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11. 发明申请

US20120281814A1 High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity 有权
$High-Resolution X-Ray Diffraction Measurement with Enhanced Sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US20120281814A1
公开(公告)日：2012-11-08
申请号：US13547073
申请日：2012-07-12
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
IPC分类号： G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

12. 发明授权

US08243878B2 High-resolution X-ray diffraction measurement with enhanced sensitivity 有权
$High-resolution X-ray diffraction measurement with enhanced sensitivity$
标题翻译：具有增强灵敏度的高分辨率X射线衍射测量
公开(公告)号：US08243878B2
公开(公告)日：2012-08-14
申请号：US12683436
申请日：2010-01-07
申请人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
发明人： Boris Yokhin , Isaac Mazor , Alexander Krohmal , Amos Gvirtzman , Gennady Openganden , David Berman , Matthew Wormington
IPC分类号： G01N23/20 , G01N23/203 , G01N23/207
CPC分类号： G01N23/207
摘要： A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.
摘要翻译：一种用于分析的方法包括将X射线的会聚束引导到其上形成有外延层的样品的表面，并且感测从样品衍射的X射线，同时将感测的X射线解析为角度的函数从而产生由于外延层而引起的衍射峰和条纹的衍射光谱。分析边缘的特性以测量外延层的弛豫。

13. 发明授权

US07068753B2 Enhancement of X-ray reflectometry by measurement of diffuse reflections 有权
标题翻译：通过测量漫反射增强X射线反射率
公开(公告)号：US07068753B2
公开(公告)日：2006-06-27
申请号：US10902177
申请日：2004-07-30
申请人： David Berman , Isaac Mazor , Boris Yokhin , Amos Gvirtzman
发明人： David Berman , Isaac Mazor , Boris Yokhin , Amos Gvirtzman
IPC分类号： G01N23/20
CPC分类号： G01N23/203 , G01B15/02
摘要： A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse reflection property of the sample. A second reflectance spectrum of the sample is acquired while irradiating the sample with a converging beam of the X-rays. The second reflectance spectrum is analyzed using the diffuse reflection property so as to determine a characteristic of the surface layer of the sample.
摘要翻译：一种用于检查具有表面层的样品的方法。该方法包括在准直的X射线束照射样品时获取样品的第一反射光谱，并且处理第一反射光谱以测量样品的漫反射特性。在用X射线的会聚束照射样品的同时获取样品的第二反射光谱。使用漫反射特性分析第二反射光谱，以确定样品的表面层的特性。

14. 发明申请

US20060182220A1 Efficient measurement of diffuse X-ray reflections 有权
标题翻译：扩散X射线反射的有效测量
公开(公告)号：US20060182220A1
公开(公告)日：2006-08-17
申请号：US11396719
申请日：2006-04-04
申请人： David Berman , Isaac Mazor , Boris Yokhin , Amos Gvirtzman
发明人： David Berman , Isaac Mazor , Boris Yokhin , Amos Gvirtzman
IPC分类号： G01N23/20
CPC分类号： G01N23/203 , G01B15/02
摘要： A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse reflection property of the sample. A second reflectance spectrum of the sample is acquired while irradiating the sample with a converging beam of the X-rays. The second reflectance spectrum is analyzed using the diffuse reflection property so as to determine a characteristic of the surface layer of the sample.
摘要翻译：一种用于检查具有表面层的样品的方法。该方法包括在准直的X射线束照射样品时获取样品的第一反射光谱，并且处理第一反射光谱以测量样品的漫反射特性。在用X射线的会聚束照射样品的同时获取样品的第二反射光谱。使用漫反射特性分析第二反射光谱，以确定样品的表面层的特性。

15. 发明授权

US06907108B2 Dual-wavelength x-ray monochromator 有权
标题翻译：双波长x射线单色仪
公开(公告)号：US06907108B2
公开(公告)日：2005-06-14
申请号：US10761023
申请日：2004-01-20
申请人： Boris Yokhin , Isaac Mazor , Amos Gvirtzman
发明人： Boris Yokhin , Isaac Mazor , Amos Gvirtzman
IPC分类号： G01N23/20 , G21K1/06
CPC分类号： G01N23/20
摘要： A method for testing a surface includes finding respective first and second critical angles for total external reflection of radiation from an area of the surface at first and second wavelengths. The first and second critical angles are compared to determine an orientation of a tangent to the surface in the area.
摘要翻译：用于测试表面的方法包括：在第一和第二波长处，从表面的区域发现用于辐射的全部外部反射的相应的第一和第二临界角。比较第一和第二临界角以确定该区域中与表面相切的取向。

