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11. 发明授权

US07714998B2 Image splitting in optical inspection systems 有权
标题翻译：光学检测系统中的图像分割
公开(公告)号：US07714998B2
公开(公告)日：2010-05-11
申请号：US11944684
申请日：2007-11-26
申请人： Dov Furman , Roy Kaner , Ori Gonen , Daniel Mandelik , Eran Tal , Shai Silberstein
发明人： Dov Furman , Roy Kaner , Ori Gonen , Daniel Mandelik , Eran Tal , Shai Silberstein
IPC分类号： G01N21/00
CPC分类号： G01N21/95607 , G01N21/21 , G01N2021/95615 , G01N2201/068
摘要： In an optical inspection tool, an image of an object under inspection, such as a semiconductor wafer, may be obtained using imaging optics defining a focal plane. Light comprising the image can be split into portions that are detected using multiple detectors which each register a portion of the image. The image of the object at the focal plane can be split into two, three, or more parts by polarization-based beam splitters and/or lenses positioned tangent to the focal plane. The splitting apparatus may comprise a pair of arrays of half-cylinder lenses comprising a convex side and a flat side. The arrays can be positioned with the cylinder axes perpendicular to one another and the flat sides facing each other. Thus, the pair of arrays can divide incoming light into a plurality of rectangular portions without introducing non-uniformities which would occur if several spherical lenses are configured for use in a rectangular array.
摘要翻译：在光学检查工具中，可以使用限定焦平面的成像光学元件来获得被检查物体（诸如半导体晶片）的图像。包括图像的光可以被分割成使用多个检测器检测的部分，每个检测器记录图像的一部分。在焦平面处的物体的图像可以通过基于偏振的分束器和/或与焦平面相切的透镜分离成两个，三个或更多个部分。分割装置可以包括一对半柱透镜，其包括凸面和平坦侧。阵列可以被定位成使得圆柱轴线彼此垂直并且平坦的面朝向彼此。因此，一对阵列可以将入射光分成多个矩形部分，而不会引入不均匀性，如果若干球形透镜配置为用于矩形阵列，则会发生不均匀性。

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