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11. 发明授权

US09130079B2 Detector apparatus having a cooling component 有权
标题翻译：具有冷却部件的检测器装置
公开(公告)号：US09130079B2
公开(公告)日：2015-09-08
申请号：US13585991
申请日：2012-08-15
申请人： Frank Schreiber , Bernd Widzgowski , Holger Birk
发明人： Frank Schreiber , Bernd Widzgowski , Holger Birk
IPC分类号： H01L31/024 , H01J40/02 , H01J40/16 , H01J43/02 , H01J43/28
CPC分类号： H01L31/024 , H01J40/02 , H01J40/16 , H01J43/02 , H01J43/28
摘要： A detector apparatus is configured to receive light and generate electrical signals. The detector apparatus includes a light sensor having a light incidence side and a cooling component. The cooling component is in direct contact with at least one of the light sensor, on the light incidence side, or a substrate carrying the light sensor.
摘要翻译：检测器装置被配置为接收光并产生电信号。检测器装置包括具有光入射侧和冷却部件的光传感器。冷却部件与光传感器，光入射侧中的至少一个或承载光传感器的基板直接接触。

12. 发明授权

US09117947B2 Detector apparatus having a cooling component 有权
标题翻译：具有冷却部件的检测器装置
公开(公告)号：US09117947B2
公开(公告)日：2015-08-25
申请号：US13586019
申请日：2012-08-15
申请人： Frank Schreiber , Bernd Widzgowski , Holger Birk
发明人： Frank Schreiber , Bernd Widzgowski , Holger Birk
IPC分类号： G01J1/02 , H01L31/024 , H01J40/02 , H01J40/16 , H01J43/02 , H01J43/28
CPC分类号： H01L31/024 , H01J40/02 , H01J40/16 , H01J43/02 , H01J43/28
摘要： A detector apparatus is configured to receive light and generate electrical signals. The detector apparatus includes a housing, a detector disposed in the housing and a cooling component disposed in the housing. The cooling component electrically insulates the detector with respect to the housing or is part of an insulator electrically that insulates the detector with respect to the housing.
摘要翻译：检测器装置被配置为接收光并产生电信号。检测器装置包括壳体，设置在壳体中的检测器和设置在壳体中的冷却部件。冷却部件使检测器相对于外壳电绝缘，或者是绝缘体的一部分，使绝缘体相对于壳体绝缘。

13. 发明授权

US07190451B2 Detection device 有权
标题翻译：检测装置
公开(公告)号：US07190451B2
公开(公告)日：2007-03-13
申请号：US10887539
申请日：2004-07-08
申请人： Volker Seyfried , Bernd Widzgowski
发明人： Volker Seyfried , Bernd Widzgowski
IPC分类号： G01J3/28
CPC分类号： G01J3/36 , G01J3/02 , G01J3/0208
摘要： A detection device includes a spectral splitting device located in a detection beam path for spectrally splitting detection light into individual spectral components. A deflection device is located downstream of the spectral splitting device for deflecting the individual spectral components in different deflection directions onto detectors assigned to the individual spectral components. At least one optical element is located in the detection beam path downstream of the spectral splitting device and upstream of the deflection device such that at least one of the individual spectral components incident on the deflection device is collimated.
摘要翻译：检测装置包括位于检测光束路径中的光谱分离装置，用于将检测光谱分解成各个光谱分量。偏转装置位于分光装置的下游，用于将不同偏转方向上的各个光谱分量偏转到分配给各个光谱分量的检测器上。至少一个光学元件位于分光装置的下游的检测光束路径中并且位于偏转装置的上游，使得入射在偏转装置上的各个光谱分量中的至少一个被准直。

14. 发明申请

US20050012927A1 Detection device 有权
标题翻译：检测装置
公开(公告)号：US20050012927A1
公开(公告)日：2005-01-20
申请号：US10887539
申请日：2004-07-08
申请人： Volker Seyfried , Bernd Widzgowski
发明人： Volker Seyfried , Bernd Widzgowski
IPC分类号： G01J3/02 , G01J3/36 , G01J3/28
CPC分类号： G01J3/36 , G01J3/02 , G01J3/0208
摘要： A detection device, in particular for use in a laser scanning microscope, includes a means (2) located in a detection beam path (1) to spectrally split detection light into individual spectral components (3, 4), and further includes a deflection device (5) located downstream of the means (2) for spectral splitting to deflect the individual spectral components (3, 4) in different deflection directions onto detectors (6) assigned to the individual spectral components (3, 4). With a view to reliable separation of the individual spectral components (3, 4) deflected by deflection device (5), the detection device is built and further refined in such a way that at least one optical element (7) is arranged in the detection beam path (1) downstream of the means (2) for spectral splitting and upstream of the deflection device such that at least one spectral component (3, 4) of the light incident on the deflection device (5) is collimated in at least one spatial direction.
摘要翻译：特别是在激光扫描显微镜中使用的检测装置包括位于检测光束路径（1）中的装置（2），以将检测光谱分解成各个光谱分量（3,4），并且还包括偏转装置（5）位于所述装置（2）的下游，用于分光，以将在不同偏转方向上的各个光谱分量（3,4）偏转到分配给各个光谱分量（3,4）的检测器（6）上。为了可靠地分离由偏转装置（5）偏转的各个光谱分量（3,4），检测装置被构建并进一步细化，使得至少一个光学元件（7）被布置在检测中用于分光和偏转装置上游的装置（2）下游的光束路径（1），使得入射在偏转装置（5）上的光的至少一个光谱分量（3,4）在至少一个空间方向。

