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11. 发明授权

US07397598B2 Light source unit and light irradiation unit 有权
标题翻译：光源单元和光照单元
公开(公告)号：US07397598B2
公开(公告)日：2008-07-08
申请号：US10921932
申请日：2004-08-20
申请人： Akira Tokuhisa , Hiroshi Kitano , Hitoshi Kawai
发明人： Akira Tokuhisa , Hiroshi Kitano , Hitoshi Kawai
IPC分类号： G02F1/35 , G02F2/02
CPC分类号： G03F7/70575 , G02F1/353 , G02F2001/354
摘要： In nonlinear optical crystal 183D, each step of wavelength conversion can be performed using another fundamental wave that is output from light output unit 1612, without using the fundamental wave whose output level has been attenuated after going through wavelength conversion for several steps (wavelength conversion in nonlinear optical crystals 183A to 183C). Therefore, the wavelength conversion efficiency improves and the peak power of optical amplifiers 1611 and 1612 can be suppressed, which allows the wavelength of lights that are output from optical amplifiers 1611 and 1612 to be further narrowed.
摘要翻译：在非线性光学晶体183D中，可以使用从光输出单元161＆lt; 2＆gt; 2输出的另一个基波进行波长转换的每个步骤，而不使用在经过后输出电平已被衰减的基波波长转换几步（非线性光学晶体183A至183C中的波长转换）。因此，波长转换效率提高，并且可以抑制光放大器161 1和161 2的峰值功率，这允许从光放大器161输出的光的波长 1＆lt; 1＆gt;和161＆lt; 2＆gt;之间进一步变窄。

12. 发明授权

US08988768B2 Laser device 有权
标题翻译：激光设备
公开(公告)号：US08988768B2
公开(公告)日：2015-03-24
申请号：US13980757
申请日：2012-01-18
申请人： Akira Tokuhisa , Naoto Inaba
发明人： Akira Tokuhisa , Naoto Inaba
IPC分类号： H01S3/131 , H01S3/091 , H04B10/564 , H01S3/00 , H01S3/067 , H01S3/10
CPC分类号： H01S3/0912 , H01S3/0014 , H01S3/06754 , H01S3/10015 , H01S2301/02 , H04B10/564
摘要： A laser device includes: an optical fiber amplifier that amplifies and emits a signal light; a control unit that controls pumping power for pumping the optical fiber amplifier; and a signal light detector that detects signal light being propagated to the optical fiber amplifier or an ASE photodetector that detects light that is emitted from the optical fiber amplifier and that has wavelength for which the gain is higher than for the signal light, wherein the control unit suppresses the pumping power for pumping the optical fiber amplifier, when the intensity of the signal light detected by the signal light detector becomes less than or equal to a predetermined signal reference value, or when the intensity of the spontaneously emitted light detected by the ASE photodetector becomes greater than or equal to a predetermined ASE reference value.
摘要翻译：激光装置包括：放大并发射信号光的光纤放大器; 控制单元，其控制用于泵浦所述光纤放大器的泵浦功率; 以及信号光检测器，其检测传播到光纤放大器的信号光或者检测从光纤放大器发射并且具有增益比信号光高的波长的光的ASE光电检测器，其中控制当由信号光检测器检测到的信号光的强度变得小于或等于预定信号参考值时，或者当由ASE检测到的自发发射光的强度时，单元抑制用于泵浦光纤放大器的泵浦功率光电检测器变得大于或等于预定的ASE参考值。

13. 发明授权

US08929410B2 Ultraviolet laser device 有权
标题翻译：紫外线激光装置
公开(公告)号：US08929410B2
公开(公告)日：2015-01-06
申请号：US14003895
申请日：2012-03-23
申请人： Yoshinori Oshita , Akira Tokuhisa
发明人： Yoshinori Oshita , Akira Tokuhisa
IPC分类号： H01S3/10 , G02F1/37
CPC分类号： H01S3/10 , G02F1/3534 , G02F1/37 , G02F2201/16
摘要： An ultraviolet laser device comprises a laser beam output unit that outputs infra-red laser beams, and a wavelength conversion unit that wavelength converts the infra-red laser beams. The laser beam output unit comprises a first laser beam output unit that outputs a first infra-red laser beam whose wavelength is 1900-2000 nm, and a second laser beam output unit that outputs a second infra-red laser beam whose wavelength is 1000-1100 nm. The wavelength conversion unit comprises a first element series that the first infra-red light beam is incident upon and propagated through, and a second element series that the laser light propagated through the first element series and the second infra-red laser beam are incident upon, combined in, and propagated through, and constructed so that ultraviolet laser light is outputted, due to the first and second infra-red laser beams being wavelength converted by optical wavelength conversion elements.
摘要翻译：紫外线激光装置包括输出红外激光束的激光束输出部，以及波长转换红外激光束的波长转换部。激光束输出单元包括：第一激光束输出单元，其输出波长为1900-2000nm的第一红外激光束;以及第二激光束输出单元，其输出波长为1000nm的第二红外激光束， 1100nm。波长转换单元包括第一红外光束入射并传播的第一元件系列，以及通过第一元件系列传播的激光和第二红外激光束入射的第二元件系列，由于第一和第二红外激光束被光波长转换元件波长转换，组合并传播并构造成输出紫外激光。

