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    • 14. 再颁专利
    • System and method for electronic tracking of units associated with a batch
    • 用于与批次相关联的单元的电子跟踪的系统和方法
    • USRE41815E1
    • 2010-10-12
    • US11872382
    • 2007-10-15
    • Ross S. DandoMark E. Tuttle
    • Ross S. DandoMark E. Tuttle
    • G08B13/14
    • G06K7/10366A22B5/0064A22B7/00A22B7/007A22C17/10G06K7/0008G06K17/0022G06K2017/0045G08B13/2434G08B13/2462
    • In one aspect, the invention encompasses a method for electronic tracking of units originating from a common source which comprises a plurality of units physically joined with one another. A first transponder is physically associated with the common source, and the source is split to separate it into three or more of the units. A second transponder is physically associated with one of the three or more units, and the second transponder sends a code. The code of the second transponder is electrically associated with an identifier of the common source. In a particular aspect, the common source is an animal carcass. A batch comprises separate units of objects that are physically joined together. RFID tags are attached to each of the units and to the batch. The codes stored in the RFID tags are electrically associated with one another in a database.
    • 一方面,本发明包括用于电子跟踪源自公共源的单元的方法,该方法包括彼此物理连接的多个单元。 第一个转发器与公共源物理关联,源被拆分成三个或更多个单元。 第二个转发器与三个或更多个单元中的一个物理相关联,第二个应答器发送一个代码。 第二应答器的代码与公共源的标识符电连接。 在一个特定方面,共同的来源是动物尸体。 批次包括物理连接在一起的单独的物体单元。 RFID标签连接到每个单元和批次。 存储在RFID标签中的代码在数据库中彼此电联系。
    • 16. 发明授权
    • Chemical vapor deposition methods
    • 化学气相沉积法
    • US07378127B2
    • 2008-05-27
    • US09805620
    • 2001-03-13
    • Craig M. CarpenterRoss S. Dando
    • Craig M. CarpenterRoss S. Dando
    • C23C16/00
    • C23C16/45544C23C16/45519C23C16/45527
    • A chemical vapor deposition apparatus includes a deposition chamber defined at least in part by chamber walls, a substrate holder inside the chamber, and at least one process chemical inlet to the chamber. At least one purge inlet to the chamber is positioned elevationally above the substrate holder and outside a lateral periphery of the substrate holder. The purge inlet is configured to inject at least one purge material into the chamber and past the substrate holder. The purge inlet can be positioned and configured to inject an annular purge material curtain concentric to the substrate holder. A chemical vapor deposition method includes injecting at least one purge material into a deposition chamber and forming a purge curtain from the injected purge material. The purge curtain can extend downward from elevationally above a substrate holder and outside a lateral periphery of the substrate holder. The purge curtain can flow past the substrate holder.
    • 化学气相沉积设备包括至少部分地由室壁限定的沉积室,室内的衬底保持器,以及至室的至少一个工艺化学入口。 至少一个到室的净化入口位于衬底保持器的正上方并且位于衬底保持器的侧边外侧。 净化入口构造成将至少一种清洗材料注入室中并经过衬底保持器。 吹扫入口可以被定位和构造成将衬套保持器同心的环形吹扫材料窗口注入。 化学气相沉积方法包括将至少一种吹扫材料注入沉积室并从注入的吹扫材料形成清洗帘。 清洗帘幕可从基板保持器的正上方向下延伸并且在基板保持器的侧边外侧延伸。 清洗帘可以流过基板支架。
    • 17. 发明申请
    • Methods and systems for selectively filling apertures in a substrate to form conductive vias with a liquid using a vacuum
    • 用于选择性地填充衬底中的孔以与使用真空的液体形成导电通孔的方法和系统
    • US20080057691A1
    • 2008-03-06
    • US11511619
    • 2006-08-29
    • Ross S. DandoSteven OliverSwarnal BorthakurKevin Hutto
    • Ross S. DandoSteven OliverSwarnal BorthakurKevin Hutto
    • H01L21/44
    • H01L21/76898H05K3/3468H05K2201/09572H05K2203/0763H05K2203/082
    • Methods of forming a conductive via in a substrate include contacting the substrate with a wave of conductive liquid material, such as molten solder, and drawing the liquid material into the aperture with a vacuum. The wave may be formed by flowing the liquid material out from an outlet in a direction generally against the gravitational field. The liquid material may be solidified to form an electrically conductive structure. A plurality of apertures may be selectively filled with the liquid material one at a time, and liquids having different compositions may be used to provide conductive vias having different compositions in the same substrate. Systems for forming conductive vias include a substrate fixture, a vacuum device having a vacuum fixture, and a solder dispensing device configured to provide a wave of molten solder material. Relative lateral and vertical movement is provided between the wave of molten solder and a substrate supported by the substrate fixture.
