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    • 11. 发明授权
    • Light deflecting method and apparatus efficiently using a floating mirror
    • 光偏转方法和装置有效地利用浮子镜
    • US07215452B2
    • 2007-05-08
    • US11404866
    • 2006-04-17
    • Takeshi NanjyoSeiichi KatohKouichi Ohtaka
    • Takeshi NanjyoSeiichi KatohKouichi Ohtaka
    • G02B26/08
    • G02B6/3518G02B6/3556G02B6/357G02B6/3584G02B26/0841Y10S359/90
    • Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction. Disclosure also describes light deflecting apparatuses, light deflecting array apparatuses, image forming apparatuses, image projection display apparatuses, and optical data transmission apparatuses.
    • 偏转光的方法包括提供基底并在基底上形成支撑构件的步骤。 接下来的形成步骤在基板上的预定位置形成电极。 下一个形成步骤形成包括光反射装置的板状薄膜构件。 放置步骤将板状薄膜构件放置在支撑构件上,使得其相对表面面对电极。 形成步骤在基板的边缘上形成空间调节构件,用于调节形成在基板上的空间,其中板状薄膜构件可自由移动。 施加步骤对电极施加预定的电压,以根据施加的电压来改变板状薄膜构件的倾斜方向以使输入光沿任意方向偏转。 本发明还描述了光偏转装置,光偏转阵列装置,图像形成装置,图像投影显示装置和光数据传输装置。
    • 13. 发明授权
    • Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator
    • 光调制器,光调制器制造方法,包括光调制器的光信息处理装置,包括光调制器的图像形成装置,以及包括光调制器的图像投影和显示装置
    • US07166486B2
    • 2007-01-23
    • US11195695
    • 2005-08-03
    • Kouichi OhtakaSeiichi KatohTakeshi NanjyoMasanori HorikeEiichi Ohta
    • Kouichi OhtakaSeiichi KatohTakeshi NanjyoMasanori HorikeEiichi Ohta
    • H01L21/00
    • G02B26/02
    • A center beam which is formed out of a thin film constituted to be combined with a light reflection film provided on one surface of the center beam, which has both ends fixed and which is deformed by an electronic force; a substrate electrode which is opposed to the center beam through a gap formed on the other surface of the center beam; an opposed surface which is a surface of the substrate electrode opposed to the center beam modulating the incident light on the light reflection film, the opposed surface restricting deformation of the center beam due to application of a driving voltage to the substrate electrode by abutting on the center beam; and a substrate which has the substrate electrode having the opposed surface, formed in a concave section, and which holds a to-be-held section of the center beam, are provided. As a result, the structure of modulating light by changing the reflection direction of the incident light is simple, response is fast, the wavelength of the incident light to be used is not limited, operation is stable, reliability is high, the number of manufacturing steps is small and cost reduction can be achieved.
    • 中心光束,其由薄膜形成,该薄膜构成为与设置在中心光束的一个表面上的光反射膜组合,所述光反射膜的两端固定并且通过电子力而变形; 基板电极,其通过形成在中心光束的另一个表面上的间隙与中心光束相对; 与基板电极相对的表面的相对表面,该表面与调制光反射膜上的入射光的中心光束相对,相对表面限制由于通过抵靠基板电极施加驱动电压而导致的中心光束的变形 中心梁; 以及具有形成在凹部中并且保持中心光束的被保持部分的具有相对表面的基板电极的基板。 结果,通过改变入射光的反射方向来调制光的结构简单,响应快,所使用的入射光的波长不受限制,操作稳定,可靠性高,制造数量 步骤小,可以实现成本降低。
    • 18. 发明申请
    • Light deflecting method and apparatus efficiently using a floating mirror
    • 光偏转方法和装置有效地利用浮子镜
    • US20050168786A1
    • 2005-08-04
    • US11092841
    • 2005-03-30
    • Takeshi NanjyoSeiichi KatohKouichi Ohtaka
    • Takeshi NanjyoSeiichi KatohKouichi Ohtaka
    • G02B26/08
    • G02B6/3518G02B6/3556G02B6/357G02B6/3584G02B26/0841Y10S359/90
    • Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction. Disclosure also describes light deflecting apparatuses, light deflecting array apparatuses, image forming apparatuses, image projection display apparatuses, and optical data transmission apparatuses.
