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    • 11. 发明申请
    • RESIDUAL GAS ANALYZER
    • 残留气体分析仪
    • US20100134116A1
    • 2010-06-03
    • US12294888
    • 2007-03-09
    • Toru IkedaJunji AokiKotaro Takijiri
    • Toru IkedaJunji AokiKotaro Takijiri
    • G01N27/62
    • G01N27/62H01J49/00
    • Provided is an excellent residual gas analyzer, which can perform measurement by being suitably arranged even in small areas, such as those in semiconductor equipments, and can perform measurement to display of measurement results without an external personal computer. The analyzer is provided with a sensor unit (1) having a sensor section (11) for detecting a residual gas; an operating section for receiving operation for controlling the sensor section (11); a residual gas analysis processing section for processing analysis of the residual gas based on the output from the sensor section (11); and an analysis processing result screen display section for displaying on a screen the analysis processing results obtained from the residual gas analysis processing section. The analyzer is also provided with a device main body (2) which can be in a mounted status (P1) wherein the sensor unit (1) is mounted or in a removed status (P2) wherein the sensor unit is removed.
    • 提供了一种优异的残留气体分析器,其可以通过适当地布置在诸如半导体设备中的小区域中来进行测量,并且可以在没有外部个人计算机的情况下进行测量以显示测量结果。 该分析仪具有传感器单元(1),该传感器单元具有用于检测残余气体的传感器部分(11) 用于接收用于控制传感器部分(11)的操作的操作部分; 残留气体分析处理部,其基于所述传感器部(11)的输出来进行所述残留气体的分析处理。 以及分析处理结果画面显示部,用于在画面上显示从残留气体分析处理部得到的分析处理结果。 分析仪还设置有可以处于其中安装传感器单元(1)的安装状态(P1)的装置主体(2)或其中传感器单元被移除的去除状态(P2)。