    • 在衬底中形成导电通孔的方法包括使衬底与诸如熔融焊料的导电液体材料的波接触,并且用真空将液体材料拉入孔中。 该波浪可以通过使液体材料沿着通常抵靠重力场的方向从出口流出而形成。 液体材料可以被固化以形成导电结构。 可以一次一个地选择性地填充多个孔,并且可以使用具有不同组成的液体来在同一基底中提供具有不同组成的导电通孔。 用于形成导电通孔的系统包括衬底夹具,具有真空夹具的真空装置以及被配置为提供熔融焊料材料波的焊料分配装置。 在熔融焊料的波浪和由基板夹具支撑的基板之间提供相对的横向和垂直运动。
    • 18. 发明授权
    • Valve assemblies for use with a reactive precursor in semiconductor processing
    • 用于半导体加工中的反应性前体的阀组件
    • US07000636B2
    • 2006-02-21
    • US10691769
    • 2003-10-22
    • Ross S. DandoGurtej S. SandhuAllen P. Mardian
    • Ross S. DandoGurtej S. SandhuAllen P. Mardian
    • F16K11/085
    • C30B25/14C23C16/452C23C16/45536C23C16/45542C23C16/45544C23C16/45561C30B25/105Y10S118/90Y10T137/86839Y10T137/86863
    • The invention includes chemical vapor deposition methods, including atomic layer deposition, and valve assemblies for use with a reactive precursor in semiconductor processing. In one implementation, a chemical vapor deposition method includes positioning a semiconductor substrate within a chemical vapor deposition chamber. A first deposition precursor is fed to a remote plasma generation chamber positioned upstream of the deposition chamber, and a plasma is generated therefrom within the remote chamber and effective to form a first active deposition precursor species. The first species is flowed to the deposition chamber. During the flowing, flow of at least some of the first species is diverted from entering the deposition chamber while feeding and maintaining plasma generation of the first deposition precursor within the remote chamber. At some point, diverting is ceased while feeding and maintaining plasma generation of the first deposition precursor within the remote chamber. Other aspects and implementations are contemplated.
    • 本发明包括化学气相沉积方法,包括原子层沉积和用于半导体加工中的反应性前体的阀组件。 在一个实施方案中,化学气相沉积方法包括将半导体衬底定位在化学气相沉积室内。 第一沉积前体被供给到位于沉积室上游的远程等离子体产生室,并且在远程室内产生等离子体,并有效地形成第一活性沉积前体物质。 第一种物质流入沉积室。 在流动期间,至少一些第一物质的流动被转移进入沉积室,同时在远程室内馈送和保持第一沉积前体的等离子体产生。 在某些时候,在远程室内进给和维持第一沉积前体的等离子体产生的同时停止转移。 考虑了其他方面和实现。
    • 20. 发明授权
    • Semiconductor processing reactive precursor valve assembly
    • 半导体加工反应性前体阀组件
    • US06935372B2
    • 2005-08-30
    • US11034015
    • 2005-01-11
    • Ross S. DandoGurtej S. SandhuAllen P. Mardian
    • Ross S. DandoGurtej S. SandhuAllen P. Mardian
    • C23C16/44C23C16/452C23C16/455C30B25/10C30B25/14F16K11/085
    • C30B25/14C23C16/452C23C16/45536C23C16/45542C23C16/45544C23C16/45561C30B25/105Y10S118/90Y10T137/86839Y10T137/86863
    • The invention includes chemical vapor deposition methods, including atomic layer deposition, and valve assemblies for use with a reactive precursor in semiconductor processing. In one implementation, a chemical vapor deposition method includes positioning a semiconductor substrate within a chemical vapor deposition chamber. A first deposition precursor is fed to a remote plasma generation chamber positioned upstream of the deposition chamber, and a plasma is generated therefrom within the remote chamber and effective to form a first active deposition precursor species. The first species is flowed to the deposition chamber. During the flowing, flow of at least some of the first species is diverted from entering the deposition chamber while feeding and maintaining plasma generation of the first deposition precursor within the remote chamber. At some point, diverting is ceased while feeding and maintaining plasma generation of the first deposition precursor within the remote chamber. Other aspects and implementations are contemplated.
    • 本发明包括化学气相沉积方法,包括原子层沉积,以及用于半导体加工中的反应性前体的阀组件。 在一个实施方案中,化学气相沉积方法包括将半导体衬底定位在化学气相沉积室内。 第一沉积前体被供给到位于沉积室上游的远程等离子体产生室,并且在远程室内产生等离子体,并有效地形成第一活性沉积前体物质。 第一种物质流入沉积室。 在流动期间,至少一些第一物质的流动被转移进入沉积室,同时在远程室内馈送和保持第一沉积前体的等离子体产生。 在某些时候,在远程室内进给和维持第一沉积前体的等离子体产生的同时停止转移。 考虑了其他方面和实现。