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11. 发明授权

US08450598B2 Method and structure for providing a uniform micron/sub-micron gap separation within micro-gap thermophotovoltaic devices for the generation of electrical power 有权
标题翻译：用于在微间隙热光伏器件内提供用于产生电功率的均匀微米/亚微米间隙分离的方法和结构
公开(公告)号：US08450598B2
公开(公告)日：2013-05-28
申请号：US13297535
申请日：2011-11-16
申请人： Paul Greiff , Robert DiMatteo , Eric Brown , Christopher Leitz
发明人： Paul Greiff , Robert DiMatteo , Eric Brown , Christopher Leitz
IPC分类号： H01L31/00 , H01L35/00 , H01L37/00 , H01L35/34
CPC分类号： H01L31/024 , H02S10/30
摘要： A near-field energy conversion method, utilizing a sub-micrometer “near-field” gap between juxtaposed infrared radiation receiver and emitter surfaces, wherein compliant membrane structures, preferably fluid-filled, are interposed in the structure for maintaining uniform gap separation. Thermally resistant gap spacers are also used to maintain uniform gap separation. Means are provided for cooling a receiver substrate structure and for conducting heat to an emitter substrate structure. The gap may also be evacuated for more effective operation.
摘要翻译：近场能量转换方法利用并置的红外辐射接收器和发射器表面之间的亚微米“近场”间隙，其中优选流体填充的柔性膜结构被插入在结构中以保持均匀的间隙分离。耐热间隙垫片也用于保持均匀的间隙分离。提供了用于冷却接收器衬底结构并将热量传导到发射极衬底结构的装置。间隙也可以被抽出来以便更有效的操作。

12. 发明授权

US06615681B1 Hybrid wafer gyroscope 有权
标题翻译：混合晶圆陀螺仪
公开(公告)号：US06615681B1
公开(公告)日：2003-09-09
申请号：US09916020
申请日：2001-07-26
申请人： Lyle J. Jenkins , Ralph E. Hopkins , Kaplesh Kumar , Paul Greiff , Edmund R. Foster , Richard M. Walker , Richard H. Coco , Anthony M. Moscaritolo
发明人： Lyle J. Jenkins , Ralph E. Hopkins , Kaplesh Kumar , Paul Greiff , Edmund R. Foster , Richard M. Walker , Richard H. Coco , Anthony M. Moscaritolo
IPC分类号： G01C1930
CPC分类号： G01C19/06 , Y10T74/125 , Y10T74/1282 , Y10T74/1293
摘要： A hybrid wafer gyroscope includes a combination of micro-machined components and traditional electromechanical components to form a miniature gyroscope having a high degree of stability. The gyroscope includes a rotor, gimbal, flexures, and stop cutouts micro-machined out of one or more layers of silicon, forming a unitary, planar, and disk-shaped rotor subassembly, which spins about a drive shaft.
摘要翻译：混合晶片陀螺仪包括微加工部件和传统机电部件的组合，以形成具有高度稳定性的微型陀螺仪。陀螺仪包括由一个或多个硅层微机加工的转子，万向架，弯曲和停止切口，形成围绕驱动轴旋转的整体的，平面的和盘形的转子子组件。

13. 发明授权

US5760305A Monolithic micromechanical vibrating beam accelerometer with trimmable resonant frequency 失效
标题翻译：具有可调谐谐振频率的单片微机械振动束加速度计
公开(公告)号：US5760305A
公开(公告)日：1998-06-02
申请号：US602512
申请日：1996-02-20
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： G01P15/08 , G01P15/097 , G01P15/10 , G01P15/00
CPC分类号： G01P15/097 , G01P15/0802 , G01P2015/0814 , G01P2015/0831
摘要： A monolithic, micromechanical vibrating beam accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally collinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction collinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer. Further disclosed is an alternative embodiment of the aforementioned accelerometer characterized by a low profile, and alternative planar processing methods for fabrication of these and other embodiments.
摘要翻译：具有可调谐谐振频率的单片微机械振动束加速度计由硅衬底制成，硅衬底已被选择性地蚀刻以提供悬浮在蚀刻凹坑上的谐振结构。谐振结构包括加速度敏感质量和至少两个具有谐振频率的柔性元件。每个柔性元件设置成与加速度计的至少一个加速度敏感轴线大致共线。至少一个柔性元件的一端附接到张力释放梁，以提供在制造过程中产生的张力的应力消除。具有高纵横比的质量支撑梁支撑蚀刻坑的质量，同时允许质量沿与柔性元件共线的方向自由移动。还公开了一种用于制造这种加速度计的方法。进一步公开的是上述加速度计的替代实施例，其特征在于具有低轮廓和用于制造这些和其它实施例的替代平面处理方法。

