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    • 19. 发明申请
    • Laser irradiation device and laser induced thermal imaging method
    • 激光照射装置和激光诱导热成像方法
    • US20060188825A1
    • 2006-08-24
    • US11358314
    • 2006-02-22
    • Tae-Min KangJae-Ho LeeSeong-Taek Lee
    • Tae-Min KangJae-Ho LeeSeong-Taek Lee
    • G03F7/20
    • B23K26/0661B23K26/0604B23K26/0648B23K26/066B41J2/4753B41M5/38221
    • A laser irradiation device includes a laser generator for patterning and a laser generator for preheating. A laser induced thermal imaging (LITI) method, includes preparing an acceptor substrate, laminating a donor substrate on the acceptor substrate, and irradiating a laser beam onto a predetermined region of the donor substrate and carrying out transfer using a laser irradiation device having a laser generator for patterning and a laser generator for preheating. Advantageously, a laser beam having high intensity generated by the laser generator for patterning is used to prevent the transfer layer from being degraded, and a laser beam generated by the laser generator for preheating is simultaneously used for preheating so that an edge open failure does not occur and the transfer can be readily carried out even in a portion having a step of the acceptor substrate.
    • 激光照射装置包括用于图案化的激光发生器和用于预热的激光发生器。 激光诱导热成像(LITI)方法包括制备受主衬底,在受主衬底上层叠施主衬底,并将激光束照射到施主衬底的预定区域上,并使用具有激光的激光照射装置进行转印 用于图案化的发生器和用于预热的激光发生器。 有利地,使用由用于图案化的激光发生器生成的具有高强度的激光束来防止转印层劣化,并且由激光发生器产生的用于预热的激光束同时用于预热,使得边缘开路故障不 即使在具有受主基板的台阶的部分中也可容易地进行转印。