14. 发明授权

US08542436B2 Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment device 有权
标题翻译：光纤放大器，光源装置，曝光装置，物体检查装置及处理装置
公开(公告)号：US08542436B2
公开(公告)日：2013-09-24
申请号：US13487843
申请日：2012-06-04
申请人： Akira Tokuhisa
发明人： Akira Tokuhisa
IPC分类号： H01S3/00
CPC分类号： G03F7/70566 , G03F7/70025 , H01S3/005 , H01S3/0092 , H01S3/06754 , H01S3/1308 , H01S3/2308
摘要： A polarization state adjusting optical element is formed by a ½ wavelength plate and a ¼ wavelength plate and its polarization direction and elliptic degree are adjusted. By adjusting the polarization state adjusting optical element in advance, even if the output of a pump light source is changed, the polarization characteristic (polarization direction and elliptic degree) of the output light of an FDFA amplifier will not change or the change is sufficiently small. In this state, a polarization state adjusting optical element adjusts the polarization state of the laser beam coming into a wavelength conversion optical system so that the wavelength conversion optical system has the maximum conversion efficiency. Thus, it is possible to provide an FDFA having a small change of the polarization state of the output light even if the pump light intensity is changed.
摘要翻译：偏振状态调整光学元件由1/2波长板和1/4波片形成，并且其偏振方向和椭圆度被调整。通过预先调整偏振态调整光学元件，即使泵浦光源的输出发生变化，FDFA放大器的输出光的偏振特性（偏振方向和椭圆度）也不会改变，或者变化足够小。在这种状态下，偏振态调整光学元件调节进入波长转换光学系统的激光束的偏振状态，使得波长转换光学系统具有最大的转换效率。因此，即使泵浦光强度发生变化，也可以提供输出光的偏振态变化小的FDFA。

15. 发明授权

US07339961B2 Wavelength converting optical system, laser light source, exposure apparatus, device for inspecting object of inspection, and polymer crystal working apparatus 有权
标题翻译：波长转换光学系统，激光光源，曝光装置，检查对象装置以及聚合物晶体加工装置
公开(公告)号：US07339961B2
公开(公告)日：2008-03-04
申请号：US11500031
申请日：2006-08-07
申请人： Akira Tokuhisa , Yoshinori Oshita
发明人： Akira Tokuhisa , Yoshinori Oshita
IPC分类号： H01S3/10
CPC分类号： G02F1/3534 , G02F1/37 , G02F2201/16
摘要： A fifth harmonic wave is formed from a fundamental wave of P polarization via a second harmonic wave forming optical element 3, a third harmonic wave forming optical element 4, and a fifth harmonic wave forming optical element 6, and a second harmonic wave of P polarization is formed from a fundamental wave of P polarization via a second harmonic wave forming optical element 9. A fundamental wave of S polarization is combined with the second harmonic wave of P polarization described above by a dichroic mirror 13; furthermore, the fifth harmonic wave of P polarization, the fundamental wave of S polarization described above and the second harmonic wave of P polarization are combined by a dichroic mirror 10, and are incident on a seventh harmonic wave forming optical element 11. A seventh harmonic wave of S polarization is formed from the fifth harmonic wave and second harmonic wave of P polarization, and is combined with the fundamental wave of S polarization by being incident on an eighth harmonic wave forming optical element 12, so that an eighth harmonic wave of P polarization is formed.
摘要翻译：五次谐波通过二次谐波形成光学元件3，三次谐波形成光学元件4和五次谐波形成光学元件6的P极化的基波和P极化的二次谐波形成通过二次谐波形成光学元件9由P极化的基波形成。通过分色镜13将S极化的基波与上述P极化的二次谐波组合; 此外，P偏振的五次谐波，上述S极化的基波和P偏振的二次谐波由分色镜10组合，并入射到第七谐波成形光学元件11上。 S偏振的七次谐波由P偏振的五次谐波和二次谐波形成，并且通过入射到八次谐波形成光学元件12上与S极化的基波组合，使得八次谐波形成P极化波。