14. 发明授权

US5725729A Process for micromechanical fabrication 失效
标题翻译：微机械制造工艺
公开(公告)号：US5725729A
公开(公告)日：1998-03-10
申请号：US698479
申请日：1996-08-15
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： B81B3/00 , B81B7/00 , B81C1/00 , G01P15/08 , H01L21/3105
CPC分类号： B81C1/0019 , G01P15/0802 , B81B2207/015 , B81C2201/019 , G01P2015/0828 , G01P2015/0831
摘要： An improved process for fabricating micromechanical devices having movable members, such as gyros and accelerometers. A starting wafer includes an oxidized silicon wafer which has been wafer bonded to a second silicon wafer which has a thin N layer on a P substrate. The wafer is patterned, doped and etched in a series of process steps which include the deposition of epitaxial layers to configure critical device dimensions and geometry. Metallizations are deposited for electrical/electronic interconnections. The process includes an ability to integrate on-chip electronics on the silicon substrate. Alignment difficulties and thermal mismatch associated with prior art processes are minimized.
摘要翻译：一种用于制造具有可移动构件的微机械装置的改进方法，例如陀螺仪和加速度计。起始晶片包括已经晶片结合到在P基板上具有薄N层的第二硅晶片的氧化硅晶片。在一系列工艺步骤中对晶片进行图案化，掺杂和蚀刻，其中包括沉积外延层以配置关键器件尺寸和几何形状。为电气/电子互连保留金属化。该过程包括在硅衬底上集成片上电子器件的能力。与现有技术方法相关联的对准困难和热失配被最小化。

15. 发明授权

US5581035A Micromechanical sensor with a guard band electrode 失效
标题翻译：具有保护带电极的微机械传感器
公开(公告)号：US5581035A
公开(公告)日：1996-12-03
申请号：US297655
申请日：1994-08-29
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： G01P15/08 , G01P15/125 , G01P15/13
CPC分类号： G01P15/131 , G01P15/0802 , G01P15/125 , G01P2015/0831
摘要： An electrostatically actuated micromechanical sensor having a guard band electrode for reducing the effect of transients associated with a dielectric substrate of the sensor. A proof mass, responsive to an input, is suspended over the substrate and one or more electrodes are disposed on the substrate in electrostatic communication with the proof mass to sense the input acceleration and/or to torque the proof mass back to a null position. A guard band electrode is disposed over the dielectric substrate in overlapping relationship with the electrodes and maintains the surface of the substrate at a reference potential, thereby shielding the proof mass from transients and enhancing the accuracy of the sensor.
摘要翻译：一种具有保护带电极的静电致动微机械传感器，用于降低与传感器的电介质基板相关的瞬变的影响。响应于输入的检测质量块悬挂在衬底上，并且一个或多个电极设置在衬底上，与校准物质静电连通以感测输入加速度和/或将校准质量块扭转回到零位置。保护带电极以与电极重叠的关系设置在电介质基板上，并将基板的表面保持在参考电位，从而屏蔽了质量不受瞬态影响，并提高了传感器的精度。

16. 发明授权

US5507911A Monolithic micromechanical vibrating string accelerometer with trimmable resonant frequency 失效
标题翻译：具有可调谐共振频率的单片微机械振弦加速度计
公开(公告)号：US5507911A
公开(公告)日：1996-04-16
申请号：US422432
申请日：1995-04-14
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： G01P15/08 , G01P15/097 , G01P15/10 , H01L21/00
CPC分类号： G01P15/097 , G01P15/0802 , G01P2015/0814 , G01P2015/0831 , Y10S438/978
摘要： A monolithic, micromechanical vibrating string accelerometer with a trimmable resonant frequency is fabricated from a silicon substrate which has been selectively etched to provide a resonant structure suspended over an etched pit. The resonant structure comprises an acceleration sensitive mass and at least two flexible elements having resonant frequencies. Each of the flexible elements is disposed generally colinear with at least one acceleration sensitive axis of the accelerometer. One end of at least one of the flexible elements is attached to a tension relief beam for providing stress relief of tensile forces created during the fabrication process. Mass support, beams having a high aspect ratio support the mass over the etched pit while allowing the mass to move freely in the direction colinear with the flexible elements. Also disclosed is a method for fabricating such an accelerometer with high aspect ratio tension relief and mass support beams.
摘要翻译：具有可调谐谐振频率的单片微机械振弦系统加速度计由硅衬底制成，该衬底已被选择性地蚀刻以提供悬浮在蚀刻凹坑上的谐振结构。谐振结构包括加速度敏感质量和至少两个具有谐振频率的柔性元件。每个柔性元件通常与加速度计的至少一个加速度敏感轴线共线设置。至少一个柔性元件的一端附接到张力释放梁，以提供在制造过程中产生的张力的应力消除。质量支撑，具有高纵横比的梁支撑蚀刻凹坑上的质量，同时允许质量在与柔性元件的共线方向上自由移动。还公开了一种用于制造具有高纵横比张力释放和质量支撑梁的这种加速度计的方法。

