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    • 11. 发明申请
    • Semiconductor Device and Semiconductor Module Including the Same
    • 半导体器件和包括其的半导体模块
    • US20110175229A1
    • 2011-07-21
    • US12944876
    • 2010-11-12
    • Bong-Soo KimKwang-Youl ChunSang-Bin Ahn
    • Bong-Soo KimKwang-Youl ChunSang-Bin Ahn
    • H01L23/522
    • H01L23/481H01L21/76897H01L21/823475H01L21/823481H01L23/485H01L23/535H01L2924/0002H01L2924/00
    • Integrated circuit devices include a semiconductor substrate having a plurality of trench isolation regions therein that define respective semiconductor active regions therebetween. A trench is provided in the semiconductor substrate. The trench has first and second opposing sidewalls that define opposing interfaces with a first trench isolation region and a first active region, respectively. A first electrical interconnect is provided at a bottom of the trench. An electrically insulating capping pattern is provided, which extends between the first electrical interconnect and a top of the trench. An interconnect insulating layer is also provided, which lines the first and second sidewalls and bottom of the trench. The interconnect insulating layer extends between the first electrical interconnect and the first active region. A recess is provided in the first active region. The recess has a sidewall that defines an interface with the interconnect insulating layer. A second electrical interconnect is also provided, which extends on: (i) an upper surface of the first trench isolation region, (ii) the electrically insulating capping pattern; and (iii) the sidewall of the recess. The first and second electrical interconnects extend across the semiconductor substrate in first and second orthogonal directions, respectively.
    • 集成电路器件包括在其中具有多个沟槽隔离区域的半导体衬底,其中限定了它们之间的相应的半导体有源区。 沟槽设置在半导体衬底中。 沟槽具有分别限定与第一沟槽隔离区域和第一有源区域相对的界面的第一和第二相对的侧壁。 第一电互连设置在沟槽的底部。 提供了一种电绝缘覆盖图案,其在第一电互连和沟槽的顶部之间延伸。 还提供了互连绝缘层,其将沟槽的第一和第二侧壁和底部排列。 互连绝缘层在第一电互连和第一有源区之间延伸。 在第一活动区域设置有凹部。 凹部具有限定与互连绝缘层的界面的侧壁。 还提供了第二电互连,其延伸在:(i)第一沟槽隔离区的上表面,(ii)电绝缘封盖图案; 和(iii)凹槽的侧壁。 第一和第二电互连分别在第一和第二正交方向跨越半导体衬底延伸。
    • 12. 发明授权
    • Semiconductor device having vertical transistor and method of fabricating the same
    • 具有垂直晶体管的半导体器件及其制造方法
    • US07781285B2
    • 2010-08-24
    • US11450936
    • 2006-06-09
    • Bong-Soo KimKang-Yoon LeeDong-Gun ParkJae-Man YoonSeong-Goo KimHyeoung-Won Seo
    • Bong-Soo KimKang-Yoon LeeDong-Gun ParkJae-Man YoonSeong-Goo KimHyeoung-Won Seo
    • H01L21/8242
    • H01L27/10894H01L27/10876H01L29/66666H01L29/7827
    • There are provided a semiconductor device having a vertical transistor and a method of fabricating the same. The method includes preparing a semiconductor substrate having a cell region and a peripheral circuit region. Island-shaped vertical gate structures two-dimensionally aligned along a row direction and a column direction are formed on the substrate of the cell region. Each of the vertical gate structures includes a semiconductor pillar and a gate electrode surrounding a center portion of the semiconductor pillar. A bit line separation trench is formed inside the semiconductor substrate below a gap region between the vertical gate structures, and a peripheral circuit trench confining a peripheral circuit active region is formed inside the semiconductor substrate of the peripheral circuit region. The bit line separation trench is formed in parallel with the column direction of the vertical gate structures. A bit line separation insulating layer and a peripheral circuit isolation layer are formed inside the bit line separation trench and the peripheral circuit trench, respectively.
    • 提供了具有垂直晶体管的半导体器件及其制造方法。 该方法包括制备具有单元区域和外围电路区域的半导体衬底。 在单元区域的基板上形成沿行方向和列方向二维排列的岛状的垂直栅极结构。 每个垂直栅极结构包括半导体柱和围绕半导体柱的中心部分的栅电极。 在垂直栅极结构之间的间隙区域的下方,在半导体衬底的内部形成有位线分离沟槽,并且在外围电路区域的半导体衬底的内部形成限制外围电路有源区的外围电路沟道。 位线分离沟槽与垂直栅极结构的列方向平行地形成。 位线分离绝缘层和外围电路隔离层分别形成在位线分离沟槽和外围电路沟槽内部。
    • 13. 发明授权
    • Method of forming a wire structure
    • 形成线结构的方法
    • US07772103B2
    • 2010-08-10
    • US12146729
    • 2008-06-26
    • Ho-Jun YiYong-Il KimBong-Soo KimDae-Young JangWoo-Jeong Cho
    • Ho-Jun YiYong-Il KimBong-Soo KimDae-Young JangWoo-Jeong Cho
    • H01L21/3205H01L21/4763
    • H01L27/105H01L23/535H01L2924/0002H01L2924/00
    • In a method of forming a wire structure, first active regions and second active regions are formed on a substrate. Each of the first active regions has a first sidewall of a positive slope and a second sidewall opposed to the first sidewall. The second active regions are arranged along a first direction. An isolation layer is between the first active regions and the second active regions. A first mask is formed on the first active regions, the second active regions and the isolation layer. The first mask has an opening exposing the first sidewall and extending along the first direction. The first active regions, the second active regions and the isolation layer are etched using the first mask to form a groove extending along the first direction and to form a fence having a height substantially higher than a bottom face of the groove. A wire is formed to fill the groove. A contact is formed on the wire. The contact is disposed toward the second active regions from the fence.
