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    • 11. 发明授权
    • Process for the ionization of thermally generated material vapors and a
device for conducting the process
    • 用于离子化热生物质蒸气的方法和用于进行该方法的装置
    • US5662741A
    • 1997-09-02
    • US256556
    • 1994-09-22
    • Horst Ehrich
    • Horst Ehrich
    • C23C14/32H01J37/32C23C16/00
    • H01J37/32614C23C14/32C23C14/325
    • The present invention is directed to a process for ionizing material vapors generated thermally at reduced pressure, characterized in that the material vapors are exposed to electrons from the cathode spots 6 of a self-consuming cold cathode 3, 4, the thermal vaporization device 7 being connected as an anode, so that a vacuum arc discharge forms between cathode 3, 4 and anode 7. Another objective of the invention is a device for operating said process, wherein in a vacuum chamber 1, there is arranged a coolable cathode holder 3 having the cathode material 4 applied thereon for generating cathode spots on the self-consuming cold cathode, a thermal material vaporization system 7, 8, 9 connected as an anode, a wall 10 surrounding the cathode and connected as an auxiliary anode, which wall has an opening opposite the cathode.
    • PCT No.PCT / EP93 / 00009 Sec。 371日期1994年9月22日 102(e)1994年9月22日PCT PCT 1993年1月6日PCT公布。 公开号WO93 / 14240 日期:1993年7月22日本发明涉及一种用于离子化在减压下热发生的物质蒸气的方法,其特征在于,材料蒸气从自耗冷阴极3,4的阴极点6暴露于电子, 热蒸发装置7作为阳极连接,从而在阴极3,4和阳极7之间形成真空电弧放电。本发明的另一个目的是用于操作所述工艺的装置,其中在真空室1中布置有 在其上施加阴极材料4以在自耗冷阴极上产生阴极点的可冷却阴极保持件3,作为阳极连接的热材料蒸发系统7,8,9,围绕阴极并作为辅助阳极连接的壁10 ,该壁具有与阴极相对的开口。
    • 13. 发明授权
    • Method and apparatus for evaporating material in vacuum
    • 在真空中蒸发材料的方法和装置
    • US5096558A
    • 1992-03-17
    • US481439
    • 1990-02-16
    • Horst Ehrich
    • Horst Ehrich
    • C23C14/04C23C14/32H01J37/305H01J37/32
    • H01J37/32055C23C14/046C23C14/325H01J37/3053
    • A method for evaporating materials in a vacuum chamber by heating a material to be evaporated by the impact of electrons generated in a vacuum arc discharge ignited and sustained between a cold cathode and an anode, comprises the steps of locating the cathode and the anode in a vacuum chamber, connecting the material to be evaporated to at least a part of the anode in the evaporation chamber, generating electrons for a self-sustained discharge in the cathode spots on the cold cathode-surface, bombarding the anode with electrons generated in the arc discharge to obtain on the surface of the anode a power input sufficient for the evaporation of the material, and maintaining the arc discharge essentially in the vapor of the material evaporated at the anode. An apparatus for performing the method includes a vacuum evaporation chamber, in which the cold cathode and the anode, both provided with cooling means are positioned opposite to each other and the material to be evaporated is provided at the end of the anode, facing the cathode.
    • 通过在冷阴极和阳极之间点燃并保持的真空电弧放电中产生的电子的冲击来加热要蒸发的材料的真空室中的材料蒸发方法包括以下步骤:将阴极和阳极定位在 将待蒸发的材料连接到蒸发室中的至少一部分阳极的真空室中,在冷阴极表面的阴极点产生电子以进行自维持放电,用电弧产生的电子轰击阳极 放电以在阳极的表面上获得足以使材料蒸发的功率输入,并且将电弧放电基本保持在阳极蒸发的材料的蒸气中。 一种用于执行该方法的设备包括:真空蒸发室,其中设有冷却装置的冷阴极和阳极彼此相对定位,并且待蒸发的材料设置在阳极的端部,面对阴极 。