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11. 发明授权

US08884725B2 In-plane resonator structures for evanescent-mode electromagnetic-wave cavity resonators 有权
标题翻译：用于ev逝模式电磁波谐振腔谐振器的平面内谐振器结构
公开(公告)号：US08884725B2
公开(公告)日：2014-11-11
申请号：US13451397
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： H01P7/06 , H01P1/205
CPC分类号： H01P1/2088 , H01P7/065
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the cavity resonator includes a lower cavity portion and an upper cavity portion that together form a volume. The cavity resonator also includes an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume to support one or more evanescent electromagnetic wave modes. In some implementations, an upper surface of the resonator structure is connected with the upper cavity portion while a lower mating surface is connected with the lower cavity portion. A distal surface of the resonator structure is separated or electrically insulated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种器件包括ev逝模式电磁波谐振腔谐振器。在一些实施方案中，空腔谐振器包括一起形成体积的下部空腔部分和上部空腔部分。空腔谐振器还包括平面内光刻定义的谐振器结构，其具有至少部分位于体积内的部分，以支持一个或多个瞬逝电磁波模式。在一些实施方案中，谐振器结构的上表面与上空腔部分连接，而下配合表面与下腔体部分连接。谐振器结构的远端表面与距离其最近的表面分开或电绝缘间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。

12. 发明申请

US20130278998A1 IN-PLANE RESONATOR STRUCTURES FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS 有权
标题翻译：用于EVANESCENT-MODE电磁波腔谐振器的平面内共振器结构
公开(公告)号：US20130278998A1
公开(公告)日：2013-10-24
申请号：US13451397
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： H01S3/086 , H01S3/08
CPC分类号： H01P1/2088 , H01P7/065
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the cavity resonator includes a lower cavity portion and an upper cavity portion that together form a volume. The cavity resonator also includes an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume to support one or more evanescent electromagnetic wave modes. In some implementations, an upper surface of the resonator structure is connected with the upper cavity portion while a lower mating surface is connected with the lower cavity portion. A distal surface of the resonator structure is separated or electrically insulated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种器件包括ev逝模式电磁波谐振腔谐振器。在一些实施方案中，空腔谐振器包括一起形成体积的下部空腔部分和上部空腔部分。空腔谐振器还包括平面内光刻定义的谐振器结构，其具有至少部分位于体积内的部分，以支持一个或多个瞬逝电磁波模式。在一些实施方案中，谐振器结构的上表面与上空腔部分连接，而下配合表面与下腔体部分连接。谐振器结构的远端表面与距离其最近的表面分开或电绝缘间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。

13. 发明申请

US20130278610A1 TOPPED-POST DESIGNS FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS 审中-公开
标题翻译：用于EVANESCENT-MODE电磁波腔谐振器的TOPPED-POST设计
公开(公告)号：US20130278610A1
公开(公告)日：2013-10-24
申请号：US13451392
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： G06T1/00 , H01P7/06
CPC分类号： H01P1/208 , H01P7/06
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator that includes a cavity operable to support one or more evanescent electromagnetic wave modes. The resonator includes a cavity ceiling arranged to form a volume in conjunction with the cavity. The resonator also includes a capacitive tuning structure. In some implementations, the resonator also includes a post top positioned at a distal surface of the capacitive tuning structure. In some implementations, the post top has a dimension that is larger than a corresponding dimension of the capacitive tuning structure. In some implementations, a distal surface of the post top is separated from a surface by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance and the dimension of the post top.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种装置包括ev逝模式电磁波谐振腔谐振器，其包括可操作以支持一个或多个ev逝电磁波模式的空腔。谐振器包括设置成与空腔结合形成体积的空腔顶板。谐振器还包括电容调谐结构。在一些实施方案中，谐振器还包括位于电容调谐结构的远端表面处的柱顶。在一些实施方案中，柱顶具有大于电容调谐结构的对应尺寸的尺寸。在一些实施方案中，柱顶部的远端表面与表面分开间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离和柱顶的尺寸。

14. 发明申请

US20130278359A1 TWO- AND THREE-SUBSTRATE LEVEL PROCESSES FOR PRODUCING EVANESCENT MODE ELECTROMAGNETIC WAVE CAVITY RESONATORS 审中-公开
标题翻译：用于生产EVANESCENT模式电磁波腔谐振器的两基板和三基板级
公开(公告)号：US20130278359A1
公开(公告)日：2013-10-24
申请号：US13451400
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： H01P7/06 , H01P11/00 , H01L41/22
CPC分类号： H01P1/2088 , H01P7/065 , Y10T29/42 , Y10T29/4902
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a method includes providing a first substrate and a second substrate. In some implementations, the first substrate includes a cavity ceiling, an array of dielectric spacers, and an assembly platform arranged adjacent the array of dielectric spacers opposite the cavity ceiling surface. The assembly platform includes a plurality of post tops. In some implementations, the second substrate has an array of cavities and an array of resonator posts. In some implementations, the method includes mating the first substrate with the second substrate, connecting the post tops with the posts to form an array that includes a plurality of evanescent-mode electromagnetic wave cavity resonators, wherein at least a statically-defined magnitude of a gap distance between the distal surface of each post top and the cavity ceiling is defined by the dielectric spacers.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。一方面，一种方法包括提供第一基底和第二基底。在一些实施方案中，第一衬底包括空腔顶板，电介质间隔件的阵列以及与腔体顶表面相对的电介质隔片阵列附近布置的组装平台。组装平台包括多个柱顶。在一些实施方案中，第二衬底具有空腔阵列和谐振器柱阵列。在一些实施方式中，该方法包括将第一衬底与第二衬底配合，将柱顶与柱连接以形成包括多个渐逝模式电磁波腔共振器的阵列，其中至少一个静态限定的量级每个柱顶的远端表面和腔顶之间的间隙距离由介电间隔物限定。