    • 在形成线结构的方法中,在衬底上形成第一有源区和第二有源区。 每个第一有源区具有正斜率的第一侧壁和与第一侧壁相对的第二侧壁。 第二有源区沿第一方向排列。 隔离层位于第一有源区和第二有源区之间。 第一掩模形成在第一有源区,第二有源区和隔离层上。 第一掩模具有暴露第一侧壁并沿着第一方向延伸的开口。 使用第一掩模蚀刻第一有源区,第二有源区和隔离层,以形成沿着第一方向延伸的凹槽,并形成具有高于凹槽的底面的高度的栅栏。 形成线以填充凹槽。 在导线上形成接触。 接触件从栅栏朝向第二活动区域设置。
    • 18. 发明申请
    • SEMICONDUCTOR DEVICE HAVING VERTICAL TRANSISTOR AND METHOD OF FABRICATING THE SAME
    • 具有垂直晶体管的半导体器件及其制造方法
    • US20100283094A1
    • 2010-11-11
    • US12840599
    • 2010-07-21
    • Bong-Soo KimKang-Yoon LeeDong-Gun ParkJae-Man YoonSeong-Goo KimHyeoung-Won Seo
    • Bong-Soo KimKang-Yoon LeeDong-Gun ParkJae-Man YoonSeong-Goo KimHyeoung-Won Seo
    • H01L27/108
    • H01L27/10894H01L27/10876H01L29/66666H01L29/7827
    • There are provided a semiconductor device having a vertical transistor and a method of fabricating the same. The method includes preparing a semiconductor substrate having a cell region and a peripheral circuit region. Island-shaped vertical gate structures two-dimensionally aligned along a row direction and a column direction are formed on the substrate of the cell region. Each of the vertical gate structures includes a semiconductor pillar and a gate electrode surrounding a center portion of the semiconductor pillar. A bit line separation trench is formed inside the semiconductor substrate below a gap region between the vertical gate structures, and a peripheral circuit trench confining a peripheral circuit active region is formed inside the semiconductor substrate of the peripheral circuit region. The bit line separation trench is formed in parallel with the column direction of the vertical gate structures. A bit line separation insulating layer and a peripheral circuit isolation layer are formed inside the bit line separation trench and the peripheral circuit trench, respectively.
    • 提供了具有垂直晶体管的半导体器件及其制造方法。 该方法包括制备具有单元区域和外围电路区域的半导体衬底。 在单元区域的基板上形成沿行方向和列方向二维排列的岛状的垂直栅极结构。 每个垂直栅极结构包括半导体柱和围绕半导体柱的中心部分的栅电极。 在垂直栅极结构之间的间隙区域的下方,在半导体衬底的内部形成有位线分离沟槽,并且在外围电路区域的半导体衬底的内部形成限制外围电路有源区的外围电路沟道。 位线分离沟槽与垂直栅极结构的列方向平行地形成。 位线分离绝缘层和外围电路隔离层分别形成在位线分离沟槽和外围电路沟槽内部。
    • 20. 发明申请
    • MATCHING SYSTEM AND METHOD FOR PREVENTING THE LOSS OF DATA BETWEEN LOW-POWER NETWORK AND NON-LOW-POWER NETWORK
    • 用于防止低功耗网络与非低功耗网络之间的数据丢失的匹配系统和方法
    • US20080129466A1
    • 2008-06-05
    • US11877784
    • 2007-10-24
    • Jae-Hong RuyBong-Soo KimCheol-Sig Pyo
    • Jae-Hong RuyBong-Soo KimCheol-Sig Pyo
    • G08B1/08
    • H04W16/14H04L47/10Y02D70/166Y02D70/26
    • There is provided a matching system for preventing the loss of data between a low-power network and a non-low-power network, the matching system including: an RF communication schedule management unit, installed in the low-power network side system, for managing a schedule of an RF communication period indicative of a data transmission period of the low-power network; a heterogeneous network communication schedule management unit, disposed in the non-low-power network side system, for creating a schedule to transmit data to the low-power network side system based on the RF communication period provided by the RF communication schedule management unit; and a heterogeneous network communication unit for transmitting the data to the low-power network side system depending on the schedule created by the heterogeneous network communication schedule management unit.
    • 提供了一种用于防止低功率网络和非低功率网络之间的数据丢失的匹配系统,所述匹配系统包括:安装在低功率网络侧系统中的RF通信进度管理单元,用于 管理指示低功率网络的数据传输周期的RF通信周期的调度; 设置在非低功率网络侧系统中的异构网络通信调度管理单元,用于基于由RF通信调度管理单元提供的RF通信期间,创建向低功率网络侧系统发送数据的调度; 以及用于根据异构网络通信调度管理单元创建的调度将数据发送到低功率网络侧系统的异构网络通信单元。