16. 发明授权

US06389102B2 X-ray array detector 有权
标题翻译： X射线阵列检测器
公开(公告)号：US06389102B2
公开(公告)日：2002-05-14
申请号：US09409046
申请日：1999-09-29
申请人： Isaac Mazor , Amos Gvirtzman , Boris Yokhin , Ami Dovrat
发明人： Isaac Mazor , Amos Gvirtzman , Boris Yokhin , Ami Dovrat
IPC分类号： G21K106
CPC分类号： G01N23/20 , G01T1/247
摘要： Apparatus for X-ray analysis of a sample includes an X-ray source, which irradiates the sample, and an X-ray detector device, which receives X-rays from the sample responsive to the irradiation. The device includes an array of radiation-sensitive detectors, which generate electrical signals responsive to radiation photons incident thereon. Processing circuitry of the device includes a plurality of signal processing channels, each coupled to process the signals from a respective one of the detectors so as to generate an output dependent upon a rate of incidence of the photons on the respective detector and upon a distribution of the energy of the incident photons.
摘要翻译：用于样品的X射线分析的装置包括照射样品的X射线源和响应于照射而从样品接收X射线的X射线检测器装置。该装置包括辐射敏感检测器阵列，其产生响应于入射在其上的辐射光子的电信号。该设备的处理电路包括多个信号处理通道，每个信号处理通道被耦合以处理来自相应检测器之一的信号，以产生取决于相应检测器上的光子的入射速率的输出，事件光子的能量。

17. 发明授权

US6108398A X-ray microfluorescence analyzer 失效
标题翻译： X射线荧光分析仪
公开(公告)号：US6108398A
公开(公告)日：2000-08-22
申请号：US114789
申请日：1998-07-13
申请人： Isaac Mazor , Amos Gvirtzman , Boris Yokhin
发明人： Isaac Mazor , Amos Gvirtzman , Boris Yokhin
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： An x-ray fluorescent analyzer and method for analyzing a sample, including an x-ray beam generator, which generates an x-ray beam incident at a spot on the sample, and creates a plurality of fluorescent x-ray photons. There are a plurality of semiconducting detectors arrayed around the spot so as to capture the fluorescent x-ray photons and in response produce a plurality of electrical pulses suitable for analysis of the sample.
摘要翻译：一种用于分析样品的X射线荧光分析仪和方法，该样品包括x射线束发生器，其产生入射在样品上的点处的X射线束，并且产生多个荧光X射线光子。阵列周围存在多个半导体检测器，以捕获荧光X射线光子，并且响应产生适于分析样品的多个电脉冲。

18. 发明授权

US06184686B2 Contamination and residuals inspection system 失效
标题翻译：污染和残留检查系统
公开(公告)号：US06184686B2
公开(公告)日：2001-02-06
申请号：US09114462
申请日：1998-07-13
申请人： Isaac Mazor , Amos Gvirtzman , Reuven Duer
发明人： Isaac Mazor , Amos Gvirtzman , Reuven Duer
IPC分类号： G01N2762
CPC分类号： G01N27/66 , G01N27/628 , H01L22/12
摘要： A method and apparatus for detecting a contaminant in a substrate. An array of anode elements is positioned in proximity to the substrate and is biased at a positive voltage relative to the substrate. The substrate is irradiated with photons having energies below an atomic ionization energy of the substrate, so as to ionize the contaminant to emit electrons. The emitted electrons are collected at one or more of the anode elements, thereby generating a current indicative of the presence of the contaminant in the semiconductor in proximity to the one or more of the anode elements.
摘要翻译：一种用于检测衬底中的污染物的方法和装置。阳极元件阵列位于衬底附近并相对于衬底被偏置在正电压。用能量低于衬底的原子离子化能的光子照射衬底，以便使污染物电离以发射电子。发射的电子被收集在一个或多个阳极元件处，从而产生指示半导体中的污染物在一个或多个阳极元件附近的存在的电流。

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