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12. 发明申请

US20050094863A1 SYSTEM FOR SEARCH AND ANALYSIS OF SYSTEMATIC DEFECTS IN INTEGRATED CIRCUITS 有权
标题翻译：集成电路系统缺陷的搜索与分析系统
公开(公告)号：US20050094863A1
公开(公告)日：2005-05-05
申请号：US10605849
申请日：2003-10-30
申请人： Bette Bergman Reuter , David DeMaris , Mark Lavin , William Leipold , Daniel Maynard , Maharaj Mukherjee
发明人： Bette Bergman Reuter , David DeMaris , Mark Lavin , William Leipold , Daniel Maynard , Maharaj Mukherjee
IPC分类号： G06K9/00 , G06T7/00
CPC分类号： G06T7/001 , G06T2207/30148
摘要： Disclosed is a method of locating systematic defects in integrated circuits. The invention first performs a preliminary extracting and index processing of the circuit design and then performs feature searching. When performing the preliminary extracting and index processing the invention establishes a window grid for the circuit design and merges basis patterns with shapes in the circuit design within each window of the window grid. The invention transforms shapes in a each window into feature vectors by finding intersections between the basis patterns and the shapes in the windows. Then, the invention clusters the feature vectors to produce an index of feature vectors. After performing the extracting and index processing, the invention performs the process of feature searching by first identifying a defect region window of the circuit layout and similarly merging basis patterns with shapes in the defect region window. This merging process can include rotating and mirroring the shapes in the defect region. The invention similarly transforms shapes in the defect region window into defect vectors by finding intersections between basis patterns and the shapes in the defect region. Then, the invention can easily find feature vectors that are similar to the defect vector using, for example, representative feature vectors from the index of feature vectors. Then, the similarities and differences between the defect vectors and the feature vectors can be analyzed.
摘要翻译：公开了一种定位集成电路系统缺陷的方法。本发明首先进行电路设计的初步提取和索引处理，然后执行特征搜索。当执行初步提取和索引处理时，本发明建立了用于电路设计的窗口网格，并且将窗体网格的每个窗口内的电路设计中的形状与基本图案合并。本发明通过在窗口中找到基本图案和形状之间的交点来将每个窗口中的形状转换为特征向量。然后，本发明聚集特征向量以产生特征向量的索引。在执行提取和索引处理之后，本发明通过首先识别电路布局的缺陷区域窗口并且将基本模式与缺陷区域窗口中的形状类似地合并来执行特征搜索的处理。该合并过程可以包括旋转和镜像缺陷区域中的形状。本发明类似地通过在缺陷区域中找到基础图案和形状之间的交点来将缺陷区域窗口中的形状转换为缺陷向量。然后，本发明可以使用例如来自特征向量的索引的代表性特征向量容易地找到与缺陷向量相似的特征向量。然后，可以分析缺陷向量和特征向量之间的相似性和差异。

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