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    • 20. 发明授权
    • Optical scanning device
    • 光学扫描装置
    • US07164624B2
    • 2007-01-16
    • US10492451
    • 2002-10-16
    • Petrus Theodorus JutteJacobus Maria Antonius Van Den Eerenbeemd
    • Petrus Theodorus JutteJacobus Maria Antonius Van Den Eerenbeemd
    • G11B7/00G02B27/40
    • G11B7/1381G11B7/0909G11B7/1365G11B7/1378G11B7/1395
    • An optical scanning device (1) for scanning an information layer (2) includes a radiation source (6) for supplying a radiation beam (14), a lens system (7) having an optical axis (OO′), and a detection system 8) including: (i) an astigmatism generating element (9) for generating a first amount of astigmatism (W1) represented by a vector (Wo,1, θ1), so as to transform the radiation beam to a first astigmatic radiation beam (29); (ii) an astigmatism correcting element (27) for generating a second amount of astigmatism (W2) represented by a vector (Wo,2, θ2), so as to transform the first astigmatic radiation beam to a second astigmatic radiation beam (30) having a third amount of astigmatism (W3) represented by a vector (Wo,3, θ3), and (iii) a detector (28) for transforming the second astigmatic radiation beam to an electrical signal. According to the invention, W3 is adapted to the detector and that Wo,2 and θ2 comply substantially with the following equation: (Wo,1, 2θ1)+(Wo,2, 2θ2)=(Wo,3, 2θ3).
    • 用于扫描信息层(2)的光学扫描装置(1)包括用于提供辐射束(14)的辐射源(6),具有光轴(OO')的透镜系统(7)和检测系统 8)包括:(i)用于产生由矢量(W 1,...,Y 2)表示的第一散光量(W 1 N 1)的像散生成元件(9) 以将辐射束变换为第一散光辐射束(29); (ii)用于产生由矢量(W 2,...,O 2)表示的第二散光量(W 2 2 N)的散光校正元件(27) 以便将第一散光辐射束转换成具有由矢量(W SUB)表示的第三散光量(W 3 3 N)的第二散光辐射束(30) (iii),用于将第二散光辐射束变换为电信号的检测器(28)。 根据本发明,W 3适用于检测器,并且W 2,O 2和θ2 2基本上符合以下等式:( (W 1,...,W 2,...,W 2,...,W 2, 3,3,2θ3)。