15. 发明授权

US08253937B2 Optical evaluation method by means of laser pulses and corresponding apparatus 有权
标题翻译：光学评估方法采用激光脉冲和相应装置
公开(公告)号：US08253937B2
公开(公告)日：2012-08-28
申请号：US12626057
申请日：2009-11-25
申请人： Vishnu Vardhan Krishnamachari , William C. Hay , Volker Seyfried , Bernd Widzgowski
发明人： Vishnu Vardhan Krishnamachari , William C. Hay , Volker Seyfried , Bernd Widzgowski
IPC分类号： G01J3/44
CPC分类号： G01N21/63
摘要： An optical evaluation method and an apparatus for performing said method are described. First laser pulses of a first type and second laser pulses of a second type that differs from the first type are sent onto a sample to be examined. The sample is hit with first incident light from the two laser pulses in at least one manner of simultaneously, within a very short time lag between the two laser pulses, and a time-correlated manner of the two laser pulses, thereby generating a first optical signal, and hit with second incident light from the two laser pulses, thereby generating a second optical signal. The generated first and second optical signals are detected with at least one detector; and an electronic difference between the first and second optical signals is generated.
摘要翻译：描述了用于执行所述方法的光学评估方法和装置。第一类型的第一激光脉冲和第二类型的与第一类型不同的第二激光脉冲被发送到要检查的样品上。在两个激光脉冲之间的非常短的时间间隔内，以两个激光脉冲的时间相关方式，以至少一种方式同时来自两个激光脉冲的第一入射光和第二激光脉冲的时间相关方式，信号，并用来自两个激光脉冲的第二入射光击中，从而产生第二光信号。产生的第一和第二光信号用至少一个检测器检测; 并且产生第一和第二光信号之间的电子差异。

16. 发明申请

US20050254048A9 Detection device 有权
标题翻译：检测装置
公开(公告)号：US20050254048A9
公开(公告)日：2005-11-17
申请号：US10887539
申请日：2004-07-08
申请人： Volker Seyfried , Bernd Widzgowski
发明人： Volker Seyfried , Bernd Widzgowski
IPC分类号： G01J3/02 , G01J3/36 , G01J3/28
CPC分类号： G01J3/36 , G01J3/02 , G01J3/0208
摘要： A detection device includes a spectral splitting device located in a detection beam path for spectrally splitting detection light into individual spectral components. A deflection device is located downstream of the spectral splitting device for deflecting the individual spectral components in different deflection directions onto detectors assigned to the individual spectral components. At least one optical element is located in the detection beam path downstream of the spectral splitting device and upstream of the deflection device such that at least one of the individual spectral components incident on the deflection device is collimated.
摘要翻译：检测装置包括位于检测光束路径中的光谱分离装置，用于将检测光谱分解成各个光谱分量。偏转装置位于分光装置的下游，用于将不同偏转方向上的各个光谱分量偏转到分配给各个光谱分量的检测器上。至少一个光学元件位于分光装置的下游的检测光束路径中并且位于偏转装置的上游，使得入射在偏转装置上的各个光谱分量中的至少一个被准直。

17. 发明申请

US20100134793A1 OPTICAL EVALUATION METHOD BY MEANS OF LASER PULSES AND CORRESPONDING APPARATUS 有权
标题翻译：激光脉冲和相关装置的光学评估方法
公开(公告)号：US20100134793A1
公开(公告)日：2010-06-03
申请号：US12626057
申请日：2009-11-25
申请人： Vishnu Vardhan Krishnamachari , William C. Hay , Volker Seyfried , Bernd Widzgowski
发明人： Vishnu Vardhan Krishnamachari , William C. Hay , Volker Seyfried , Bernd Widzgowski
IPC分类号： G01J3/30 , G01J3/44
CPC分类号： G01N21/63
摘要： An optical evaluation method and an apparatus for performing said method are described. First laser pulses of a first type and second laser pulses of a second type that differs from the first type are sent onto a sample to be examined. The sample is hit with first incident light from the two laser pulses in at least one manner of simultaneously, within a very short time lag between the two laser pulses, and a time-correlated manner of the two laser pulses, thereby generating a first optical signal, and hit with second incident light from the two laser pulses, thereby generating a second optical signal. The generated first and second optical signals are detected with at least one detector; and an electronic difference between the first and second optical signals is generated.
摘要翻译：描述了用于执行所述方法的光学评估方法和装置。第一类型的第一激光脉冲和第二类型的与第一类型不同的第二激光脉冲被发送到要检查的样品上。在两个激光脉冲之间的非常短的时间间隔内，以两个激光脉冲的时间相关方式，以至少一种方式同时来自两个激光脉冲的第一入射光和第二激光脉冲的时间相关方式，信号，并用来自两个激光脉冲的第二入射光击中，从而产生第二光信号。产生的第一和第二光信号用至少一个检测器检测; 并且产生第一和第二光信号之间的电子差异。

