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11. 发明授权

US06767831B1 Method for forming cobalt salicides 失效
标题翻译：形成钴盐水杀虫剂的方法
公开(公告)号：US06767831B1
公开(公告)日：2004-07-27
申请号：US10632380
申请日：2003-08-01
申请人： Hong-Yuan Chu , Chih-Jian Chen
发明人： Hong-Yuan Chu , Chih-Jian Chen
IPC分类号： H01L2144
CPC分类号： H01L21/28518 , H01L21/26506 , H01L21/26513 , H01L29/665
摘要： A method for forming salicides with reduced junction leakage including providing a semiconductor process wafer comprising a silicon substrate; inducing amorphization within the silicon substrate to a form a first amorphous region having a first predetermined depth measured from the silicon substrate surface; carrying out at least one first thermal annealing process to controllably partially recrystallize the first amorphous region to produce a second amorphous region having a second predetermined depth less than the first predetermined depth; depositing a metal layer over selected areas of the silicon substrate comprising the second amorphous region; and, carrying out at least one second thermal annealing process to form a metal silicide.
摘要翻译：一种用于形成具有降低的结漏电的防腐剂的方法，包括提供包括硅衬底的半导体工艺晶片; 在硅衬底内引起非晶化，形成具有从硅衬底表面测量的第一预定深度的第一非晶区; 执行至少一个第一热退火工艺以可控地部分地重结晶所述第一非晶区域以产生具有小于所述第一预定深度的第二预定深度的第二非晶区域; 在包括所述第二非晶区域的所述硅衬底的选定区域上沉积金属层; 并进行至少一个第二热退火工艺以形成金属硅化物。

12. 发明授权

US06394409B1 Real time observable sample mounting fixture 有权
标题翻译：实时观察样品安装夹具
公开(公告)号：US06394409B1
公开(公告)日：2002-05-28
申请号：US09483216
申请日：2000-01-14
申请人： Chih-Jian Chen , Chin-Kai Liu
发明人： Chih-Jian Chen , Chin-Kai Liu
IPC分类号： F16M1100
CPC分类号： G02B21/34
摘要： An observable sample mounting fixture for mounting an IC specimen to a protective substrate is provided. In the sample mounting fixture, a base portion and a top portion are provided which are integrally connected together with a cavity therein-between for receiving a specimen. The base portion is further provided with an observation window such that the state of cure of an adhesive layer between a substantially transparent substrate and the IC specimen can be observed in real time. During an early observation, i.e., when the sandwiched structure is only cured for 2-5 minutes, the sandwiched structure can be easily disassembled when bubbles are observed. By utilizing the present invention novel sample mounting fixture, valuable test specimens can be saved for providing valuable quality control and reliability data. The sample mounting fixture is further constructed with a compression means which includes a shaft, a coil spring, a handle and a compression foot for contacting the IC specimen during a curing process of the sandwiched structure.
摘要翻译：提供了一种用于将IC样本安装到保护基板上的可观察的样品安装夹具。在样品安装固定件中，设置有基部和顶部，其一体地连接在一起，并具有用于容纳样本的空腔。基部还设置有观察窗，使得可以实时观察基本上透明的基板和IC试样之间的粘合剂层的固化状态。在早期观察期间，即当夹层结构仅固化2-5分钟时，当观察到气泡时，夹层结构可以容易地分解。通过利用本发明的新型样品安装夹具，可以节省宝贵的试样以提供有价值的质量控制和可靠性数据。样品安装固定件进一步构造有压缩装置，该压缩装置包括在夹层结构的固化过程期间与IC试样接触的轴，螺旋弹簧，手柄和压脚。

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