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    • 19. 发明申请
    • CAPACITOR
    • 电容器
    • US20100134950A1
    • 2010-06-03
    • US12628598
    • 2009-12-01
    • Hoon-Sang ChoiKi-Vin ImSe-Hoon OhSang-Yeol KangCha-Young Yoo
    • Hoon-Sang ChoiKi-Vin ImSe-Hoon OhSang-Yeol KangCha-Young Yoo
    • H01G4/30H01L29/92
    • H01G4/33H01G4/01H01L27/10817H01L27/10852H01L28/91
    • A capacitor includes a substrate, a plurality of first storage electrodes, a plurality of second storage electrodes, a first supporting layer pattern, a dielectric layer and a plate electrode. A plurality of contact pads is formed I the substrate. The first storage electrodes are arranged along lines parallel with a first direction and electrically connected to the contact pads, respectively. The second storage electrodes are respectively stacked on the first storage electrodes. The first supporting layer pattern extends in a direction parallel with the first direction between adjacent second storage electrodes and makes contact with the adjacent second storage electrodes to support the second storage electrodes. The dielectric layer is formed on the first and second storage electrodes. The plate electrode is formed on the dielectric layer.
    • 电容器包括基板,多个第一存储电极,多个第二存储电极,第一支撑层图案,电介质层和平板电极。 在基板上形成多个接触焊盘。 第一存储电极沿着与第一方向平行的线分别布置并且电连接到接触垫。 第二存储电极分别堆叠在第一存储电极上。 第一支撑层图案在与相邻的第二存储电极之间的第一方向平行的方向上延伸,并与相邻的第二存储电极接触以支撑第二存储电极。 介电层形成在第一和第二存储电极上。 在电介质层上形成平板电极。