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11. 发明申请

US20100044359A1 HEIGHT POSITION DETECTING APPARATUS AND HEIGHT POSITION DETECTING METHOD 有权
标题翻译：高位置检测装置和高度位置检测方法
公开(公告)号：US20100044359A1
公开(公告)日：2010-02-25
申请号：US12535336
申请日：2009-08-04
申请人： Taiki Sawabe
发明人： Taiki Sawabe
IPC分类号： B23K26/02
CPC分类号： B23K26/03 , B23K2101/40
摘要： A laser beam having an annular spot shape with which a workpiece is irradiated is reflected on an upper surface and a lower surface of the workpiece. The reflected light having the annular spot shape which is reflected on the lower surface of the workpiece is intercepted by a pinhole mask, whereas the reflected light having the annular spot shape which is reflected on the upper surface of the workpiece is permitted to pass through the pinhole mask, and the intensity of light received is detected based on the latter reflected light. Therefore, the height position of the upper surface of a workpiece can be detected even where the workpiece is transmissive to visible rays. In this case, with regard to the reflected light having the annular spot shape which is reflected on the upper surface of the workpiece, the intensity of the light after diffusion by a laser beam diffusing unit is detected by a photodetector having a detecting surface with a predetermined area. This makes it possible to assuredly and accurately detect the upper surface height position of the workpiece, even in the presence of scattering of the annular spot shape.
摘要翻译：具有工件被照射的环形斑点形状的激光束在工件的上表面和下表面上被反射。被工件的下表面反射的具有环状斑点形状的反射光被针孔掩模遮断，而被反射在工件上表面的具有环状斑点形状的反射光被允许通过针孔掩模，并且基于后者的反射光检测接收到的光的强度。因此，即使在工件对可见光进行透射的情况下也能够检测工件的上表面的高度位置。在这种情况下，对于在工件的上表面上反射的具有环形斑点形状的反射光，通过具有检测面的光电检测器检测由激光束扩散单元扩散后的光的强度预定区域。这使得即使在存在环形斑点形状的散射的情况下，也可以准确且准确地检测工件的上表面高度位置。

12. 发明申请

US20090266802A1 LASER PROCESSING APPARATUS 有权
标题翻译：激光加工设备
公开(公告)号：US20090266802A1
公开(公告)日：2009-10-29
申请号：US12415196
申请日：2009-03-31
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： B23K26/38 , B23K26/02
CPC分类号： B23K26/046 , B23K26/082 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K2103/50 , H01L21/78
摘要： A laser processing apparatus including a height detecting device for detecting the height of a workpiece held on a chuck table. The height detecting device includes an annular spot forming unit for forming the spot shape of a detecting laser beam into an annular spot shape, a pinhole mask for passing the reflected light reflected on the upper surface of the workpiece held on the chuck table, but blocking the reflected light reflected on the lower surface of the workpiece, and a reflected light analyzing unit for analyzing the reflected light passed through the pinhole mask and transmitting the result of analyzation to a control unit. The laser processing apparatus further includes a focusing unit having an objective lens for focusing a processing laser beam having a circular spot shape and the detecting laser beam having the annular spot shape and a window lens for focusing the detecting laser beam focused by the objective lens without focusing the processing laser beam.
摘要翻译：一种激光加工设备，包括用于检测保持在卡盘台上的工件的高度的高度检测装置。高度检测装置包括环形斑点形成单元，用于将检测激光束的斑点形状形成为环形斑点形状;针孔掩模，用于使被反射在保持在卡盘台上的工件的上表面上反射的反射光通过，但阻塞在工件的下表面上反射的反射光和反射光分析单元，用于分析通过针孔掩模的反射光并将分析结果传送到控制单元。该激光加工装置还包括聚焦单元，该聚焦单元具有用于聚焦具有圆形斑点形状的处理激光束和具有环形斑点形状的检测激光束的物镜和用于聚焦由物镜聚焦的检测激光束的窗口透镜，而没有聚焦处理激光束。

