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11. 发明授权

US08698257B2 Resonator and production method thereof 有权
标题翻译：谐振器及其制作方法
公开(公告)号：US08698257B2
公开(公告)日：2014-04-15
申请号：US13377898
申请日：2010-06-30
申请人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H01L29/84
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译：提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

12. 发明申请

US20120091547A1 RESONATOR AND PRODUCTION METHOD THEREOF 有权
标题翻译：谐振器及其生产方法
公开(公告)号：US20120091547A1
公开(公告)日：2012-04-19
申请号：US13377898
申请日：2010-06-30
申请人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
发明人： Tomohide Kamiyama , Tomohiro Iwasaki , Takehiko Yamakawa , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译：提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

13. 发明授权

US08570112B2 Oscillator with MEMS resonator 有权
标题翻译：具有MEMS谐振器的振荡器
公开(公告)号：US08570112B2
公开(公告)日：2013-10-29
申请号：US13702396
申请日：2012-06-08
申请人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
发明人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03L1/02 , H03L1/027 , H03L5/00 , H03L7/183
摘要： A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.
摘要翻译：具有包括MEMS谐振器和放大器的反馈型振荡电路的MEMS振荡器，可操作以控制施加到MEMS谐振器的振荡部件的偏置电压的电压控制单元和接收来自所述MEMS谐振器的输出的自动增益控制单元放大器，并且基于输出的电平，输出用于控制放大器对放大器的增益的幅度控制信号，使得放大器的输出电平达到预定电平，其中电压控制单元控制基于MEMS谐振器的工作温度施加到振荡构件的偏置电压，使得MEMS谐振器的峰值增益与工作温度无关地具有预定值，并且电压控制单元导出MEMS的工作温度谐振器通过监控振幅控制信号。

14. 发明申请

US20130147567A1 OSCILLATOR 有权
标题翻译：振荡器
公开(公告)号：US20130147567A1
公开(公告)日：2013-06-13
申请号：US13702396
申请日：2012-06-08
申请人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
发明人： Takehiko Yamakawa , Tomohiro Iwasaki , Kunihiko Nakamura , Keiji Onishi
IPC分类号： H03B5/30
CPC分类号： H03B5/30 , H03L1/02 , H03L1/027 , H03L5/00 , H03L7/183
摘要： A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.
摘要翻译：具有包括MEMS谐振器和放大器的反馈型振荡电路的MEMS振荡器，可操作以控制施加到MEMS谐振器的振荡部件的偏置电压的电压控制单元和接收来自所述MEMS谐振器的输出的自动增益控制单元放大器，并且基于输出的电平，输出用于控制放大器对放大器的增益的幅度控制信号，使得放大器的输出电平达到预定电平，其中电压控制单元控制基于MEMS谐振器的工作温度施加到振荡构件的偏置电压，使得MEMS谐振器的峰值增益与工作温度无关地具有预定值，并且电压控制单元导出MEMS的工作温度谐振器通过监控振幅控制信号。

15. 发明授权

US08289103B2 Filter device having attenuation poles 失效
标题翻译：具有衰减极的滤波器
公开(公告)号：US08289103B2
公开(公告)日：2012-10-16
申请号：US12515636
申请日：2007-11-19
申请人： Takehiko Yamakawa , Toshiyuki Okajima , Hiroshi Nakatsuka , Keiji Onishi
发明人： Takehiko Yamakawa , Toshiyuki Okajima , Hiroshi Nakatsuka , Keiji Onishi
IPC分类号： H03H7/00
CPC分类号： H03H7/0153 , H03H7/0115 , H03H7/1708 , H03H7/1725 , H03H7/1733 , H03H7/1758 , H03H2007/013 , H03H2210/012
摘要： A high frequency filter includes an inductor, a serial resonance circuit including an inductor and capacitors, a serial resonance circuit including an inductor and capacitors, and a varactor diode connected between a connection point between the capacitor and the capacitor and a connection point between the capacitor and the capacitor. A controller simultaneously changes two attenuation pole frequencies of the filter device by changing a capacitance of the varactor diode.
摘要翻译：高频滤波器包括电感器，包括电感器和电容器的串联谐振电路，包括电感器和电容器的串联谐振电路以及连接在电容器和电容器之间的连接点之间的变容二极管和电容器之间的连接点和电容器。控制器通过改变变容二极管的电容同时改变滤波器装置的两个衰减极点频率。

