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11. 发明授权

US09105440B2 Apparatus of plural charged particle beams with multi-axis magnetic lens 有权
标题翻译：具有多轴磁性透镜的多个带电粒子束的装置
公开(公告)号：US09105440B2
公开(公告)日：2015-08-11
申请号：US14468674
申请日：2014-08-26
申请人： Hermes-Microvision, Inc.
发明人： Zhongwei Chen , Weiming Ren , Xuerang Hu , Xuedong Liu
IPC分类号： H01J37/141 , H01J37/145 , H01J37/28
CPC分类号： H01J37/141 , H01J37/145 , H01J37/28 , H01J2237/141 , H01J2237/1415 , H01J2237/15 , H01J2237/281 , H01J2237/2817
摘要： An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.
摘要翻译：提供具有多轴磁性透镜的多个带电粒子束的装置，以执行观察样品表面的多功能，例如高通量检测和其感兴趣特征的高分辨率检查以及用于增强图像对比度的充电控制和图像分辨率。在该装置中，形成两个或多个子列，并且每个子列执行多功能之一。基本上，子列采取正常照明以获得高图像分辨率，但是一个或多个可能采取倾斜照明以获得高图像对比度。

12. 发明授权

US08835867B2 Multi-axis magnetic lens for focusing a plurality of charged particle beams 有权
标题翻译：用于聚焦多个带电粒子束的多轴磁性透镜
公开(公告)号：US08835867B2
公开(公告)日：2014-09-16
申请号：US13741654
申请日：2013-01-15
申请人： Hermes-Microvision, Inc.
发明人： Zhongwei Chen , Weiming Ren , Xuedong Liu
IPC分类号： H01J3/14 , H01J3/26 , H01J49/42
CPC分类号： H01J3/22 , B82Y10/00 , B82Y40/00 , H01F7/0205 , H01J3/20 , H01J37/14 , H01J37/3177 , H01J2237/1415 , H05K9/00
摘要： A cellular-type PD unit is proposed and a plurality of the cellular-type PD units is used in pairs in a multi-axis magnetic lens for focusing a plurality of charged beams. First type PD units or second type PD units (called as hybrid PD unit as well) can be applied to cellular-type PD units to flexibly construct sub-lenses. Furthermore, magnetic shielding plates with a plurality of through openings can be placed above and/or below the multi-axis magnetic lens to make magnetic flux leaking out of the multi-axis magnetic lens vanish away rapidly outside the magnetic shielding plates.
摘要翻译：提出了一种蜂窝型PD单元，并且多个蜂窝型PD单元成对地用于多轴磁性透镜中以聚焦多个带电波束。可以将第一类PD单元或第二类PD单元（也称为混合PD单元）应用于蜂窝型PD单元以灵活地构建子透镜。此外，具有多个通孔的磁屏蔽板可以放置在多轴磁性透镜的上方和/或下方，以使从多轴磁性透镜泄漏的磁通在磁屏蔽板之外快速消失。

13. 发明授权

US10236156B2 Apparatus of plural charged-particle beams 有权
公开(公告)号：US10236156B2
公开(公告)日：2019-03-19
申请号：US15078369
申请日：2016-03-23
申请人： Hermes Microvision Inc.
发明人： Weiming Ren , Shuai Li , Xuedong Liu , Zhongwei Chen , Jack Jau
IPC分类号： H01J37/22 , H01J37/28
摘要： A multi-beam apparatus for observing a sample with oblique illumination is proposed. In the apparatus, a new source-conversion unit changes a single electron source into a slant virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample with oblique illumination, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means not only forms the slant virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots. The apparatus can provide dark-field images and/or bright-field images of the sample.

14. 发明授权

US10115559B2 Apparatus of plural charged-particle beams 有权
公开(公告)号：US10115559B2
公开(公告)日：2018-10-30
申请号：US15403685
申请日：2017-01-11
申请人： Hermes Microvision Inc.
发明人： Xuedong Liu , Weiming Ren , Shuai Li , Zhongwei Chen
IPC分类号： H01J37/14 , H01J37/147 , H01J37/28 , H01J37/04 , H01J37/153
摘要： One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.

15. 发明授权

US09922799B2 Apparatus of plural charged-particle beams 有权
公开(公告)号：US09922799B2
公开(公告)日：2018-03-20
申请号：US15213781
申请日：2016-07-19
申请人： Hermes Microvision, Inc.
发明人： Shuai Li , Weiming Ren , Xuedong Liu , Juying Dou , Xuerang Hu , Zhongwei Chen
IPC分类号： H01J37/28 , H01J37/10 , H01J37/20 , H01J37/244
CPC分类号： H01J37/28 , H01J37/10 , H01J37/20 , H01J37/244 , H01J2237/0453 , H01J2237/0492 , H01J2237/04924 , H01J2237/04926 , H01J2237/04928 , H01J2237/1205 , H01J2237/1501 , H01J2237/1502 , H01J2237/2446 , H01J2237/2448 , H01J2237/2806 , H01J2237/2817
摘要： A multi-beam apparatus for observing a sample with high resolution and high throughput and in flexibly varying observing conditions is proposed. The apparatus uses a movable collimating lens to flexibly vary the currents of the plural probe spots without influencing the intervals thereof, a new source-conversion unit to form the plural images of the single electron source and compensate off-axis aberrations of the plural probe spots with respect to observing conditions, and a pre-beamlet-forming means to reduce the strong Coulomb effect due to the primary-electron beam.