17. 发明授权

US5126812A Monolithic micromechanical accelerometer 失效
标题翻译：单片微机械加速度计
公开(公告)号：US5126812A
公开(公告)日：1992-06-30
申请号：US528051
申请日：1990-05-23
申请人： Paul Greiff
发明人： Paul Greiff
IPC分类号： G01C19/5719 , G01P15/08
CPC分类号： G01C19/5719 , G01P15/0802 , G01P15/0888
摘要： A micromechanical accelerometer is disclosed comprising a mass of monocrystalline silicon in which a substantially symmetrical plate attached to a silicon frame by flexible linkages is produced by selective etching. The plate has a plurality of apertures patterned and etched therethrough to speed further etching and freeing of the plate and flexible linkages, suspending them above a void etched beneath. The plate has a weight disposed thereon near an end remote from the flexible linkages. The plate is capable of limited motion about an axis created by the flexible linkages. Stop means limit motion of the plate about the axis. Strain relief tension beams are provided to relieve stress induced by boron diffusion necessary to provide etch stopping and the tension beams are trimmable in a manner which permits tuning of the resonant frequency of the plate. Grooves or depressions are provided in the flexible linkages to resist bending or buckling without increasing torsional stiffness. The plate and flexible linkages are electrically isolated from the silicon mass and frame by dielectric or P-N junction isolation. Integral P-N junction electrodes and surface bridging electrodes may be used to provide top to bottom symmetry in torquing and sensing of the plate while maintaining isolation and monlithic construction. Bias and readout circuitry used to sense and torque the plate may be provided integrally with the plate and formed during plate processing.
摘要翻译：公开了一种微机械加速度计，其包括大量单晶硅，其中通过选择性蚀刻产生通过柔性连接件附接到硅框架的基本上对称的板。该板具有图案化并通过其蚀刻的多个孔，以进一步蚀刻和释放板和柔性连接件，将它们悬挂在蚀刻在下面的空隙之上。该板在其远离柔性连杆的端部附近设置有重物。该板能够围绕由柔性连杆产生的轴限制运动。停止是指限制板围绕轴的运动。应力消除张力梁被提供以减轻由于提供蚀刻停止所需的硼扩散引起的应力，并且张力束可以以允许调谐板的谐振频率的方式进行调整。在柔性连杆中提供凹槽或凹陷以抵抗弯曲或屈曲，而不增加扭转刚度。板和柔性连接件通过电介质或P-N结隔离与硅质量块和框架电隔离。整体P-N结电极和表面桥接电极可以用于在保持隔离和单层结构的同时在板的扭转和感测中提供顶对称对称性。用于感测和扭转板的偏置和读出电路可以与板一体地设置并在板处理期间形成。

