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    • 11. 发明申请
    • Dual damascene process
    • 双镶嵌工艺
    • US20080227288A1
    • 2008-09-18
    • US11724284
    • 2007-03-15
    • Po-Zen ChenTzu-Chan WengChien-Chung Chen
    • Po-Zen ChenTzu-Chan WengChien-Chung Chen
    • H01L21/4763H01L21/311
    • H01L21/31144H01L21/02063H01L21/31138H01L21/76811
    • A dual damascene process. A first photoresist layer with a first opening corresponding to a trench pattern is formed on a dielectric layer. A second photoresist layer with a second opening corresponding to a via pattern smaller then the trench pattern is formed on the first photoresist layer and extends to a portion of the dielectric layer. The second photoresist layer has a material character different from the first photoresist layer. A via etching process using the second photoresist as a mask is performed to form a via hole passing through the dielectric layer. A photoresist ashing process is performed to remove the second photoresist layer. A trench etching process using the first photoresist layer as a mask is performed to form a trench in the upper portion of the dielectric layer. The via etching process, the photoresist ashing process and the trench etching process are performed as a continuous process in one chamber.
    • 双镶嵌工艺。 在电介质层上形成具有对应于沟槽图案的第一开口的第一光致抗蚀剂层。 在第一光致抗蚀剂层上形成具有对应于小于沟槽图案的通孔图案的第二开口的第二光致抗蚀剂层并且延伸到介电层的一部分。 第二光致抗蚀剂层具有与第一光致抗蚀剂层不同的材料特性。 执行使用第二光致抗蚀剂作为掩模的通孔蚀刻工艺,以形成穿过介电层的通孔。 进行光致抗蚀剂灰化处理以去除第二光致抗蚀剂层。 执行使用第一光致抗蚀剂层作为掩模的沟槽蚀刻工艺,以在电介质层的上部形成沟槽。 通孔蚀刻工艺,光致抗蚀剂灰化处理和沟槽蚀刻工艺在一个室中作为连续工艺进行。
    • 15. 发明授权
    • High speed sensing circuit for a memory device
    • 用于存储器件的高速感测电路
    • US6078524A
    • 2000-06-20
    • US206362
    • 1998-12-07
    • Chien-Chung Chen
    • Chien-Chung Chen
    • G11C16/28G11C16/04
    • G11C16/28
    • A sensing circuit for sensing the binary state of a memory cell includes a first transistor wherein the first spaced-apart region is connected to a first voltage source, and the gate is connected to a second voltage source, a second transistor wherein the first spaced-apart region of the second transistor is connected to the second spaced-apart region of the first transistor, and a third transistor wherein the first spaced-apart region is connected to the second spaced-apart region of the second transistor, the gate is electrically connected to the memory cell, and the second spaced-apart region is connect to a ground potential. The circuit also includes a circuit to generate a first current in response to one binary state of the memory cell and a second current in response to another binary state of the memory cell wherein a feedback circuitry is created between the circuitry to generate currents and the second transistor, and a circuit to produce output signals in response to the first current and the second current.
    • 用于感测存储单元的二进制状态的感测电路包括第一晶体管,其中第一间隔区域连接到第一电压源,并且栅极连接到第二电压源,第二晶体管,其中第一间隔开的区域, 第二晶体管的分开区域连接到第一晶体管的第二间隔区域,以及第三晶体管,其中第一间隔开的区域连接到第二晶体管的第二间隔开的区域,栅极电连接 并且第二间隔开的区域连接到接地电位。 电路还包括响应于存储器单元的一个二进制状态产生第一电流的电路和响应于存储单元的另一二进制状态的第二电流,其中在产生电流的电路之间产生反馈电路,而第二电流产生第二电流 晶体管,以及响应于第一电流和第二电流产生输出信号的电路。
    • 16. 发明授权
    • High speed sensing circuit for a memory device
    • 用于存储器件的高速感测电路
    • US6075726A
    • 2000-06-13
    • US206363
    • 1998-12-07
    • Chien-Chung Chen
    • Chien-Chung Chen
    • G11C16/28G11C16/06
    • G11C16/28
    • A sensing circuit for sensing the binary state of a memory cell in a non-volatile memory device that includes an amplifier electrically connected to the memory cell and current generating circuitry connected to the amplifier for generating a first current in response to one binary state of the memory cell and a second current in response to another binary state of the memory cell. The sensing circuit also includes circuitry to speed initialization of the current generating circuitry and circuitry to prevent transient noise in the output of the sensing circuit during initialization of the current generating circuitry.
    • 一种感测电路,用于感测非易失性存储器件中的存储单元的二进制状态,该存储器单元包括电连接到存储单元的放大器和连接到放大器的电流产生电路,用于响应于第一电流的一个二进制状态产生第一电流 存储单元和响应于存储单元的另一个二进制状态的第二电流。 感测电路还包括用于加速电流发生电路和电路的初始化的电路,以在电流发生电路的初始化期间防止感测电路的输出中的瞬态噪声。