-Yin Chia
    • Hagop NazarianImran KhanChieu-Yin Chia
    • G11C11/34
    • G11C16/24G11C16/26G11C16/3454
    • A semiconductor memory device and a method for performing a memory operation in the semiconductor memory device are provided. The semiconductor memory device includes a plurality of predetermined memory arrays, a bitline decoder, and a controller. The controller provides the memory operation signal to the bitline decoder and, after precharging bitlines of the plurality of predetermined memory arrays, performs the memory operation on selected memory cells in the one or more of the plurality of predetermined memory arrays in accordance with the memory operation signal. The bitline decoder includes a plurality of sector select transistors and determines selected ones of the plurality of predetermined memory arrays and selected rows and unselected rows within the selected ones of the plurality of predetermined memory arrays in response to the memory operation signal. The bitline decoder also precharges the bitlines of the plurality of predetermined memory arrays to a first voltage potential then shuts off the sector select transistors of unselected ones of the plurality of predetermined memory arrays and the unselected rows of the selected ones of the plurality of predetermined memory arrays while maintaining the sector select transistors of the selected rows of the selected ones of the plurality of predetermined memory arrays at the first voltage potential prior to the controller performing the memory operation.
    • 提供半导体存储器件和用于在半导体存储器件中执行存储器操作的方法。 半导体存储器件包括多个预定存储器阵列,位线解码器和控制器。 控制器向位线解码器提供存储器操作信号,并且在预充电多个预定存储器阵列的位线之后,根据存储器操作对多个预定存储器阵列中的一个或多个存储器单元中的选定存储单元执行存储器操作 信号。 位线解码器包括多个扇区选择晶体管,并且响应于存储器操作信号确定多个预定存储器阵列中的选定的行以及多个预定存储器阵列中的选定行中的选定行和未选择的行。 位线解码器还将多个预定存储器阵列的位线预先充电到第一电压电位,然后关闭多个预定存储器阵列中未选择的存储器阵列的扇区选择晶体管和多个预定存储器中的所选择的存储器的未选择的行 阵列,同时在所述控制器执行所述存储器操作之前,将所述多个预定存储器阵列中的选定行的选定行的扇区选择晶体管保持在所述第一电压电位。