13. 发明授权

US07443517B2 Measuring instrument and laser beam machine for wafer 有权
公开(公告)号：US07443517B2
公开(公告)日：2008-10-28
申请号：US12002038
申请日：2007-12-14
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： G01B11/28
CPC分类号： G01B11/0625 , B23K26/048 , B23K26/0861 , B23K2101/40
摘要： A measuring instrument for a wafer for measuring the thickness of a wafer held on a chuck table using a laser beam includes a condenser for condensing and irradiating the laser beam on the wafer held on the chuck table, a light reception unit for receiving reflected light of the laser beam irradiated upon the wafer, a convergence light point changing unit for changing the convergence light point of the laser beam, and a control unit for measuring the thickness of the wafer based on a change signal from the convergence light point changing unit and a light reception signal from the light reception unit. The control unit stores a thickness control map. The control unit controls an angle adjustment actuator, provided for adjusting the installation angle of a pair of mirrors, to change the installation angle and detects two peaks of the light amount based on the reception signal from the light reception unit.

14. 发明申请

US20080169274A1 Laser beam machining apparatus 有权
标题翻译：激光束加工设备
公开(公告)号：US20080169274A1
公开(公告)日：2008-07-17
申请号：US12006565
申请日：2008-01-03
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： B23K26/38 , B23K26/02
CPC分类号： B23K26/04 , B23K26/40 , B23K2103/50
摘要： A laser beam machining apparatus includes: a laser beam oscillator; a beam adjusting unit which is disposed between the laser beam oscillator and a condenser lens and by which the beam diameter and the divergence angle of the laser beam oscillated from the laser beam oscillator are adjusted; and a beam diameter and divergence angle detecting unit for detecting the beam diameter and the divergence angle of the laser beam having passed through the beam adjusting unit. The laser beam machining apparatus further includes a control unit which computes the beam diameter and the divergence angle of the laser beam oscillated from the laser beam oscillator, based on detection signals from the beam diameter and divergence angle detecting unit, and which controls the beam adjusting unit, based on the computed beam diameter and divergence angle of the laser beam oscillated from the laser beam oscillator and the beam diameter and the divergence angle of the laser beam incident on the beam diameter and divergence angle detecting unit.
摘要翻译：一种激光束加工装置，包括：激光束振荡器; 光束调节单元，其设置在激光束振荡器和聚光透镜之间，并且调整激光束从激光束振荡器振荡的光束直径和发散角; 以及用于检测通过光束调节单元的激光束的光束直径和发散角的光束直径和发散角检测单元。激光束加工装置还包括控制单元，其基于来自光束直径和发散角检测单元的检测信号计算从激光束振荡器振荡的激光束的光束直径和发散角，并且其控制光束调整基于从激光束振荡器振荡的激光束的计算光束直径和发散角以及入射在光束直径和发散角检测单元上的激光束的光束直径和发散角的单位。

15. 发明授权

US07932478B2 Laser processing machine 有权
标题翻译：激光加工机
公开(公告)号：US07932478B2
公开(公告)日：2011-04-26
申请号：US12048616
申请日：2008-03-14
申请人： Keiji Nomaru , Hiroshi Morikazu , Taiki Sawabe
发明人： Keiji Nomaru , Hiroshi Morikazu , Taiki Sawabe
IPC分类号： B23K26/06 , B23K26/36
CPC分类号： B23K26/0736 , B23K26/082 , B23K2101/40
摘要： A laser processing machine that includes a chuck table adapted to hold a workpiece thereon and laser beam irradiation unit for applying a laser beam to the workpiece held on the chuck table. The laser beam irradiation unit includes: a laser beam oscillation section for emitting a pulse laser beam; a defection section for deflecting the pulse laser beam emitted from the laser beam oscillation section; and a concentrator having an ellipsoidal focusing spot forming section for focusing the pulse laser beam deflected by the deflection unit and forming a focusing spot into an ellipse.
摘要翻译：一种激光加工机，其特征在于，包括适于将工件保持在其上的卡盘台和用于将激光束施加到夹持在卡盘台上的工件的激光束照射单元。激光束照射单元包括：激光束振荡部，用于发射脉冲激光束; 偏转部，用于偏转从激光束振荡部发射的脉冲激光束; 以及聚光器，其具有用于聚焦由偏转单元偏转的脉冲激光束并形成聚焦点的椭圆形聚焦点形成部。

