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    • 16. 发明授权
    • Apparatus for attaching substrates
    • 用于安装基板的装置
    • US07765682B2
    • 2010-08-03
    • US11866892
    • 2007-10-03
    • Jae Seok HwangDong Gun Kim
    • Jae Seok HwangDong Gun Kim
    • B23P19/00H01L21/10
    • H01L21/67092G02F2001/133354Y10T29/5313Y10T29/53191
    • An apparatus for attaching substrates is provided with a buffering member between an upper chamber and a lower chamber. The buffering member reduces a load applied to a lifting device during vacuum exhaustion of a sealing space between the chambers. Therefore, it is possible to reduce a force applied to a lifting screw and a frame supporting a chamber, thereby extending the lifetime of the substrate attaching apparatus and component replacement. Also, it is possible to increase a lower chamber supporting force of a lifting part by coupling the lifting part to an external frame with a fixing device. As the result, the lower chamber is stably fixed and thus it is possible to reduce failures in a substrate attaching process.
    • 用于安装基板的装置在上室和下室之间设置有缓冲构件。 缓冲构件减小了在室之间的密封空间的真空耗尽期间施加到提升装置的负载。 因此,可以减小施加在提升螺钉和支撑室的框架上的力,从而延长基板安装装置的寿命和部件更换。 此外,通过用提升部件将定位装置连接到外部框架,可以增加提升部件的下室支撑力。 结果,下室稳定地固定,因此可以减少基板附着过程中的故障。