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    • 12. 发明授权
    • Method of manufacturing thin film transistor and thin film transistor substrate
    • 制造薄膜晶体管和薄膜晶体管基板的方法
    • US08378421B2
    • 2013-02-19
    • US13350037
    • 2012-01-13
    • Jae Bon KooIn-Kyu YouSeongdeok AhnKyoung Ik Cho
    • Jae Bon KooIn-Kyu YouSeongdeok AhnKyoung Ik Cho
    • H01L27/12
    • H01L29/78603H01L27/1266H01L29/66757H01L29/78618
    • A thin film transistor substrate. The thin film transistor substrate includes a substrate, an adhesive layer on the substrate, and a semiconductor layer having a first doped region, a second doped region and a channel region on the adhesive layer. The thin film transistor substrate further includes a first dielectric layer on the semiconductor layer, a gate electrode overlapping the channel region, a second dielectric layer on the first dielectric layer and the gate electrode, a source electrode disposed on the second insulating layer, and a drain electrode spaced apart from the source electrode on the source electrode. The channel region is disposed between the first doped region and the second doped region, and has a transmittance higher than those of the first doped region and the second doped region.
    • 薄膜晶体管基板。 薄膜晶体管衬底包括衬底,衬底上的粘合剂层,以及在粘合剂层上具有第一掺杂区域,第二掺杂区域和沟道区域的半导体层。 薄膜晶体管基板还包括半导体层上的第一介电层,与沟道区重叠的栅极电极,第一介电层上的第二电介质层和栅极电极,设置在第二绝缘层上的源电极和 漏电极与源电极上的源电极间隔开。 沟道区域设置在第一掺杂区域和第二掺杂区域之间,并且具有高于第一掺杂区域和第二掺杂区域的透射率的透射率。