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    • 15. 发明授权
    • Acceleration measuring device with pulse width modulation resetting
    • 具有脉宽调制复位功能的加速度测量装置
    • US06691572B1
    • 2004-02-17
    • US10019884
    • 2001-12-27
    • Eberhard Handrich
    • Eberhard Handrich
    • G01P1513
    • G01P15/131G01P15/125
    • An accelerometer having a micromechanical pendulum, a capacitive pick off and a control loop reset by electrostatic forces and, in a time sequence, applies a resetting voltage between the pendulum and two electrodes spaced apart on opposite sides of the pendulum. The control loop is designed such that, firstly, no charge difference flows via the pendulum and a force of identical magnitude thus acts on both sides of the pendulum. Secondly, when a pendulum deflection occurs in response to a voltage difference, the time durations of the respectively applied voltage pulses are impeded in accordance with the acceleration. The simultaneous control of two components results in the control bias tending essentially to zero. The capability of temporarily switching to detection of the total charge as the control variable also allows control of the scale factor of the accelerometer.
    • 具有微机械摆,电容拾取和通过静电力复位的控制回路的加速度计,并且在时间顺序中,在摆和在摆的相对侧间隔开的两个电极之间施加复位电压。 控制回路被设计成使得首先,没有电荷差通过摆锤流动,因此相同量的力作用在摆锤的两侧。 其次,当响应于电压差发生摆动偏转时,根据加速度阻止分别施加的电压脉冲的持续时间。 两个组件的同时控制导致控制偏差基本上趋于零。 暂时切换到总电荷检测的能力作为控制变量也允许控制加速度计的比例因子。