16. 发明申请

US20060039423A1 Light source unit and light irradiation unit 有权
标题翻译：光源单元和光照单元
公开(公告)号：US20060039423A1
公开(公告)日：2006-02-23
申请号：US10921932
申请日：2004-08-20
申请人： Akira Tokuhisa , Hiroshi Kitano , Hitoshi Kawai
发明人： Akira Tokuhisa , Hiroshi Kitano , Hitoshi Kawai
IPC分类号： H01S3/10
CPC分类号： G03F7/70575 , G02F1/353 , G02F2001/354
摘要： In nonlinear optical crystal 183D, each step of wavelength conversion can be performed using another fundamental wave that is output from light output unit 1612, without using the fundamental wave whose output level has been attenuated after going through wavelength conversion for several steps (wavelength conversion in nonlinear optical crystals 183A to 183C). Therefore, the wavelength conversion efficiency improves and the peak power of optical amplifiers 1611 and 1612 can be suppressed, which allows the wavelength of lights that are output from optical amplifiers 1611 and 1612 to be further narrowed.
摘要翻译：在非线性光学晶体183D中，可以使用从光输出单元161＆lt; 2＆gt; 2输出的另一个基波进行波长转换的每个步骤，而不使用在经过后输出电平已被衰减的基波波长转换几步（非线性光学晶体183A至183C中的波长转换）。因此，波长转换效率提高，并且可以抑制光放大器161 1和161 2的峰值功率，这允许从光放大器161输出的光的波长 1＆lt; 1＆gt;和161＆lt; 2＆gt;之间进一步变窄。

17. 发明申请

US20130343410A1 ULTRAVIOLET LASER DEVICE 有权
标题翻译：超紫外线激光器件
公开(公告)号：US20130343410A1
公开(公告)日：2013-12-26
申请号：US14003895
申请日：2012-03-23
申请人： Yoshinori Oshita , Akira Tokuhisa
发明人： Yoshinori Oshita , Akira Tokuhisa
IPC分类号： H01S3/10
CPC分类号： H01S3/10 , G02F1/3534 , G02F1/37 , G02F2201/16
摘要： An ultraviolet laser device comprises a laser beam output unit that outputs infra-red laser beams, and a wavelength conversion unit that wavelength converts the infra-red laser beams. The laser beam output unit comprises a first laser beam output unit that outputs a first infra-red laser beam whose wavelength is 1900-2000 nm, and a second laser beam output unit that outputs a second infra-red laser beam whose wavelength is 1000-1100 nm. The wavelength conversion unit comprises a first element series that the first infra-red light beam is incident upon and propagated through, and a second element series that the laser light propagated through the first element series and the second infra-red laser beam are incident upon, combined in, and propagated through, and constructed so that ultraviolet laser light is outputted, due to the first and second infra-red laser beams being wavelength converted by optical wavelength conversion elements.
摘要翻译：紫外线激光装置包括输出红外激光束的激光束输出部，以及波长转换红外激光束的波长转换部。激光束输出单元包括：第一激光束输出单元，其输出波长为1900-2000nm的第一红外激光束;以及第二激光束输出单元，其输出波长为1000nm的第二红外激光束， 1100nm。波长转换单元包括第一红外光束入射并传播的第一元件系列，以及通过第一元件系列传播的激光和第二红外激光束入射的第二元件系列，由于第一和第二红外激光束被光波长转换元件波长转换，组合并传播并构造成输出紫外激光。

18. 发明申请

US20090152476A1 Optical fiber amplifier, light source device, exposure device, object inspection device, and treatment device 审中-公开
标题翻译：光纤放大器，光源装置，曝光装置，物体检查装置及处理装置
公开(公告)号：US20090152476A1
公开(公告)日：2009-06-18
申请号：US12320055
申请日：2009-01-15
申请人： Akira Tokuhisa
发明人： Akira Tokuhisa
IPC分类号： H01S3/10 , G01N21/00 , G03B27/54
CPC分类号： G03F7/70566 , G03F7/70025 , H01S3/005 , H01S3/0092 , H01S3/06754 , H01S3/1308 , H01S3/2308
摘要： A polarization state adjusting optical element is formed by a ½ wavelength plate and a ¼ wavelength plate and its polarization direction and elliptic degree are adjusted. By adjusting the polarization state adjusting optical element in advance, even if the output of a pump light source is changed, the polarization characteristic (polarization direction and elliptic degree) of the output light of an FDFA amplifier will not not change or the change is sufficiently small. In this state, a polarization state adjusting optical element adjusts the polarization state of the laser beam coming into a wavelength conversion optical system so that the wavelength conversion optical system has the maximum conversion efficiency. Thus, it is possible to provide an FDFA having a small change of the polarization state of the output light even if the pump light intensity is changed.
摘要翻译：偏振状态调整光学元件由1/2波长板和1/4波片形成，并且其偏振方向和椭圆度被调整。通过预先调整偏振状态调整光学元件，即使泵浦光源的输出发生变化，FDFA放大器的输出光的偏振特性（偏振方向和椭圆度）也不会变化，也不会发生变化小。在这种状态下，偏振态调整光学元件调节进入波长转换光学系统的激光束的偏振状态，使得波长转换光学系统具有最大的转换效率。因此，即使泵浦光强度发生变化，也可以提供输出光的偏振态变化小的FDFA。