18. 发明申请

US20150372634A1 LATERAL PHOTOVOLTAIC DEVICE FOR NEAR FIELD USE 有权
标题翻译：用于近场使用的横向光伏器件
公开(公告)号：US20150372634A1
公开(公告)日：2015-12-24
申请号：US14740559
申请日：2015-06-16
申请人： Paul Greiff , Jose M. Borrego
发明人： Paul Greiff , Jose M. Borrego
IPC分类号： H02S10/30 , H01L31/18 , H01L31/056
CPC分类号： H02S10/30 , H01L31/046 , H01L31/0465 , H01L31/056 , H01L31/068 , H01L31/1808 , Y02E10/52 , Y02E10/547
摘要： A device, method and process of fabricating an interdigitated multicell thermo-photo-voltaic component that is particularly efficient for generating electrical energy from photons in the red and near-infrared spectrum received from a heat source in the near field. Where the absorbing region is germanium, the device is capable of generating electrical energy by absorbing photon energy in the greater than 0.67 electron volt range corresponding to radiation in the infrared and near-infrared spectrum. Use of germanium semiconductor material provides a good match for converting energy from a low temperature heat source. The side that is opposite the photon receiving side of the device includes metal interconnections and dielectric material which provide an excellent back surface reflector for recycling below band photons back to the emitter. Multiple cells may be fabricated and interconnected as a monolithic large scale array for improved performance.
摘要翻译：一种用于制造交叉指示的多单元热电荷分量的装置，方法和过程，其特别有效地用于从近场中的热源接收的红色和近红外光谱中的光子产生电能。在吸收区域是锗的情况下，该装置能够通过在大于0.67电子伏范围内吸收光子能量来产生电能，该范围对应于红外和近红外光谱中的辐射。使用锗半导体材料可以很好地匹配从低温热源转换能量。与器件的光子接收侧相对的一侧包括金属互连和电介质材料，其提供优良的后表面反射器，用于将低于光谱的光子再循环回发射器。可以制造多个单元并将其互连成单片大规模阵列，以提高性能。

19. 发明申请

US20130298963A1 LATERAL PHOTOVOLTAIC DEVICE FOR NEAR FIELD USE 有权
公开(公告)号：US20130298963A1
公开(公告)日：2013-11-14
申请号：US13469842
申请日：2012-05-11
申请人： Paul Greiff , Jose M. Borrega
发明人： Paul Greiff , Jose M. Borrega
IPC分类号： H01L31/052 , H01L29/66 , H01L31/042
CPC分类号： H02S10/30 , H01L31/046 , H01L31/0465 , H01L31/056 , H01L31/068 , H01L31/1808 , Y02E10/52 , Y02E10/547
摘要： A device, method and process of fabricating an interdigitated multicell thermo-photo-voltaic component that is particularly efficient for generating electrical energy from photons in the red and near-infrared spectrum received from a heat source in the near field. Where the absorbing region is germanium, the device is capable of generating electrical energy by absorbing photon energy in the greater than 0.67 electron volt range corresponding to radiation in the infrared and near-infrared spectrum. Use of germanium semiconductor material provides a good match for converting energy from a low temperature heat source. The side that is opposite the photon receiving side of the device includes metal interconnections and dielectric material which provide an excellent back surface reflector for recycling below band photons back to the emitter. Multiple cells may be fabricated and interconnected as a monolithic large scale array for improved performance.

20. 发明授权

US07356922B2 Method of fabricating a rate gyroscope and accelerometer multisensor 失效
标题翻译：制造速率陀螺仪和加速度计多传感器的方法
公开(公告)号：US07356922B2
公开(公告)日：2008-04-15
申请号：US11113965
申请日：2005-04-25
申请人： Charles R. Dauwalter , Donato Cardarelli , Paul Greiff
发明人： Charles R. Dauwalter , Donato Cardarelli , Paul Greiff
IPC分类号： H05K3/02 , H05K3/10
CPC分类号： H02K19/103 , G01C19/24 , G01P15/18 , H02K7/09 , Y10T29/4902 , Y10T29/49048 , Y10T29/49155 , Y10T29/49156 , Y10T29/49167
摘要： Three magnetic substrates are provided, the first substrate forms the rotor and the other two form the outer stator. A series of spaced concentric grooves and spaced spiral grooves are formed in the central region of both faces of the first substrate. A hole is placed at the center of the spiral grooves, and filled with magnetic material. A conductor is then deposited into the spiral grooves, forming a central wheel. A series of spaced serpentine grooves and generally radial grooves are formed on each active face of the other two substrates. A conductor is then deposited into the serpentine grooves, and a magnetic material is deposited into the generally radial grooves. The two outer substrates are then bonded against the first substrate such that the outer end of each magnetic path overlays a filled hole in the first substrate, creating the stator of an axial air gap reluctance motor.
摘要翻译：提供三个磁性基板，第一基板形成转子，另外两个形成外部定子。在第一基板的两个表面的中心区域中形成一系列间隔开的同心凹槽和间隔开的螺旋槽。在螺旋槽的中心放置一个孔，并填充有磁性材料。然后将导体沉积到螺旋槽中，形成中心轮。在其他两个基板的每个有效面上形成一系列间隔的蛇形槽和大体上的径向槽。然后将导体沉积到蛇形槽中，并且将磁性材料沉积到大致径向的凹槽中。然后将两个外部基板接合在第一基板上，使得每个磁路的外端覆盖第一基板中的填充孔，从而产生轴向气隙磁阻电动机的定子。

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