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    • 12. 发明授权
    • Hydrogen sensor and method of manufacturing the same
    • 氢传感器及其制造方法
    • US08468872B2
    • 2013-06-25
    • US13059882
    • 2010-12-03
    • Woo Young LeeJun Min LeeEun Yeong Lee
    • Woo Young LeeJun Min LeeEun Yeong Lee
    • G01N27/04G01M3/04
    • G01N27/127G01N33/005
    • A novel method of manufacturing a hydrogen sensor is disclosed. The method includes the steps of forming a thin film made of a transition metal or an alloy thereof on a surface of an elastic substrate, and forming a plurality of nanogaps in the thin film formed on the surface of the elastic substrate by applying a tensile force to the elastic substrate. The nanogaps are formed as the thin film is stretched in a direction in which the tensile force acts while being contracted in a direction perpendicular to the direction in which the tensile force acts when the tensile force is applied, and is contracted again in the direction in which the tensile force is released while being stretched again in the direction perpendicular to the direction in which the tensile force is released when the tensile force is released.
    • 公开了制造氢传感器的新颖方法。 该方法包括以下步骤:在弹性基材的表面上形成由过渡金属或其合金制成的薄膜,并通过施加张力在所述弹性基材的表面上形成的薄膜中形成多个纳米点 到弹性基材。 当薄膜在拉伸力作用的方向上被拉伸时,形成纳米薄膜,同时在垂直于张力作用于拉伸力的方向的方向收缩,并且再次沿着 当拉伸力被释放时,张力再次沿与拉伸力释放方向垂直的方向被拉伸。
    • 14. 发明申请
    • HYDROGEN SENSOR AND METHOD OF MANUFACTURING THE SAME
    • 氢传感器及其制造方法
    • US20110259083A1
    • 2011-10-27
    • US13059882
    • 2010-12-03
    • Woo Young LeeJun Min LeeEun Yeong Lee
    • Woo Young LeeJun Min LeeEun Yeong Lee
    • G01N9/00C23F1/04B05D5/12B05D3/10B82Y40/00
    • G01N27/127G01N33/005
    • A novel method of manufacturing a hydrogen sensor is disclosed. The method includes the steps of forming a thin film made of a transition metal or an alloy thereof on a surface of an elastic substrate, and forming a plurality of nanogaps in the thin film formed on the surface of the elastic substrate by applying a tensile force to the elastic substrate. The nanogaps are formed as the thin film is stretched in a direction in which the tensile force acts while being contracted in a direction perpendicular to the direction in which the tensile force acts when the tensile force is applied, and is contracted again in the direction in which the tensile force is released while being stretched again in the direction perpendicular to the direction in which the tensile force is released when the tensile force is released.
    • 公开了制造氢传感器的新颖方法。 该方法包括以下步骤:在弹性基材的表面上形成由过渡金属或其合金制成的薄膜,并通过施加张力在所述弹性基材的表面上形成的薄膜中形成多个纳米点 到弹性基材。 当薄膜在拉伸力作用的方向上被拉伸时,形成纳米薄膜,同时在垂直于张力作用于拉伸力的方向的方向收缩,并且再次沿着 当拉伸力被释放时,张力再次沿与拉伸力释放方向垂直的方向被拉伸。
    • 15. 发明授权
    • Method for manufacturing hydrogen sensors using Pd nano wire
    • 使用Pd纳米线制造氢传感器的方法
    • US07875194B2
    • 2011-01-25
    • US11959959
    • 2007-12-19
    • Woo Young LeeKye Jin JeonEun Song Yi Lee
    • Woo Young LeeKye Jin JeonEun Song Yi Lee
    • C23F1/00
    • G01N33/005B82Y15/00
    • Disclosed is a method for manufacturing a hydrogen sensor using Pd nano-wires. The method includes steps of forming an external electrode pattern on a substrate applying a first resin layer to the substrate and forming a resin layer nano-channel pattern; depositing Pd on the substrate having the nano-channel pattern, by sputtering, and removing the first resin layer to form Pd nano-wires; applying a second resin layer to the substrate having the Pd nano-wires, and forming a resin layer pattern on the external electrode pattern, at opposing ends of the Pd nano-wires, and at predetermined positions between the external electrode pattern and the opposing ends of the Pd nano-wires; and depositing conductive metal on the resin layer pattern and removing the resin layer pattern, thereby electrically connecting the external electrode pattern to the Pd nano-wires.
    • 公开了使用Pd纳米线制造氢传感器的方法。 该方法包括以下步骤:在基板上施加第一树脂层并形成树脂层纳米通道图案的基板上形成外部电极图案; 通过溅射在具有纳米通道图案的衬底上沉积Pd并除去第一树脂层以形成Pd纳米线; 在具有Pd纳米线的基板上施加第二树脂层,在外部电极图案上形成树脂层图案,在Pd纳米线的相对端,并且在外部电极图案和相对端之间的预定位置 的Pd纳米线; 并在树脂层图案上沉积导电金属并除去树脂层图案,从而将外部电极图案电连接到Pd纳米线。