15. 发明申请

US20100321132A1 TUNABLE MEMS RESONATORS 有权
标题翻译： TUNABLE MEMS谐振器
公开(公告)号：US20100321132A1
公开(公告)日：2010-12-23
申请号：US12488404
申请日：2009-06-19
申请人： Sang-June Park
发明人： Sang-June Park
IPC分类号： H03H9/00 , H03B5/30
CPC分类号： H03H9/02244 , E05Y2900/402 , H01P1/127 , H01P1/2084 , H03H9/462
摘要： Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable plate located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.
摘要翻译：描述了具有可调谐共振频率并且能够处理大信号的可调谐MEMS谐振器。在一个示例性设计中，可调MEMS MEMS谐振器包括（i）具有空腔和柱的第一部分和（ii）与第一部分配合的第二部分，并且包括位于柱下方的可动板。每个部分可以在面向另一部分的表面上被金属层覆盖。可移动板可通过DC电压机械地移动以改变MEMS谐振器的谐振频率。空腔可以具有矩形或圆形形状，并且可以是空的或者用电介质材料填充。柱可以位于腔的中间。可移动板可以经由锚固件附接到第二部件（i）并作为悬臂操作，或者（ii）经由两个锚定件并作为桥梁操作。

16. 发明授权

US09178256B2 Isotropically-etched cavities for evanescent-mode electromagnetic-wave cavity resonators 有权
标题翻译：用于渐逝模式电磁波谐振腔的各向同性蚀刻腔
公开(公告)号：US09178256B2
公开(公告)日：2015-11-03
申请号：US13451385
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： H01P1/207 , H01P7/06 , H01P1/208 , H01P11/00 , H01P1/202 , H01P7/04
CPC分类号： H01P1/208 , H01P1/202 , H01P1/2084 , H01P7/04 , H01P7/06 , H01P11/007 , H01P11/008
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the resonator includes an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes. In some implementations, the resonator also includes a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity. In some implementations, the resonator also includes a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the evanescent electromagnetic wave modes. In some implementations, a distal surface of the tuning structure is separated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种器件包括ev逝模式电磁波谐振腔谐振器。在一些实施方案中，谐振器包括可操作以支持一个或多个ev逝电磁波模式的各向同性蚀刻的腔。在一些实施方案中，谐振器还包括空腔顶板，其被设置成与各向同性蚀刻的空腔结合形成体积。在一些实施方案中，谐振器还包括电容调谐结构，其具有至少部分地位于体积内的部分，以便支持渐逝电磁波模式。在一些实施方案中，调谐结构的远端表面与距离其最近的表面分开间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。

17. 发明申请

US20130278609A1 ISOTROPICALLY-ETCHED CAVITIES FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS 有权
标题翻译： EVEESCENT-MODE电磁波腔谐振器的等离子体蚀刻
公开(公告)号：US20130278609A1
公开(公告)日：2013-10-24
申请号：US13451385
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： G06T1/00 , B44C1/22 , H01P11/00 , H01P7/06
CPC分类号： H01P1/208 , H01P1/202 , H01P1/2084 , H01P7/04 , H01P7/06 , H01P11/007 , H01P11/008
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the resonator includes an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes. In some implementations, the resonator also includes a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity. In some implementations, the resonator also includes a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the evanescent electromagnetic wave modes. In some implementations, a distal surface of the tuning structure is separated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种器件包括ev逝模式电磁波谐振腔谐振器。在一些实施方案中，谐振器包括可操作以支持一个或多个ev逝电磁波模式的各向同性蚀刻的腔。在一些实施方案中，谐振器还包括空腔顶板，其被设置成与各向同性蚀刻的空腔结合形成体积。在一些实施方案中，谐振器还包括电容调谐结构，其具有至少部分地位于体积内的部分，以便支持渐逝电磁波模式。在一些实施方案中，调谐结构的远端表面与距离其最近的表面分开间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。

