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11. 发明授权

US5818578A Polygonal planar multipass cell, system and apparatus including same, and method of use 失效
标题翻译：多边形平面多通道单元，包括其的系统和装置以及使用方法
公开(公告)号：US5818578A
公开(公告)日：1998-10-06
申请号：US711504
申请日：1996-09-10
申请人： Ronald S. Inman , James McAndrew
发明人： Ronald S. Inman , James McAndrew
IPC分类号： C23C16/44 , G01J3/433 , G01N21/03 , G01N21/05 , G01N21/15 , G01N21/35 , G01N21/61 , G01N1/10
CPC分类号： G01N21/3504 , C23C16/4412 , G01J3/433 , G01N21/031 , G01N21/05 , G01N21/15
摘要： Provided is a novel polygonal planar multipass cell and method of use for absorption spectroscopy. The cell comprises a sample region circumscribed by a plurality of walls. Each wall has a light reflective surface facing the sample region, and each wall is connected to at least one other wall so as to form in cross section substantially a polygon. At least one side of the polygon has a light entry/exit port therein, and the entry/exit port contains a light transmissive window which has a surface facing the sample region. The window is disposed so as to seal the cell in the circumferential direction. The cell has a central axis parallel to the light reflective surfaces of the walls and the surface of the light transmissive window which face the sample region. The cell can be used to measure molecular gas impurities in a sample. Particular applicability is found in semiconductor processing.
摘要翻译：提供了一种新颖的多边形平面多通道电池和用于吸收光谱的方法。电池包括被多个壁限定的样品区域。每个壁具有面向样品区域的光反射表面，并且每个壁连接到至少一个其它壁，以便在基本上形成多边形的横截面中形成。多边形的至少一侧在其中具有光入口/出口，并且入口/出口包含具有面向样品区域的表面的透光窗口。窗口被设置成在圆周方向上密封电池。电池具有平行于壁的光反射表面的中心轴线和面向样品区域的透光窗的表面。该电池可用于测量样品中的分子气体杂质。在半导体处理中发现了特殊的适用性。

12. 发明授权

US5742399A Method for stabilizing the wavelength in a laser spectrometer system 失效
标题翻译：在激光光谱仪系统中稳定波长的方法
公开(公告)号：US5742399A
公开(公告)日：1998-04-21
申请号：US711780
申请日：1996-09-10
申请人： James McAndrew , Ronald S. Inman
发明人： James McAndrew , Ronald S. Inman
IPC分类号： G01J3/433 , G01N21/39 , G01N21/31
CPC分类号： G01N21/39 , G01J3/433
摘要： Provided is a novel method for wavelength stabilization in a laser spectrometer useful in spectroscopic measurement. According to the method, an initial scan is performed which comprises applying a current or voltage signal to a laser. In the scan, a current or voltage signal value is increased incrementally from a minimum signal value to a maximum signal value over a predetermined total number of signal values. The minimum and maximum signal values are selected such that an absorption feature of a species to be measured falls within the scan bounded by the minimum and the maximum signal values. The relative position of the absorption feature is determined with respect to the applied signal values in the previous scan by analysis of detector outputs corresponding to the signal values in the previous scan. An absorption value corresponding to the absorption feature is determined, and the concentration of the species to be measured can optionally be calculated. A new current or voltage signal scan is defined by resetting the signal values from the previous scan, so as to set the absorption feature in the new current or voltage scan in the same relative position with respect to the applied signal values as in the previous scan. An additional scan is performed, and the steps can be repeated until completion of the spectroscopic measurement. The inventive method allows for automatic correction and stabilization of wavelength in real time without the need for significant computation beyond what is typically required for determining the concentration of the species of interest from the spectroscopic data. Particular applicability is found in tunable diode laser absorption spectroscopy (TDLAS).
摘要翻译：提供了一种用于光谱测量的激光光谱仪中的波长稳定化的新方法。根据该方法，执行初始扫描，其包括向激光器施加电流或电压信号。在扫描中，电流或电压信号值从预定总信号值的最小信号值增加到最大信号值。选择最小和最大信号值，使得要测量的物质的吸收特征落在由最小和最大信号值限定的扫描范围内。通过分析对应于先前扫描中的信号值的检测器输出，相对于先前扫描中所应用的信号值来确定吸收特征的相对位置。确定与吸收特征相对应的吸收值，并且可以任选地计算要测量的物质的浓度。通过复位来自先前扫描的信号值来定义新的电流或电压信号扫描，以便将新的电流或电压扫描中的吸收特征设置在相对于所施加的信号值的相同相对位置，如在先前的扫描中。执行另外的扫描，并且可以重复这些步骤直到光谱测量完成。本发明的方法允许实时地自动校正和稳定波长，而不需要比从光谱数据确定感兴趣物种的浓度通常需要的显着计算。在可调谐二极管激光吸收光谱（TDLAS）中发现了特殊的适用性。

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