专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US09029809B2 Movable microchamber system with gas curtain 有权
标题翻译：带气帘的可移动微型系统
公开(公告)号：US09029809B2
公开(公告)日：2015-05-12
申请号：US13690132
申请日：2012-11-30
申请人： Digby Pun , Ali Shajii , Andrew B. Cowe , Raymond Ellis , James T. McWhirter
发明人： Digby Pun , Ali Shajii , Andrew B. Cowe , Raymond Ellis , James T. McWhirter
IPC分类号： H01L21/268 , H01L21/324 , B23K26/12 , H01L31/18
CPC分类号： B23K26/127 , B23K26/12 , H01L21/268 , H01L21/324 , H01L31/18 , H01L31/1864 , Y10T137/0318
摘要： A movable microchamber system with a gas curtain is disclosed. The microchamber system has a top member with a light-access feature and a stage assembly that supports a substrate to be processed. The stage assembly is disposed relative to the top member to define a microchamber and a peripheral microchamber gap. An inert gas is flowed into the peripheral microchamber gap to form the gas curtain just outside of the microchamber. The gas curtain substantially prevents reactive gas in the ambient environment from entering the microchamber when the stage assembly moves relative to the top member.
摘要翻译：公开了一种具有气幕的可移动微型仓库系统。微室系统具有具有光访问特征的顶部构件和支撑要处理的衬底的台架组件。台架组件相对于顶部构件设置以限定微室和外围微室间隙。惰性气体流入周边微室间隙，以在微室外形成气幕。当台架组件相对于顶部构件移动时，气幕基本上防止周围环境中的反应性气体进入微型室。

12. 发明申请

US20140096908A1 DISTRIBUTED MULTI-ZONE PLASMA SOURCE SYSTEMS, METHODS AND APPARATUS 审中-公开
标题翻译：分布式多区域等离子体源系统，方法和装置
公开(公告)号：US20140096908A1
公开(公告)日：2014-04-10
申请号：US13649103
申请日：2012-10-10
申请人： Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
发明人： Ali Shajii , Richard Gottscho , Souheil Benzerrouk , Andrew Cowe , Siddharth P. Nagarkatti , William R. Entley
IPC分类号： H01J37/32
CPC分类号： H01J37/32431 , H01J37/321 , H01J37/32669
摘要： A processing chamber including multiple plasma sources in a process chamber top. Each one of the plasma sources is a ring plasma source including a primary winding and multiple ferrites. A plasma processing system is also described. A method of plasma processing is also described.
摘要翻译：处理室包括处理室顶部中的多个等离子体源。每个等离子体源是包括初级绕组和多个铁氧体的环形等离子体源。还描述了等离子体处理系统。还描述了等离子体处理的方法。

13. 发明授权

US08334505B2 Chemical ionization reaction or proton transfer reaction mass spectrometry 失效
标题翻译：化学电离反应或质子转移反应质谱
公开(公告)号：US08334505B2
公开(公告)日：2012-12-18
申请号：US12026799
申请日：2008-02-06
申请人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： Timothy Roger Robinson , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/26
CPC分类号： G01N27/62 , G01N33/497 , H01J49/105 , Y10T436/24
摘要： A system and methods are described for generating reagent ions and product ions for use in a mass spectrometry system. Applications for the system and method are also disclosed for detecting volatile organic compounds in trace concentrations. A microwave or high-frequency RF energy source ionizes particles of a reagent vapor to form reagent ions. The reagent ions enter a chamber, such as a drift chamber, to interact with a fluid sample. An electric field directs the reagent ions and facilitates an interaction with the fluid sample to form product ions. The reagent ions and product ions then exit the chamber under the influence of an electric field for detection by a mass spectrometer module. The system includes various control modules for setting values of system parameters and analysis modules for detection of mass and peak intensity values for ion species during spectrometry and faults within the system.
摘要翻译：描述了用于产生用于质谱系统的试剂离子和产物离子的系统和方法。还公开了用于检测痕量浓度的挥发性有机化合物的系统和方法的应用。微波或高频RF能源将试剂蒸气的颗粒电离以形成试剂离子。试剂离子进入诸如漂移室的室以与流体样品相互作用。电场引导试剂离子并促进与流体样品的相互作用以形成产物离子。然后试剂离子和产物离子在电场的影响下离开室，由质谱模块检测。该系统包括用于设置系统参数值和分析模块的各种控制模块，用于在光谱测定和系统内的故障期间检测离子物质的质量和峰值强度值。

14. 发明申请

US20120174992A1 Apparatus and Method for Pressure Fluctuation Insensitive Mass Flow Control 有权
标题翻译：压力波动不敏感质量流量控制的装置和方法
公开(公告)号：US20120174992A1
公开(公告)日：2012-07-12
申请号：US13425784
申请日：2012-03-21
申请人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
发明人： Ali Shajii , Nicholas Kottenstette , Jesse Ambrosina
IPC分类号： F16K31/12
CPC分类号： G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/776
摘要： A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
摘要翻译：质量流量控制器包括与压力传感器组合的热质量流量传感器，以提供对输入压力波动相对不敏感的质量流量控制器。压力传感器和热传感器分别向电子控制器提供指示测量的入口流量和死体积内的压力的信号。电子控制器采用所测量的压力来补偿所测量的入口流量，从而产生可用于操作质量流量控制器控制阀的出口流量的补偿测量。

