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11. 发明授权

US08639074B2 Nanomechanical photonic devices 有权
标题翻译：纳米机械光子器件
公开(公告)号：US08639074B2
公开(公告)日：2014-01-28
申请号：US12920631
申请日：2009-04-09
申请人： Hongxing Tang , Mo Li , Wolfram Pernice , Chi Xiong
发明人： Hongxing Tang , Mo Li , Wolfram Pernice , Chi Xiong
IPC分类号： G02B6/26
CPC分类号： G02B6/26 , B82Y20/00 , G02B6/12007 , G02B6/122 , G02B6/283 , G02B6/3504 , G02B6/3548 , G02B6/3552 , G02B6/356 , G02B6/3568 , G02B6/3594 , G02B6/3596 , G02B2006/12038 , G02B2006/12061
摘要： The present invention relates to devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters. The waveguide can also comprise a gap such that two cantilever bridges are formed.
摘要翻译：本发明涉及对梯度光学力进行操作的装置，特别是可由梯度光学力驱动的纳米级机械装置。这种器件包括波导和介电体，其中波导的至少一部分与电介质本体隔开一定距离，允许波导内的光学模式与电介质体的渐逝耦合。这导致作用在波导上并且可以在纳米尺度上的各种器件中使用的光学力，包括全光开关，光子晶体管，可调谐耦合器，光衰减器和可调谐移相器。波导还可以包括形成两个悬臂的间隙。

12. 发明申请

US20110216804A1 POLYMER NEMS FOR CELL PHYSIOLOGY AND MICROFABRICATED CELL POSITIONING SYSTEM FOR MICRO-BIOCALORIMETER 有权
标题翻译：用于细胞生物学的聚合物微球和用于微生物分子的微生物细胞定位系统
公开(公告)号：US20110216804A1
公开(公告)日：2011-09-08
申请号：US13110684
申请日：2011-05-18
申请人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
发明人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
IPC分类号： G01K17/00
CPC分类号： G01N33/54373 , B82Y35/00 , G01L1/044 , G01N33/5026 , G01N33/5029 , G01N33/5032 , Y10S977/724 , Y10S977/956 , Y10S977/958
摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.
摘要翻译：微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。力传感器包含与应变传感器集成的可变形构件。应变传感器将可变形部件的变形转换为电信号。微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。此外，还提供了微流体嵌入式真空绝缘生物量热计。量热器室包含聚对二甲苯膜。在测量样品期间，室的两侧都处于真空状态。使用微流控管（由聚对二甲苯构建）将样品输送到室中。用作温度计的热电堆位于两层聚对二甲苯之间。

13. 发明授权

US06910382B2 Sensors based on giant planar hall effect in dilute magnetic semiconductors 失效
公开(公告)号：US06910382B2
公开(公告)日：2005-06-28
申请号：US10602548
申请日：2003-06-23
申请人： Hongxing Tang , Michael L. Roukes
发明人： Hongxing Tang , Michael L. Roukes
IPC分类号： G01L9/00 , G01L9/16 , G01L9/14
CPC分类号： G01L9/0042 , G01L9/16
摘要： Ferromagnetic semiconductor-based sensor devices, including sensors for detecting pressure changes and sensors for detecting magnetic fields, such as switching events in a magnetic recording medium. The pressure sensors of the present invention detect pressure changes using magnetoresistive measurement techniques, and in particular GPHE techniques. Magnetic field detection sensors such as magnetic switching detection sensors include ferromagnetic semiconductor-based materials that provide enhanced sensitivity relative to known materials and techniques. Such magnetic switching detection sensors according to the present invention are particularly useful as a read head sensor for HDD and other magnetic storage technologies.

14. 发明申请

US20100098967A1 Method for Imprinting and Erasing Amorphous Metal Alloys 有权
标题翻译：非晶态金属合金印刷和擦除方法
公开(公告)号：US20100098967A1
公开(公告)日：2010-04-22
申请号：US12526792
申请日：2008-02-13
申请人： Jan Schroers , Golden Kumar , Hongxing Tang
发明人： Jan Schroers , Golden Kumar , Hongxing Tang
IPC分类号： B32B3/30 , B22D23/00
CPC分类号： G11B3/705 , C21D6/04 , C21D2221/00 , C22C45/00 , C22C45/001 , C22C45/003 , C22C45/02 , C22C45/04 , C22C2200/02 , Y10T428/12389
摘要： The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.
摘要翻译：本发明涉及使用非晶金属材料进行压印光刻的材料，方法和装置。非晶金属材料可用作压印介质，并且在图案转移过程期间施加热塑性成形工艺以在非晶金属层中产生微米级和纳米尺度图案。图案转印是直接掩模压花或通过连续纳米压痕工艺的形式。还公开了重写过程，其包括通过第二热塑性成型工艺实现的擦除机构。非晶金属材料也可以直接用作压印光刻中的压花模具，以允许高体积压印纳米制造。本发明还包括在单独的表面张力的作用下平滑表面的方法。