16. 发明申请

US20070200146A1 Electronic device, method for producing the same, and communication apparatus including the same 审中-公开
标题翻译：电子装置及其制造方法以及包括该装置的通信装置
公开(公告)号：US20070200146A1
公开(公告)日：2007-08-30
申请号：US11711052
申请日：2007-02-27
申请人： Keiji Onishi , Hiroshi Nakatsuka , Takehiko Yamakawa
发明人： Keiji Onishi , Hiroshi Nakatsuka , Takehiko Yamakawa
IPC分类号： H01L27/10
CPC分类号： H03H9/72 , H03H9/0523 , H03H9/0571 , H03H9/0576 , H03H9/105 , H03H9/1078 , H03H9/1085 , H03H9/564 , H03H9/6483 , H03H9/6493 , H03H9/706 , H03H9/725
摘要： An electronic device according to the present invention includes a functional element acting as a predetermined circuit packaged using a resin member. The electronic device comprises a wiring substrate having a wiring member for electric connection with an external circuit; the functional element mounted on one main surface of the wiring substrate so as to be electrically connected to the wiring member; and the resin member provided on the one main surface of the wiring substrate having the functional element, so as to package the functional element. The resin member includes a filler formed of a magnetic material.
摘要翻译：根据本发明的电子设备包括用作使用树脂部件封装的预定电路的功能元件。电子设备包括具有用于与外部电路电连接的布线构件的布线基板; 所述功能元件安装在所述布线基板的一个主表面上以与所述布线构件电连接; 以及设置在具有功能元件的布线基板的一个主表面上的树脂构件，以便封装功能元件。树脂构件包括由磁性材料形成的填料。

17. 发明授权

US07259498B2 Piezoelectric resonator, filter, and duplexer 有权
标题翻译：压电谐振器，滤波器和双工器
公开(公告)号：US07259498B2
公开(公告)日：2007-08-21
申请号：US10938537
申请日：2004-09-13
申请人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa
发明人： Hiroshi Nakatsuka , Keiji Onishi , Hiroyuki Nakamura , Takehiko Yamakawa
IPC分类号： H01L41/09 , H03H9/17
CPC分类号： H03H9/588 , H03H9/02094 , H03H9/02102 , H03H9/0211 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/585 , H03H9/589
摘要： A piezoelectric resonator of the present invention is structured such that on a substrate 5 having a cavity 4 formed therein, a lower electrode 3, a piezoelectric body 1, a spurious component control layer 16, and an upper electrode 2 are formed in this order from bottom up. The spurious component control layer 16 is a layer for controlling a spurious frequency, and composed of, for example, a metallic material, a dielectric material, or a piezo electric material. By additionally providing the spurious component control layer 16, it is made possible to cause variation of the spurious frequency due to unwanted variation to become greater than variation in resonance frequency of the main resonance of the piezoelectric resonator. Thus, it is possible to realize a piezoelectric resonator having an admittance frequency response where no spurious component occurs between resonance frequency fr and antiresonance frequency fa.
摘要翻译：本发明的压电谐振器被构造成使得在其中形成有空腔4的基板5上形成下电极3，压电体1，杂散分量控制层16和上电极2，从而自下而上。杂散分量控制层16是用于控制寄生频率的层，例如由金属材料，电介质材料或压电材料构成。通过附加地提供寄生分量控制层16，可以使由于不期望的变化引起的寄生频率的变化变得大于压电谐振器的主谐振的谐振频率的变化。因此，可以实现在谐振频率fr和反谐振频率fa之间不产生杂散分量的导纳频率响应的压电谐振器。

18. 发明授权

US07230511B2 Thin film bulk acoustic resonator, method for producing the same, filter, composite electronic component device, and communication device 失效
标题翻译：薄膜体声波谐振器，其制造方法，滤波器，复合电子部件装置以及通信装置
公开(公告)号：US07230511B2
公开(公告)日：2007-06-12
申请号：US10935160
申请日：2004-09-08
申请人： Keiji Onishi , Hiroyuki Nakamura , Hiroshi Nakatsuka , Takehiko Yamakawa
发明人： Keiji Onishi , Hiroyuki Nakamura , Hiroshi Nakatsuka , Takehiko Yamakawa
IPC分类号： H03H9/00 , H03H9/09
CPC分类号： H03H9/564 , H03H3/02 , H03H9/02118 , H03H9/171 , H03H9/568
摘要： A thin film bulk acoustic resonator includes a piezoelectric film, and a pair of electrodes between which the piezoelectric film is interposed. The piezoelectric film includes an outer region extending outwards from at least a portion of the periphery of a resonator portion composed of the pair of electrodes and the piezoelectric film. The outer region includes, in at least a portion thereof, an acoustic damping region for damping acoustic waves.
摘要翻译：薄膜体声波谐振器包括压电薄膜和介于其间的一对电极。压电膜包括从由一对电极和压电膜组成的谐振器部分的周边的至少一部分向外延伸的外部区域。外部区域在其至少一部分中包括用于阻尼声波的声阻尼区域。

