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    • 12. 发明授权
    • Apparatus, system, and method for guided growth of patterned media using monodisperse nanospheres
    • 用于使用单分散纳米球引导生长图案化介质的装置,系统和方法
    • US07934921B2
    • 2011-05-03
    • US11932608
    • 2007-10-31
    • Thomas R. AlbrechtXing-Cai GuoBruno Marchon
    • Thomas R. AlbrechtXing-Cai GuoBruno Marchon
    • B29C59/00
    • G11B5/82B82Y10/00B82Y40/00G03F7/0002G11B5/743G11B5/855
    • An apparatus, system, and method are disclosed for guided growth of patterned media using monodisperse nanospheres. The apparatus includes nanoscale features extending from a substrate. The nanoscale features may be formed using electron-beam lithography and have a non-uniform cap. A spherical cap is formed on the non-uniform cap by hydrolysis and precipitation of monodisperse nanospheres on an immobilized nucleation site, the immobilized nucleation site attached with one end of the nanoscale feature. The system includes the apparatus and further includes monodisperse nanospheres formed of silicon dioxide spheres. The method includes providing a substrate, etching at least one nanoscale feature extending from the substrate, the feature formed using electron-beam lithography and having a non-uniform cap, forming an immobilized nucleation site, and forming a spherical cap by hydrolysis and precipitation of monodisperse nanospheres on the immobilized nucleation site, the immobilized nucleation site attached with one end of the nanoscale feature.
    • 公开了使用单分散纳米球引导生长图案化介质的装置,系统和方法。 该装置包括从衬底延伸的纳米尺度特征。 可以使用电子束光刻形成纳米尺度特征并具有不均匀的盖。 通过在固定化的成核位点上水解和沉淀单分散纳米球,在不均匀的帽上形成球形帽,固定的成核位置与纳米尺度特征的一端相连。 该系统包括该装置,并且还包括由二氧化硅球形成的单分散纳米球。 该方法包括提供衬底,蚀刻从衬底延伸的至少一个纳米尺度特征,使用电子束光刻形成的特征并具有不均匀的盖,形成固定的成核位点,并通过水解和沉淀形成球形帽 在固定的成核位点上的单分散纳米球,固定的成核位点附着在纳米尺度特征的一端。