15. 发明授权

US07628860B2 Pulsed mass flow delivery system and method 有权
公开(公告)号：US07628860B2
公开(公告)日：2009-12-08
申请号：US10822358
申请日：2004-04-12
申请人： Ali Shajii , Siddharth P. Nagarkatti , Matthew Mark Besen , William R. Clark , Daniel Alexander Smith , Bora Akgerman
发明人： Ali Shajii , Siddharth P. Nagarkatti , Matthew Mark Besen , William R. Clark , Daniel Alexander Smith , Bora Akgerman
IPC分类号： C23C16/455 , C23C16/52 , C23F1/00 , H01L21/306 , C23C16/06 , C23C16/22
CPC分类号： C23C16/45544 , C23C16/45527 , C23C16/45557 , C23C16/52 , Y10S438/935
摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

16. 发明申请

US20090095902A1 CHEMICAL IONIZATION REACTION OR PROTON TRANSFER REACTION MASS SPECTROMETRY WITH A TIME-OF-FLIGHT MASS SPECTROMETER 失效
标题翻译：化学离子反应或原子转移反应与时间飞行质谱仪的质谱
公开(公告)号：US20090095902A1
公开(公告)日：2009-04-16
申请号：US11869980
申请日：2007-10-10
申请人： TIMOTHY ROGER ROBINSON , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
发明人： TIMOTHY ROGER ROBINSON , Mark Attwood , Xing Chen , William M. Holber , Mark Philip Longson , Jonathan Henry Palk , Ali Shajii , John A. Smith
IPC分类号： H01J49/40 , H01J49/26 , H01J49/36
CPC分类号： H01J49/145
摘要： A system, components thereof, and methods are described for time-of-flight mass spectrometry. A microwave or high-frequency RF energy source is used to ionize a reagent vapor to form reagent ions. The reagent ions enter a chamber and interact with a fluid sample to form product ions. The reagent ions and product ions are directed to a time-of-flight mass spectrometer module for detection and determination of a mass value for the ions. The time-of-flight mass spectrometer module can include an optical system and an ion beam adjuster for focusing, interrupting, or altering a flow of reagent and product ions according to a specified pattern. The time-of-flight mass spectrometer module can include signal processing techniques to collect and analyze an acquired signal, for example, using statistical signal processing, such as maximum likelihood signal processing.
摘要翻译：描述了用于飞行时间质谱的系统及其组件和方法。微波或高频RF能量源用于电离试剂蒸气以形成试剂离子。试剂离子进入室并与流体样品相互作用以形成产物离子。试剂离子和产物离子被引导到飞行时间质谱仪模块，用于检测和确定离子的质量值。飞行时间质谱模块可以包括用于根据指定图案聚焦，中断或改变试剂和产物离子流的光学系统和离子束调节器。飞行时间质谱仪模块可以包括用于收集和分析所获取的信号的信号处理技术，例如使用诸如最大似然信号处理的统计信号处理。

17. 发明申请

US20060214127A1 Parallel plate valve assembly 审中-公开
标题翻译：平行板阀组件
公开(公告)号：US20060214127A1
公开(公告)日：2006-09-28
申请号：US11089681
申请日：2005-03-25
申请人： Ali Shajii , Jesse Ambrosina , Leonard Myatt , Matthew Besen
发明人： Ali Shajii , Jesse Ambrosina , Leonard Myatt , Matthew Besen
IPC分类号： F16K31/44
CPC分类号： F16K31/52
摘要： A valve assembly including a first plate having a first surface defining a port, a second plate received over the first plate such that the port of the first plate is substantially closed by a first surface of the second plate, wherein the second plate is movable away from the first plate to open the port, and a fixed member spaced from a second surface of the second plate, the second surface facing away from the first surface of the second plate. A first linkage has opposing first and second ends, and the first end is positioned adjacent the second surface of the second plate, and a second linkage has opposing first and second ends, and the first end is pivotally connected to the second end of the first linkage and the second end of the second linkage is positioned adjacent the fixed member.
摘要翻译：一种阀组件，包括具有限定出口的第一表面的第一板，容纳在第一板上的第二板，使得第一板的端口基本上被第二板的第一表面封闭，其中第二板可移动从所述第一板打开所述端口，以及与所述第二板的第二表面间隔开的固定构件，所述第二表面背离所述第二板的所述第一表面。第一连杆具有相对的第一和第二端，并且第一端定位成邻近第二板的第二表面，并且第二连杆具有相对的第一和第二端，并且第一端枢转地连接到第一和第二端的第二端并且第二连杆的第二端定位成与固定构件相邻。