15. 发明授权

US07434476B2 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes 有权
标题翻译：微机械和纳米机械装置中的金属薄膜压阻转换及其在自感SPM探针中的应用
公开(公告)号：US07434476B2
公开(公告)日：2008-10-14
申请号：US11010578
申请日：2004-12-14
申请人： Hongxing Tang , Mo Li , Michael L. Roukes
发明人： Hongxing Tang , Mo Li , Michael L. Roukes
IPC分类号： G01B7/16
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373 , G01Q20/04 , G01Q60/38
摘要： Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
摘要翻译：薄金属膜用作微机电和纳米机电系统中的压阻自感元件。演示了AFM探针的具体应用。

16. 发明授权

US07191639B2 On-chip magnetic force actuation of microcantilevers by coplanar coils 有权
标题翻译：通过共面线圈对微悬臂梁进行片上磁力驱动
公开(公告)号：US07191639B2
公开(公告)日：2007-03-20
申请号：US10815517
申请日：2004-04-01
申请人： Hongxing Tang , Michael L. Roukes
发明人： Hongxing Tang , Michael L. Roukes
IPC分类号： G01N29/02
CPC分类号： G01H11/02 , G01N2291/0427
摘要： An on-chip coil is provided in a micromachined device for magnetic actuation of a nanoelectromechanical microcantilever. The novel geometry involves a three dimensional solenoid or planar coil carrying high current that generates a large enough magnetic field in its close proximity to a permalloy thin film patch or columnar magnet disposed on the distal end of the piezoresistive microcantilever to effectively interacts with the magnetic thin film deposited on the microcantilever. The device comprises an effective actuators which can be integrated with biofunctionalized cantilever arrays in hybrid semiconductor-microfluidics devices for the analysis and detection of biological analytes.
摘要翻译：在用于磁性驱动纳米机电微悬臂梁的微加工装置中设置片上线圈。该新颖的几何形状涉及一种承载高电流的三维电磁线圈或平面线圈，其产生足够大的磁场，其紧邻设置在压阻微型连接器的远端上的坡莫合金薄膜贴片或柱状磁体，以有效地与磁性薄膜薄膜沉积在微悬臂梁上。该装置包括有效的致动器，其可与用于分析和检测生物分析物的混合半导体 - 微流体装置中的生物功能化悬臂阵列集成。

17. 发明授权

US08750957B2 Microfabricated neural probes and methods of making same 有权
标题翻译：微型神经探针及其制作方法
公开(公告)号：US08750957B2
公开(公告)日：2014-06-10
申请号：US11628003
申请日：2005-06-01
申请人： Hongxing Tang , Michael L. Roukes , Richard Renaud
发明人： Hongxing Tang , Michael L. Roukes , Richard Renaud
IPC分类号： A61B5/04 , A61N1/00
CPC分类号： A61B5/04001 , A61B5/685 , A61B2562/028 , A61N1/05 , B82Y15/00
摘要： An embodiment of the invention provides a neural probe containing a plurality of nanoscale recording electrodes. The recording electrodes have a width of 1 micron or less and a distance between adjacent recording electrodes is 10 microns or less. Another embodiment of the invention provides a neural probe comprising a plurality of microfabricated recording electrodes located on a polymer base material, such as a flexible polymer cantilever.
摘要翻译：本发明的实施例提供了一种包含多个纳米级记录电极的神经探针。记录电极具有1微米或更小的宽度，并且相邻记录电极之间的距离为10微米或更小。本发明的另一个实施方案提供了一种神经探针，其包含位于聚合物基材上的多个微细加工的记录电极，例如柔性聚合物悬臂。