16. 发明授权

US07564570B2 Height position detector for work held on chuck table 有权
标题翻译：卡盘台上工作的高度位置检测器
公开(公告)号：US07564570B2
公开(公告)日：2009-07-21
申请号：US12197835
申请日：2008-08-25
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： G01B11/14
CPC分类号： G01B11/0608
摘要： A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which a spot of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a beam splitter by which the laser beam with the spot formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed so as to irradiate the work held on the chuck table therewith; a conical mirror disposed in a second path into which the laser beam reflected by the work is split by the beam splitter, the conical mirror converting the reflected light with the annular spot shape into a linear spot shape; a position detector for detecting the position of the reflected light converted into the linear spot shape by the conical mirror; and a controller by which the height position of the upper surface of the work held on the chuck table is determined based on the position of the reflected light detected by the position detector.
摘要翻译：一种高度位置检测器，用于检测夹持在卡盘台上的工件的上表面的高度位置，该环形点形成部分由激光束振荡器振荡的激光束的点形成为环形; 将形成为环状的点的激光束引导到第一路径中的分束器; 引导到第一路径的激光束被聚光的光聚光器，以便照射夹持在卡盘台上的工件; 圆锥镜，设置在第二路径中，由工件反射的激光束被分束器分开，锥形镜将具有环形斑点形状的反射光转换为直线光斑形状; 位置检测器，用于通过锥形反射镜检测转换成直线光斑形状的反射光的位置; 以及控制器，通过该控制器，基于由位置检测器检测到的反射光的位置来确定保持在卡盘台上的作业的上表面的高度位置。

17. 发明申请

US20090153868A1 Device for detecting the edges of a workpiece, and a laser beam processing machine 有权
标题翻译：用于检测工件边缘的装置和激光束处理机
公开(公告)号：US20090153868A1
公开(公告)日：2009-06-18
申请号：US12314081
申请日：2008-12-03
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： G01N21/55
CPC分类号： G01B11/028 , B23K26/032 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/40 , B23K26/702 , B23K2103/50 , H01L21/681
摘要： A device for detecting the edges of a workpiece held on the chuck table of a processing machine, having a beam oscillation means for oscillating a detection beam, an objective lens for focusing the detection beam oscillated from the beam oscillation means, and a reflected light detection means for detecting the reflected light of the detection beam applied through the objective lens, wherein the beam oscillation means oscillates the detection beam in such a manner that the optical axis of the detection beam becomes parallel to the center axis of the objective lens at a position offset from the center axis; and the reflected light detection means detects the edge of the workpiece based on a positional difference between reflected light obtained when the detection beam applied through the objective lens is reflected on an area where the workpiece is not existent and refracted by the objective lens and reflected light obtained when the detection beam is reflected on the workpiece and refracted by the objective lens.
摘要翻译：一种用于检测保持在加工机的卡盘台上的工件的边缘的装置，具有用于使检测光束振荡的光束振荡装置，用于聚焦从光束振荡装置振荡的检测光束的物镜和反射光检测用于检测通过物镜施加的检测光束的反射光的装置，其中光束振荡装置使检测光束以使得检测光束的光轴平行于物镜的中心轴线的位置振荡，偏离中心轴; 并且反射光检测装置基于当通过物镜施加的检测光束被反射在工件不存在并被物镜折射的区域和反射光上所获得的反射光之间的位置差异时，检测工件的边缘当检测光束在工件上反射并被物镜折射时获得。

