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    • 17. 发明授权
    • Fabrication method of micro-lens and fabrication method of master for micro-lens
    • 微透镜的制造方法和微透镜的制作方法
    • US07781155B2
    • 2010-08-24
    • US12005668
    • 2007-12-28
    • Hyong Sik WonJong Myeon LeeMyung Whun Chang
    • Hyong Sik WonJong Myeon LeeMyung Whun Chang
    • G02B3/00
    • G03F7/2022G03F7/70416
    • A method of fabricating a micro lens, the method including: forming a photo-sensitive film on a substrate; placing a photo mask at a predetermined distance from a top of the photo-sensitive film; exposing the photo-sensitive film by varying an area of exposure of the photo-sensitive film so as to selectively expose three-dimensional structures of the photo-sensitive film corresponding to desired micro lenses; and developing the photo-sensitive film such that the exposed three-dimensional structures remain. Also, there is provided a method of fabricating a master for a micro lens, in which a master material is applied on the photo-sensitive film with the three-dimensional structures to form a master having the three-dimensional structures transferred thereonto.
    • 一种制造微透镜的方法,所述方法包括:在基板上形成感光膜; 将光掩模放置在距离感光膜的顶部预定距离处; 通过改变感光膜的曝光面积来曝光感光膜,以便选择性地曝光对应于期望的微透镜的感光膜的三维结构; 并显影感光膜,使得曝光的三维结构保留。 此外,提供了一种制造微透镜的母版的方法,其中将母材用三维结构施加在感光膜上,以形成其上转印有三维结构的母版。