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    • 17. 发明授权
    • Life extension of photoresist developer solutions
    • 光刻胶显影剂溶液的寿命延长
    • US5853963A
    • 1998-12-29
    • US909168
    • 1997-08-11
    • Rajwant SinghGerald A. Krulik
    • Rajwant SinghGerald A. Krulik
    • G03F7/32G03C5/31
    • G03F7/322
    • This invention relates to a method for increasing the effective process life and chemical efficiency of use of aqueous-based developer solutions used for chemical development of photoresists such as are used in the printed circuit industry. The activity is maintained by regenerating some of byproducts during the process to active carbonate, by controlled additions of alkaline hydroxide instead if conventional carbonate solution. The pH and thus the development speed can automatically be controlled at any desired constant value. This invention allows simple automation of printed circuit photoresist development, with reduced chemical costs and increased chemical usage efficiency and thus reducing the industrial waste volume.
    • 本发明涉及一种增加使用用于印刷电路工业中使用的光致抗蚀剂化学发光的水性显影剂溶液的有效工艺寿命和化学效率的方法。 通过在过程中将一些副产物再生成活性碳酸酯,通过控制添加碱性氢氧化物代替传统的碳酸盐溶液来维持活性。 pH和因此显影速度可以自动控制在任何所需的恒定值。 本发明允许印刷电路光刻胶显影的简单自动化,具有降低的化学成本和增加的化学品使用效率,从而减少工业废物体积。