19. 发明授权

US07138888B2 Filter using piezoelectric resonator 失效
标题翻译：使用压电谐振器滤波
公开(公告)号：US07138888B2
公开(公告)日：2006-11-21
申请号：US10984839
申请日：2004-11-10
申请人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
发明人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
IPC分类号： H03H9/00
CPC分类号： H03H9/605 , H03H9/6433
摘要： A series piezoelectric resonator is connected in series between an input terminal and an output terminal. A first electrode of a first parallel piezoelectric resonator is connected to a connection point between the input terminal and the series piezoelectric resonator, and a second electrode of the first parallel piezoelectric resonator is connected to a first terminal of a first inductor. A first electrode of a second parallel piezoelectric resonator is connected to a connection point between the series piezoelectric resonator and the output terminal, and a second electrode of the second parallel piezoelectric resonator is connected to a first terminal of a second inductor. Second terminals of the first and second inductors are grounded. An additional piezoelectric resonator is connected between the second electrode of the first parallel piezoelectric resonator and the second electrode of the second parallel piezoelectric resonator.
摘要翻译：串联压电谐振器串联连接在输入端和输出端之间。第一并联压电谐振器的第一电极连接到输入端子和串联压电谐振器之间的连接点，并且第一并联压电谐振器的第二电极连接到第一电感器的第一端子。第二并联压电谐振器的第一电极连接到串联压电谐振器和输出端之间的连接点，第二并联压电谐振器的第二电极连接到第二电感器的第一端。第一和第二电感器的第二端子接地。附加的压电谐振器连接在第一并联压电谐振器的第二电极和第二并联压电谐振器的第二电极之间。

20. 发明申请

US20050110596A1 Filter using piezoelectric resonator 失效
标题翻译：使用压电谐振器滤波
公开(公告)号：US20050110596A1
公开(公告)日：2005-05-26
申请号：US10984839
申请日：2004-11-10
申请人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
发明人： Takehiko Yamakawa , Hiroshi Yamaguchi , Hiroshi Nakatsuka , Hiroyuki Nakamura , Keiji Onishi , Toshio Ishizaki
IPC分类号： H03H9/54 , H03H9/58 , H03H9/60 , H03H9/64
CPC分类号： H03H9/605 , H03H9/6433
摘要： A series piezoelectric resonator 11 is connected in series between an input terminal 15a and an output terminal 15b. A first electrode of a parallel piezoelectric resonator 12a is connected to a connection point between the input terminal 15a and the series piezoelectric resonator 11, and a second electrode of the parallel piezoelectric resonator 12a is connected to a first terminal of an inductor 13a. A first electrode of a parallel piezoelectric resonator 12b is connected to a connection point between the series piezoelectric resonator 11 and the output terminal 15b, and a second electrode of the parallel piezoelectric resonator 12b is connected to a first terminal of an inductor 13b. Second terminals of the inductors 13a, 13b are grounded. An additional piezoelectric resonator 14 is connected between the second electrode of the parallel piezoelectric resonator 12a and the second electrode of the parallel piezoelectric resonator 12b.
摘要翻译：串联压电谐振器11串联连接在输入端子15a和输出端子15b之间。平行压电谐振器12a的第一电极连接到输入端子15a和串联压电谐振器11之间的连接点，并联压电谐振器的第二电极连接到电感器13的第一端子一个。平行压电谐振器12b的第一电极连接到串联压电谐振器11和输出端子15b之间的连接点，并联压电谐振器12b的第二电极连接到电感器13的第一端子 b。电感器13a，13b的第二端接地。并联压电谐振器12a的第二电极和并联压电谐振器12b的第二电极之间连接有一个附加的压电谐振器14。

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