18. 发明授权

US08641839B2 Method for imprinting and erasing amorphous metal alloys 有权
标题翻译：印刷和擦除非晶态金属合金的方法
公开(公告)号：US08641839B2
公开(公告)日：2014-02-04
申请号：US12526792
申请日：2008-02-13
申请人： Jan Schroers , Golden Kumar , Hongxing Tang
发明人： Jan Schroers , Golden Kumar , Hongxing Tang
IPC分类号： B22D21/00 , B22D19/16 , C22C45/00
CPC分类号： G11B3/705 , C21D6/04 , C21D2221/00 , C22C45/00 , C22C45/001 , C22C45/003 , C22C45/02 , C22C45/04 , C22C2200/02 , Y10T428/12389
摘要： The present invention relates to materials, methods and apparatuses for performing imprint lithography using amorphous metallic materials. The amorphous metallic materials can be employed as imprint media and thermoplastic forming processes are applied during the pattern transfer procedure to produce micron scale and nanoscale patterns in the amorphous metallic layer. The pattern transfer is in the form of direct mask embossing or through a serial nano-indentation process. A rewriting process is also disclosed, which involves an erasing mechanism that is accomplished by means of a second thermoplastic forming process. The amorphous metallic materials may also be used directly as an embossing mold in imprint lithography to allow high volume imprint nano-manufacturing. This invention also comprises of a method of smoothening surfaces under the action of the surface tension alone.
摘要翻译：本发明涉及使用非晶金属材料进行压印光刻的材料，方法和装置。非晶金属材料可用作压印介质，并且在图案转移过程期间施加热塑性成形工艺以在非晶金属层中产生微米级和纳米尺度图案。图案转印是直接掩模压花或通过连续纳米压痕工艺的形式。还公开了重写过程，其包括通过第二热塑性成型工艺实现的擦除机构。非晶金属材料也可以直接用作压印光刻中的压花模具，以允许高体积压印纳米制造。本发明还包括在单独的表面张力的作用下平滑表面的方法。

19. 发明授权

US07966898B2 Polymer NEMS for cell physiology and microfabricated cell positioning system for micro-biocalorimeter 有权
标题翻译：用于细胞生理学的聚合物NEMS和用于微生物量热计的微细胞定位系统
公开(公告)号：US07966898B2
公开(公告)日：2011-06-28
申请号：US11830612
申请日：2007-07-30
申请人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
发明人： Michael L. Roukes , Chung-Wah Fon , Wonhee Lee , Hongxing Tang , Blake Waters Axelrod , John Liang Tan
IPC分类号： G01L1/22
CPC分类号： G01N33/54373 , B82Y35/00 , G01L1/044 , G01N33/5026 , G01N33/5029 , G01N33/5032 , Y10S977/724 , Y10S977/956 , Y10S977/958
摘要： A microfluidic embedded nanoelectromechanical system (NEMs) force sensor provides an electrical readout. The force sensor contains a deformable member that is integrated with a strain sensor. The strain sensor converts a deformation of the deformable member into an electrical signal. A microfluidic channel encapsulates the force sensor, controls a fluidic environment around the force sensor, and improves the read out. In addition, a microfluidic embedded vacuum insulated biocalorimeter is provided. A calorimeter chamber contains a parylene membrane. Both sides of the chamber are under vacuum during measurement of a sample. A microfluidic cannel (built from parylene) is used to deliver a sample to the chamber. A thermopile, used as a thermometer is located between two layers of parylene.
摘要翻译：微流体嵌入式纳米机电系统（NEM）力传感器提供电子读数。力传感器包含与应变传感器集成的可变形构件。应变传感器将可变形部件的变形转换为电信号。微流体通道封装力传感器，控制力传感器周围的流体环境，并改善读数。此外，还提供了微流体嵌入式真空绝缘生物量热计。量热器室包含聚对二甲苯膜。在测量样品期间，室的两侧都处于真空状态。使用微流控管（由聚对二甲苯构建）将样品输送到室中。用作温度计的热电堆位于两层聚对二甲苯之间。

20. 发明授权

US07617736B2 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes 有权
标题翻译：微机械和纳米机械装置中的金属薄膜压阻转换及其在自感SPM探针中的应用
公开(公告)号：US07617736B2
公开(公告)日：2009-11-17
申请号：US12164620
申请日：2008-06-30
申请人： Hongxing Tang , Mo Li , Michael L. Roukes
发明人： Hongxing Tang , Mo Li , Michael L. Roukes
IPC分类号： G01B7/16
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373 , G01Q20/04 , G01Q60/38
摘要： Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
摘要翻译：薄金属膜用作微机电和纳米机电系统中的压阻自感元件。演示了AFM探针的具体应用。

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