18. 发明申请

US20130010340A1 DEVICE FOR SCANNING AN OBJECT, METHOD FOR OPERATING THE DEVICE AND SCANNING MICROSCOPE 有权
标题翻译：用于扫描对象的装置，用于操作装置和扫描显微镜的方法
公开(公告)号：US20130010340A1
公开(公告)日：2013-01-10
申请号：US13578609
申请日：2011-01-03
申请人： Holger Birk , Bernd Widzgowski
发明人： Holger Birk , Bernd Widzgowski
IPC分类号： G02B26/10
CPC分类号： G02B26/101 , G02B21/002 , G02B26/0875
摘要： The invention relates to a device for scanning an object comprising a carrier body (10) and a first electromagnetic drive (2). The carrier body (10) is movably mounted in a plane and holds an optical element (12) that focuses an illuminating light beam (19) on a first object plane of the object that is parallel to the plane. The first electromagnetic drive (2) moves the carrier body (10) with the optical element (12) and a focus region (23) of the illuminating light beam (19) within the first object plane.
摘要翻译：本发明涉及一种用于扫描物体的装置，包括载体主体（10）和第一电磁驱动器（2）。载体主体（10）可移动地安装在平面中并且保持将照明光束（19）聚焦在与平面平行的物体的第一物体平面上的光学元件（12）。第一电磁驱动器（2）使第一物体平面内的光学元件（12）的载体（10）和照明光束（19）的聚焦区域（23）移动。

19. 发明授权

US07495236B2 Apparatus and method for detection with a scanning microscope 有权
标题翻译：用扫描显微镜检测的装置和方法
公开(公告)号：US07495236B2
公开(公告)日：2009-02-24
申请号：US11523109
申请日：2006-09-19
申请人： Bernd Widzgowski , Holger Birk
发明人： Bernd Widzgowski , Holger Birk
IPC分类号： G01N21/64
CPC分类号： G02B21/008 , G02B21/0036
摘要： An apparatus and a method for detection with a scanning microscope (1) are disclosed. The scanning microscope (1) encompasses a scanning device (7) that guides an illuminating light beam (3) through a scanning optical system (12) and a microscope optical system (13) and over or through a specimen (15). A digital circuit (30), which periodically interrogates the detected signals within a pixel (Px,y) and calculates an average therefrom, is placed after the detector unit (19).
摘要翻译：公开了一种用扫描显微镜（1）进行检测的装置和方法。扫描显微镜（1）包括通过扫描光学系统（12）和显微镜光学系统（13）引导照明光束（3）并穿过或穿过样本（15）的扫描装置（7）。在检测器单元（19）之后放置一个数字电路（30），其周期性地询问像素内的检测信号（Px，y）并计算其平均值。

20. 发明申请

US20070063153A1 Apparatus and method for detection with a scanning microscope 有权
标题翻译：用扫描显微镜检测的装置和方法
公开(公告)号：US20070063153A1
公开(公告)日：2007-03-22
申请号：US11523109
申请日：2006-09-19
申请人： Bernd Widzgowski , Holger Birk
发明人： Bernd Widzgowski , Holger Birk
IPC分类号： G01N21/64
CPC分类号： G02B21/008 , G02B21/0036
摘要： An apparatus and a method for detection with a scanning microscope (1) are disclosed. The scanning microscope (1) encompasses a scanning device (7) that guides an illuminating light beam (3) through a scanning optical system (12) and a microscope optical system (13) and over or through a specimen (15). A digital circuit (30), which periodically interrogates the detected signals within a pixel (Px,y) and calculates an average therefrom, is placed after the detector unit (19).
摘要翻译：公开了一种用扫描显微镜（1）进行检测的装置和方法。扫描显微镜（1）包括通过扫描光学系统（12）和显微镜光学系统（13）引导照明光束（3）并穿过或穿过样本（15）的扫描装置（7）。在检测器单元（19）之后放置一个数字电路（30），其周期性地询问像素内的检测信号（P ）并计算其平均值。

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