    • 偏转光的方法包括提供基底并在基底上形成支撑构件的步骤。 接下来的形成步骤在基板上的预定位置形成电极。 下一个形成步骤形成包括光反射装置的板状薄膜构件。 放置步骤将板状薄膜构件放置在支撑构件上,使得其相对表面面对电极。 形成步骤在基板的边缘上形成空间调节构件,用于调节形成在基板上的空间,其中板状薄膜构件可自由移动。 施加步骤对电极施加预定的电压,以根据施加的电压来改变板状薄膜构件的倾斜方向以使输入光沿任意方向偏转。 本发明还描述了光偏转装置,光偏转阵列装置,图像形成装置,图像投影显示装置和光数据传输装置。
    • 19. 发明授权
    • Actuator, and actuator array
    • 执行器和执行器阵列
    • US07777935B2
    • 2010-08-17
    • US11776305
    • 2007-07-11
    • Takeshi NanjyoSeiichi KatohKoichi Ohtaka
    • Takeshi NanjyoSeiichi KatohKoichi Ohtaka
    • G02B26/00G02B26/12G02F1/1335G02F1/1343
    • G02B26/0841G02B26/101
    • An actuator is disclosed that has a contacting part smaller than a processing limit of a lithography technique, and is able to reduce a contacting area or a contacting length of the contacting part during operation, reduce a sticking force induced by contact, and decrease a driving voltage of the actuator. The actuator includes an operating part and a contacting part in contact with the operating part. The contacting part is formed by overlapping a first pattern on an end of a second pattern. The first pattern has a solid structure and the size of an upper portion of the solid structure of the first pattern on the second pattern is less than a processing resolving power or resolution.
    • 公开了一种致动器,其具有小于光刻技术的加工极限的接触部分,并且能够在操作期间减小接触部件的接触面积或接触长度,减少由接触引起的粘附力并减小驱动 执行器的电压。 致动器包括与操作部件接触的操作部件和接触部件。 接触部分通过在第二图案的端部上重叠第一图案而形成。 第一图案具有固体结构,并且第二图案上的第一图案的实心结构的上部的尺寸小于处理分辨率或分辨率。
    • 20. 发明授权
    • Light deflecting method and apparatus efficiently using a floating mirror
    • 光偏转方法和装置有效地利用浮子镜
    • US07697179B2
    • 2010-04-13
    • US12398033
    • 2009-03-04
    • Takeshi NanjyoSeiichi KatohKouichi Ohtaka
    • Takeshi NanjyoSeiichi KatohKouichi Ohtaka
    • G02B26/08
    • G02B6/3518G02B6/3556G02B6/357G02B6/3584G02B26/0841Y10S359/90
    • Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction. Disclosure also describes light deflecting apparatuses, light deflecting array apparatuses, image forming apparatuses, image projection display apparatuses, and optical data transmission apparatuses.
    • 偏转光的方法包括提供基底并在基底上形成支撑构件的步骤。 接下来的形成步骤在基板上的预定位置形成电极。 下一个形成步骤形成包括光反射装置的板状薄膜构件。 放置步骤将板状薄膜构件放置在支撑构件上,使得其相对表面面对电极。 形成步骤在基板的边缘上形成空间调节构件,用于调节形成在基板上的空间,其中板状薄膜构件可自由移动。 施加步骤对电极施加预定的电压,以根据施加的电压来改变板状薄膜构件的倾斜方向以使输入光沿任意方向偏转。 本发明还描述了光偏转装置,光偏转阵列装置,图像形成装置,图像投影显示装置和光数据传输装置。