18. 发明授权

US08362853B2 Tunable MEMS resonators 有权
标题翻译：可调谐MEMS谐振器
公开(公告)号：US08362853B2
公开(公告)日：2013-01-29
申请号：US12488404
申请日：2009-06-19
申请人： Sang-June Park
发明人： Sang-June Park
IPC分类号： H03H9/24 , H03B5/30 , H01P7/06
CPC分类号： H03H9/02244 , E05Y2900/402 , H01P1/127 , H01P1/2084 , H03H9/462
摘要： Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable plate located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.
摘要翻译：描述了具有可调谐共振频率并且能够处理大信号的可调谐MEMS谐振器。在一个示例性设计中，可调MEMS MEMS谐振器包括（i）具有空腔和柱的第一部分和（ii）与第一部分配合的第二部分，并且包括位于柱下方的可动板。每个部分可以在面向另一部分的表面上被金属层覆盖。可移动板可通过DC电压机械地移动以改变MEMS谐振器的谐振频率。空腔可以具有矩形或圆形形状，并且可以是空的或者用电介质材料填充。柱可以位于腔的中间。可移动板可以经由锚固件附接到第二部件（i）并作为悬臂操作，或者（ii）经由两个锚定件并作为桥梁操作。

19. 发明授权

US08363380B2 MEMS varactors 有权
标题翻译： MEMS变容二极管
公开(公告)号：US08363380B2
公开(公告)日：2013-01-29
申请号：US12473882
申请日：2009-05-28
申请人： Je-Hsiung Lan , Evgeni P. Gousev , Wenyue Zhang , Manish Kothari , Sang-June Park
发明人： Je-Hsiung Lan , Evgeni P. Gousev , Wenyue Zhang , Manish Kothari , Sang-June Park
IPC分类号： H01G7/00 , H01G7/06
CPC分类号： H01G7/00 , H01G5/16 , H01P1/127 , Y10T29/435
摘要： MEMS varactors capable of handling large signals and/or achieving a high capacitance tuning range are described. In an exemplary design, a MEMS varactor includes (i) a first bottom plate electrically coupled to a first terminal receiving an input signal, (ii) a second bottom plate electrically coupled to a second terminal receiving a DC voltage, and (iii) a top plate formed over the first and second bottom plates and electrically coupled to a third terminal. The DC voltage causes the top plate to mechanically move and vary the capacitance observed by the input signal. In another exemplary design, a MEMS varactor includes first, second and third plates formed on over one another and electrically coupled to first, second and third terminals, respectively. First and second DC voltages may be applied to the first and third terminals, respectively. An input signal may be passed between the first and second terminals.
摘要翻译：描述能够处理大信号和/或实现高电容调谐范围的MEMS变容二极管。在示例性设计中，MEMS变容二极管包括（i）电耦合到接收输入信号的第一端子的第一底板，（ii）电耦合到接收DC电压的第二端子的第二底板，以及（iii）顶板形成在第一和第二底板上并电耦合到第三端子。直流电压使顶板机械地移动并改变由输入信号观察到的电容。在另一示例性设计中，MEMS变容二极管包括彼此形成并分别电耦合到第一，第二和第三端子的第一，第二和第三板。第一和第二直流电压可以分别施加到第一和第三端子。输入信号可以在第一和第二端子之间通过。

20. 发明申请

US20110109383A1 MEMS VARACTORS 有权
标题翻译： MEMS变阻器
公开(公告)号：US20110109383A1
公开(公告)日：2011-05-12
申请号：US12473882
申请日：2009-05-28
申请人： Je-Hsiung Lan , Evgeni P. Gousev , Wenyue Zhang , Manish Kothari , Sang-June Park
发明人： Je-Hsiung Lan , Evgeni P. Gousev , Wenyue Zhang , Manish Kothari , Sang-June Park
IPC分类号： H01L29/93
CPC分类号： H01G7/00 , H01G5/16 , H01P1/127 , Y10T29/435
摘要： MEMS varactors capable of handling large signals and/or achieving a high capacitance tuning range are described. In an exemplary design, a MEMS varactor includes (i) a first bottom plate electrically coupled to a first terminal receiving an input signal, (ii) a second bottom plate electrically coupled to a second terminal receiving a DC voltage, and (iii) a top plate formed over the first and second bottom plates and electrically coupled to a third terminal. The DC voltage causes the top plate to mechanically move and vary the capacitance observed by the input signal. In another exemplary design, a MEMS varactor includes first, second and third plates formed on over one another and electrically coupled to first, second and third terminals, respectively. First and second DC voltages may be applied to the first and third terminals, respectively. An input signal may be passed between the first and second terminals.
摘要翻译：描述能够处理大信号和/或实现高电容调谐范围的MEMS变容二极管。在示例性设计中，MEMS变容二极管包括（i）电耦合到接收输入信号的第一端子的第一底板，（ii）电耦合到接收DC电压的第二端子的第二底板，以及（iii）顶板形成在第一和第二底板上并电耦合到第三端子。直流电压使顶板机械地移动并改变由输入信号观察到的电容。在另一示例性设计中，MEMS变容二极管包括彼此形成并分别电耦合到第一，第二和第三端子的第一，第二和第三板。第一和第二直流电压可以分别施加到第一和第三端子。输入信号可以在第一和第二端子之间通过。

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