16. 发明申请

US20170125206A1 Apparatus of Plural Charged-Particle Beams 有权
公开(公告)号：US20170125206A1
公开(公告)日：2017-05-04
申请号：US15403749
申请日：2017-01-11
申请人： Hermes Microvision Inc.
发明人： Weiming Ren , Shuai Li , Xuedong Liu , Zhongwei Chen
IPC分类号： H01J37/147 , H01J37/28
CPC分类号： H01J37/28 , H01J37/12 , H01J37/1472 , H01J2237/04924 , H01J2237/083 , H01J2237/1205 , H01J2237/1516 , H01J2237/2817
摘要： A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

17. 发明授权

US09607805B2 Apparatus of plural charged-particle beams 有权
公开(公告)号：US09607805B2
公开(公告)日：2017-03-28
申请号：US15150858
申请日：2016-05-10
申请人： Hermes Microvision Inc.
发明人： Xuedong Liu , Weiming Ren , Shuai Li , Zhongwei Chen
IPC分类号： H01J37/04 , H01J37/28
CPC分类号： H01J37/147 , H01J37/04 , H01J37/153 , H01J37/28 , H01J2237/061 , H01J2237/083 , H01J2237/1532 , H01J2237/1534 , H01J2237/2817
摘要： One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.

18. 发明申请

US20170025241A1 Apparatus of Plural Charged-Particle Beams 有权
标题翻译：多次充电粒子束装置
公开(公告)号：US20170025241A1
公开(公告)日：2017-01-26
申请号：US15213781
申请日：2016-07-19
申请人： Hermes Microvision, Inc.
发明人： Shuai Li , Weiming Ren , Xuedong Liu , Juying Dou , Xuerang Hu , Zhongwei Chen
IPC分类号： H01J37/14 , H01J37/20 , H01J37/244 , H01J37/28
CPC分类号： H01J37/28 , H01J37/10 , H01J37/20 , H01J37/244 , H01J2237/0453 , H01J2237/0492 , H01J2237/04924 , H01J2237/04926 , H01J2237/04928 , H01J2237/1205 , H01J2237/1501 , H01J2237/1502 , H01J2237/2446 , H01J2237/2448 , H01J2237/2806 , H01J2237/2817
摘要： A multi-beam apparatus for observing a sample with high resolution and high throughput and in flexibly varying observing conditions is proposed. The apparatus uses a movable collimating lens to flexibly vary the currents of the plural probe spots without influencing the intervals thereof, a new source-conversion unit to form the plural images of the single electron source and compensate off-axis aberrations of the plural probe spots with respect to observing conditions, and a pre-beamlet-forming means to reduce the strong Coulomb effect due to the primary-electron beam.
摘要翻译：提出了一种用于以高分辨率和高吞吐量和灵活变化的观察条件观察样品的多光束装置。该装置使用可移动准直透镜来灵活地改变多个探针点的电流而不影响其间隔，新的源转换单元形成单个电子源的多个图像并补偿多个探针点的离轴像差以及用于减小由于一次电子束引起的强烈的库仑效应的前束形成装置。

19. 发明授权

US09202658B2 Multi-axis magnetic lens for focusing a plurality of charged particle beams 有权
标题翻译：用于聚焦多个带电粒子束的多轴磁性透镜
公开(公告)号：US09202658B2
公开(公告)日：2015-12-01
申请号：US14572052
申请日：2014-12-16
申请人： Hermes-Microvision, Inc.
发明人： Zhongwei Chen , Weiming Ren , Xuerang Hu , Xuedong Liu
IPC分类号： H01J1/50 , H01J3/20
CPC分类号： H01J3/20 , H01J37/141 , H01J37/143 , H01J2237/1405 , Y10T29/49075
摘要： A multi-axis magnetic lens with stable performance in focusing a plurality of charged particle beams is provided. The multi-axis magnetic lens comprises a plurality of magnetic dub-lens modules. On the one hand, the multi-axis magnetic lens employs an annular permanent-magnet unit to provide a basic and stable magnetic flux to the plurality of magnetic sub-lens modules. One the other hand, the multi-axis magnetic lens uses a plurality of subsidiary coils to provide additional and adjustable magnetic flux to the plurality of magnetic sub-lens modules respectively. The invention also proposes a method to turn off or adjust the basic and stable magnetic flux for some applications. Hence, this invention will benefit the applications which need to execute in a long time period while keeping a high stabilization in performance.
摘要翻译：提供了一种在聚焦多个带电粒子束时具有稳定性能的多轴磁性透镜。多轴磁性透镜包括多个磁性复数透镜模块。一方面，多轴磁性透镜采用环形永磁体单元，以向多个磁性子透镜模块提供基本稳定的磁通量。另一方面，多轴磁性透镜使用多个辅助线圈来分别向多个磁性子透镜模块提供附加和可调节的磁通量。本发明还提出了在一些应用中关闭或调节基本和稳定磁通的方法。因此，本发明将有益于需要在长时间内执行的应用，同时保持高性能稳定性。

20. 发明授权

US10141160B2 Apparatus of plural charged-particle beams 有权
公开(公告)号：US10141160B2
公开(公告)日：2018-11-27
申请号：US15365145
申请日：2016-11-30
申请人： Hermes Microvision Inc.
发明人： Weiming Ren , Xuedong Liu , Xuerang Hu , Zhongwei Chen
IPC分类号： H01J37/28 , H01J37/14 , H01J37/153 , H01J37/20 , H01J37/244 , H01J37/141 , H01J37/29
摘要： A secondary projection imaging system in a multi-beam apparatus is proposed, which makes the secondary electron detection with high collection efficiency and low cross-talk. The system employs one zoom lens, one projection lens and one anti-scanning deflection unit. The zoom lens and the projection lens respectively perform the zoom function and the anti-rotating function to remain the total imaging magnification and the total image rotation with respect to the landing energies and/or the currents of the plural primary beamlets. The anti-scanning deflection unit performs the anti-scanning function to eliminate the dynamic image displacement due to the deflection scanning of the plural primary beamlets.

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