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    • 13. 发明授权
    • Method of fabricating triode-structure field-emission device
    • 制造三极管结构场致发射器件的方法
    • US08288082B2
    • 2012-10-16
    • US12292027
    • 2008-11-10
    • Chan Wook BaikJunhee ChoiSeog Woo HongJoo Ho Lee
    • Chan Wook BaikJunhee ChoiSeog Woo HongJoo Ho Lee
    • G03F7/11
    • H01J31/127H01J29/04H01J2329/0455
    • Example embodiments provide a method of fabricating a triode-structure field-emission device. A cathode, an insulating layer, and a gate metal layer may be sequentially formed on a substrate. A first resist pattern having a first opening and a second resist pattern having a second opening smaller than the first opening may be formed to be sequentially laminated on the gate metal layer. Then, the gate metal layer and the insulating layer may be etched using the first resist pattern to form a gate electrode and an insulating layer having a first hole and a second hole corresponding to the first opening. A catalyst layer may be formed on the cathode exposed through the first and second holes using the second resist pattern. After the first resist pattern, second resist pattern, and the catalyst layer on the second resist pattern are removed, an emitter may be formed on the catalyst layer in the second hole.
    • 示例性实施例提供了制造三极管结构场致发射器件的方法。 可以在基板上依次形成阴极,绝缘层和栅极金属层。 可以形成具有第一开口的第一抗蚀剂图案和具有小于第一开口的第二开口的第二抗蚀剂图案,以依次层压在栅极金属层上。 然后,可以使用第一抗蚀剂图案蚀刻栅极金属层和绝缘层,以形成具有与第一开口对应的第一孔和第二孔的栅电极和绝缘层。 可以使用第二抗蚀剂图案在通过第一孔和第二孔暴露的阴极上形成催化剂层。 在第一抗蚀剂图案,第二抗蚀剂图案和第二抗蚀剂图案上的催化剂层被去除之后,可以在第二孔中的催化剂层上形成发射极。
    • 14. 发明申请
    • Method of fabricating Triode-Structure field-emission device
    • 三极管结构场致发射器件的制造方法
    • US20090233240A1
    • 2009-09-17
    • US12292027
    • 2008-11-10
    • Chan Wook BaikJunhee ChoiSeog Woo HongJoo Ho Lee
    • Chan Wook BaikJunhee ChoiSeog Woo HongJoo Ho Lee
    • G03F7/20
    • H01J31/127H01J29/04H01J2329/0455
    • Example embodiments provide a method of fabricating a triode-structure field-emission device. A cathode, an insulating layer, and a gate metal layer may be sequentially formed on a substrate. A first resist pattern having a first opening and a second resist pattern having a second opening smaller than the first opening may be formed to be sequentially laminated on the gate metal layer. Then, the gate metal layer and the insulating layer may be etched using the first resist pattern to form a gate electrode and an insulating layer having a first hole and a second hole corresponding to the first opening. A catalyst layer may be formed on the cathode exposed through the first and second holes using the second resist pattern. After the first resist pattern, second resist pattern, and the catalyst layer on the second resist pattern are removed, an emitter may be formed on the catalyst layer in the second hole.
    • 示例性实施例提供了制造三极管结构场致发射器件的方法。 可以在基板上依次形成阴极,绝缘层和栅极金属层。 可以形成具有第一开口的第一抗蚀剂图案和具有小于第一开口的第二开口的第二抗蚀剂图案,以依次层压在栅极金属层上。 然后,可以使用第一抗蚀剂图案蚀刻栅极金属层和绝缘层,以形成具有与第一开口对应的第一孔和第二孔的栅电极和绝缘层。 可以使用第二抗蚀剂图案在通过第一孔和第二孔暴露的阴极上形成催化剂层。 在第一抗蚀剂图案,第二抗蚀剂图案和第二抗蚀剂图案上的催化剂层被去除之后,可以在第二孔中的催化剂层上形成发射极。