19. 发明授权

US07298546B2 Ultraviolet light source, laser treatment apparatus comprising ultraviolet light source, and exposure apparatus comprising ultraviolet light source 有权
标题翻译：紫外光源，包括紫外光源的激光治疗装置和包括紫外光源的曝光装置
公开(公告)号：US07298546B2
公开(公告)日：2007-11-20
申请号：US11148428
申请日：2005-06-09
申请人： Akira Tokuhisa , Hiroshi Kitano
发明人： Akira Tokuhisa , Hiroshi Kitano
IPC分类号： H01S3/00 , G02F1/35 , G03B27/54 , G03B27/72
CPC分类号： G02F1/353 , A61F9/00804 , A61F9/00817 , A61F2009/00872 , G01N21/956 , G01N2021/95676 , G02F2001/354 , G03F7/70025 , G03F7/70575 , H01S3/067 , H01S3/06758 , H01S3/094046 , H01S3/108 , H01S3/2375 , H01S3/302
摘要： An ultraviolet light source (1) comprises a laser light source (10) for generating a signal light in the infrared region, a optical amplifier (20) which comprises fiber optical amplifiers (21, 22) and amplifies the signal light generated by the laser light source (10), and a wavelength converting optical system (30) which coverts the signal light amplified by the light amplifier (20) into an ultraviolet light and outputs the converted light. The ultraviolet light source (1) uses a single-mode fiber laser (26) as an excitation light source for at least the fiber optical amplifier (22) at one stage of the optical amplifier (20).
摘要翻译：紫外光源（1）包括用于在红外区域产生信号光的激光源（10），包括光纤放大器（21,22）的光放大器（20），并放大由激光器产生的信号光光源（10）和将由光放大器（20）放大的信号光覆盖成紫外光的波长转换光学系统（30），并输出转换的光。紫外光源（1）在光放大器（20）的一级使用单模光纤激光器（26）作为至少光纤放大器（22）的激发光源。

20. 发明申请

US20070030557A1 Wavelength converting optical system, laser light source, exposure apparatus, device for inspecting object of inspection, and polymer crystal working apparatus 有权
标题翻译：波长转换光学系统，激光光源，曝光装置，检查对象装置以及聚合物晶体加工装置
公开(公告)号：US20070030557A1
公开(公告)日：2007-02-08
申请号：US11500031
申请日：2006-08-07
申请人： Akira Tokuhisa , Yoshinori Oshita
发明人： Akira Tokuhisa , Yoshinori Oshita
IPC分类号： H01S3/10 , G02F1/35
CPC分类号： G02F1/3534 , G02F1/37 , G02F2201/16
摘要： A fifth harmonic wave is formed from a fundamental wave of P polarization via a second harmonic wave forming optical element 3, a third harmonic wave forming optical element 4, and a fifth harmonic wave forming optical element 6, and a second harmonic wave of P polarization is formed from a fundamental wave of P polarization via a second harmonic wave forming optical element 9. A fundamental wave of S polarization is combined with the second harmonic wave of P polarization described above by a dichroic mirror 13; furthermore, the fifth harmonic wave of P polarization, the fundamental wave of S polarization described above and the second harmonic wave of P polarization are combined by a dichroic mirror 10, and are incident on a seventh harmonic wave forming optical element 11. A seventh harmonic wave of S polarization is formed from the fifth harmonic wave and second harmonic wave of P polarization, and is combined with the fundamental wave of S polarization by being incident on an eighth harmonic wave forming optical element 12, so that an eighth harmonic wave of P polarization is formed.
摘要翻译：五次谐波通过二次谐波形成光学元件3，三次谐波形成光学元件4和五次谐波形成光学元件6的P极化的基波和P极化的二次谐波形成通过二次谐波形成光学元件9由P极化的基波形成。通过分色镜13将S极化的基波与上述P极化的二次谐波组合; 此外，P偏振的五次谐波，上述S极化的基波和P偏振的二次谐波由分色镜10组合，并入射到第七谐波成形光学元件11上。 S偏振的七次谐波由P偏振的五次谐波和二次谐波形成，并且通过入射到八次谐波形成光学元件12上与S极化的基波组合，使得八次谐波形成P极化波。

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