18. 发明申请

US20060101907A1 Thermal mass flow rate sensor having fixed bypass ratio 有权
标题翻译：具有固定旁路比的热质量流量传感器
公开(公告)号：US20060101907A1
公开(公告)日：2006-05-18
申请号：US10987718
申请日：2004-11-12
申请人： Ali Shajii , Paul Meneghini , Daniel Smith
发明人： Ali Shajii , Paul Meneghini , Daniel Smith
IPC分类号： G01F1/68
CPC分类号： G01F1/6847 , G01F5/00
摘要： A flow rate sensor includes a main conduit, a sensor tube and a bypass tube connecting an upstream portion of the main conduit to a downstream portion of the main conduit such that flow through the main conduit is divided through the sensor tube and the bypass tube, and at least one heater element for heating the sensor tube. A first flow restrictor of porous media is positioned between the upstream portion of the main conduit and the sensor tube, and a second flow restrictor of porous media is positioned between the upstream portion of the main conduit and the bypass tube. The flow restrictors provide the flow rate sensor with a fixed bypass ratio so that the sensor can operate independently of the type of gas being measured.
摘要翻译：流量传感器包括主导管，传感器管和旁通管，其将主管道的上游部分连接到主管道的下游部分，使得通过主管道的流经传感器管和旁通管分开，以及用于加热传感器管的至少一个加热器元件。多孔介质的第一限流器位于主管道的上游部分和传感器管之间，并且多孔介质的第二限流器位于主管道的上游部分和旁路管之间。流量限制器为流量传感器提供固定旁路比，使得传感器可以独立于所测量气体的类型进行操作。

19. 发明授权

US07000463B1 Reynolds number correction function for mass flow rate sensor 有权
标题翻译：质量流量传感器的雷诺数校正功能
公开(公告)号：US07000463B1
公开(公告)日：2006-02-21
申请号：US10987719
申请日：2004-11-12
申请人： Ali Shajii , Paul Meneghini
发明人： Ali Shajii , Paul Meneghini
IPC分类号： G01F1/68
CPC分类号： G01F15/046 , G01F1/6847 , G01F1/6965 , G01F5/00
摘要： A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube dividing flow, wherein a bypass ratio of the sensor equals a total flow rate through the sensor divided by a flow rate through just the sensor tube. Heater elements heat an upstream portion and a downstream portion of the sensor tube, and a circuit is connected to the heater elements for producing a voltage based upon a difference in resistance between the heater elements. The voltage is calibrated based on known flow rates of a reference gas, and the flow rate through the sensor is based upon the calibrated voltage multiplied by a multi-gas correction function and a Reynolds number correction function.
摘要翻译：基于所有旁路误差是雷诺数的函数的事实，质量流量传感器使用雷诺数校正功能来补偿所有气体的传感器的旁路比的误差。传感器包括传感器管和旁路管分流，其中传感器的旁路比等于通过传感器的总流量除以仅通过传感器管的流量。加热元件加热传感器管的上游部分和下游部分，并且电路连接到加热器元件，用于基于加热器元件之间的电阻差产生电压。基于参考气体的已知流速校准电压，并且通过传感器的流量基于校准电压乘以多气体校正功能和雷诺数校正功能。

20. 发明申请

US20050218361A1 POROUS VALVE ASSEMBLY 有权
标题翻译：多孔阀组件
公开(公告)号：US20050218361A1
公开(公告)日：2005-10-06
申请号：US10814973
申请日：2004-03-30
申请人： Ali Shajii , Ronald Collins , Matthew Besen
发明人： Ali Shajii , Ronald Collins , Matthew Besen
IPC分类号： F16K31/02 , F16K31/06 , F16K37/00
CPC分类号： F16K31/0665 , F16K31/0675 , F16K37/0041 , Y10S251/905
摘要： A valve assembly for controlling the flow of a predetermined fluid, including a tube having an open end forming an outlet port, and wherein the tube is made of a material that is porous with respect to the predetermined fluid, an outer wall forming a fluid chamber coaxially surrounding the porous tube and including an inlet port, and a valve member made of non-porous material received for sliding movement within the porous tube. Sliding movement of the valve member within the tube and towards the open end of the tube reduces the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly, while sliding movement of the valve member within the tube and away from the open end of the tube increases the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly.
摘要翻译：一种用于控制预定流体流动的阀组件，包括具有形成出口的开口端的管，并且其中管由相对于预定流体多孔的材料制成，外壁形成流体室同轴地围绕多孔管并且包括入口端口，以及由多孔材料制成的阀构件，用于在多孔管内滑动运动。阀构件在管内并且朝向管的开口端的滑动运动通过多孔管和通过阀组件的出口减少了预定流体从流体室的流动，同时阀构件的滑动运动管并且远离管的开口端增加了预定流体从流体室通过多孔管并通过阀组件的出口的流动。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式