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    • 11. 发明授权
    • Method for forming barrier layer
    • 形成阻挡层的方法
    • US06750146B2
    • 2004-06-15
    • US10115740
    • 2002-04-03
    • Chun-Chih HuangTai-Lang Chen
    • Chun-Chih HuangTai-Lang Chen
    • H01L21301
    • H01L21/76843H01L21/2855H01L21/28556H01L21/76865
    • The present invention relates to a method for forming a titanium/titanium nitride barrier layer applied in a contact/via opening with a high aspect ratio. After forming a titanium layer by ion metal plasma and before depositing a titanium nitride layer by using metal organic chemical vapor deposition, a gas-stable step is performed for adjusting pressure by supplying a hydrogen gas, a helium gas, a reactive source and a carrier gas. By using hydrogen gas in the gas-stable step before depositing the titanium nitride layer, the RC delay and reflection index of the resultant barrier layer are substantially reduced, thus increasing the performance of the contact/via plug and the device.
    • 本发明涉及一种用于形成具有高纵横比的接触/通孔开口中的钛/氮化钛阻挡层的方法。 在通过离子金属等离子体形成钛层之后,通过使用金属有机化学气相沉积在沉积氮化钛层之前,通过供应氢气,氦气,无源电源和载体来进行气体稳定的步骤 加油站。 通过在沉积氮化钛层之前在气体稳定步骤中使用氢气,所得阻挡层的RC延迟和反射指数显着降低,从而增加了接触/通孔插头和器件的性能。
    • 13. 发明授权
    • Optical film having linear protrusions with inwardly curved ridges and back light module with the optical film
    • 具有带有向内弯曲的脊的线性突起和带有光学膜的背光模块的光学膜
    • US08297802B2
    • 2012-10-30
    • US12576247
    • 2009-10-09
    • Zhi-Ting YeChun-Chih Huang
    • Zhi-Ting YeChun-Chih Huang
    • F21V5/02
    • G02B5/0231G02B6/0053G02B6/0055G02F1/133615G02F2001/133607
    • An optical film includes a body and a plurality of first linear protrusions. The body has a first surface and a second surface opposite to the first surface. The first linear protrusions are disposed on the first surface, and each first linear protrusion is extended along a first direction and has a first curvy ridge line departing from the first surface, wherein the first curvy ridge lines are concave towards a fixed direction. When the first curvy ridge line is located on a suppositional plan, the suppositional plan is not parallel to the first surface. A ratio of a maximum distance between each of the first curvy ridge line and the first surface over a minimum distance between the corresponding first curvy ridge line and the first surface is greater than 1 but less than 8.
    • 光学膜包括主体和多个第一直线突起。 主体具有与第一表面相对的第一表面和第二表面。 第一直线突起设置在第一表面上,并且每个第一直线突起沿着第一方向延伸并且具有从第一表面离开的第一弯曲脊线线,其中第一弯曲脊线朝向固定方向凹入。 当第一弯曲脊线位于假想计划时,假想平面不平行于第一表面。 第一弯曲脊线与第一表面之间的最大距离在相应的第一弯曲脊线与第一表面之间的最小距离之间的比率大于1但小于8。