18. 发明申请

US20090066969A1 HEIGHT POSITION DETECTOR FOR WORK HELD ON CHUCK TABLE 有权
标题翻译：高度位置检测器在工作台上工作
公开(公告)号：US20090066969A1
公开(公告)日：2009-03-12
申请号：US12197835
申请日：2008-08-25
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： G01B11/14
CPC分类号： G01B11/0608
摘要： A height position detector for detecting the height position of an upper surface of a work held on a chuck table, including: an annular spot forming part by which a spot of a laser beam oscillated by a laser beam oscillator is formed into an annular shape; a beam splitter by which the laser beam with the spot formed into the annular shape is guided into a first path; a light condenser by which the laser beam guided into the first path is condensed so as to irradiate the work held on the chuck table therewith; a conical mirror disposed in a second path into which the laser beam reflected by the work is split by the beam splitter, the conical mirror converting the reflected light with the annular spot shape into a linear spot shape; a position detector for detecting the position of the reflected light converted into the linear spot shape by the conical mirror; and a controller by which the height position of the upper surface of the work held on the chuck table is determined based on the position of the reflected light detected by the position detector.
摘要翻译：一种高度位置检测器，用于检测夹持在卡盘台上的工件的上表面的高度位置，该环形点形成部分由激光束振荡器振荡的激光束点形成环形; 将形成为环状的点的激光束引导到第一路径中的分束器; 引导到第一路径的激光束被聚光的光聚光器，以便照射夹持在卡盘台上的工件; 圆锥镜，设置在第二路径中，由工件反射的激光束被分束器分开，锥形镜将具有环形斑点形状的反射光转换为直线光斑形状; 位置检测器，用于通过锥形反射镜检测转换成直线光斑形状的反射光的位置; 以及控制器，通过该控制器，基于由位置检测器检测到的反射光的位置来确定保持在卡盘台上的作业的上表面的高度位置。

19. 发明授权

US08124909B2 Laser processing apparatus 有权
标题翻译：激光加工设备
公开(公告)号：US08124909B2
公开(公告)日：2012-02-28
申请号：US12415196
申请日：2009-03-31
申请人： Taiki Sawabe , Keiji Nomaru
发明人： Taiki Sawabe , Keiji Nomaru
IPC分类号： B23K26/14
CPC分类号： B23K26/046 , B23K26/082 , B23K26/0853 , B23K26/364 , B23K26/40 , B23K2103/50 , H01L21/78
摘要： A laser processing apparatus including a height detecting device for detecting the height of a workpiece held on a chuck table. The height detecting device includes an annular spot forming unit for forming the spot shape of a detecting laser beam into an annular spot shape, a pinhole mask for passing the reflected light reflected on the upper surface of the workpiece held on the chuck table, but blocking the reflected light reflected on the lower surface of the workpiece, and a reflected light analyzing unit for analyzing the reflected light passed through the pinhole mask and transmitting the result of analyzation to a control unit. The laser processing apparatus further includes a focusing unit having an objective lens for focusing a processing laser beam having a circular spot shape and the detecting laser beam having the annular spot shape and a window lens for focusing the detecting laser beam focused by the objective lens without focusing the processing laser beam.
摘要翻译：一种激光加工设备，包括用于检测保持在卡盘台上的工件的高度的高度检测装置。高度检测装置包括环形斑点形成单元，用于将检测激光束的斑点形状形成为环形斑点形状;针孔掩模，用于使被反射在保持在卡盘台上的工件的上表面上反射的反射光通过，但阻塞在工件的下表面上反射的反射光和反射光分析单元，用于分析通过针孔掩模的反射光并将分析结果传送到控制单元。该激光加工装置还包括聚焦单元，该聚焦单元具有用于聚焦具有圆形斑点形状的处理激光束和具有环形斑点形状的检测激光束的物镜和用于聚焦由物镜聚焦的检测激光束的窗口透镜，而没有聚焦处理激光束。

20. 发明申请

US20100133243A1 LASER PROCESSING APPARATUS 有权
标题翻译：激光加工设备
公开(公告)号：US20100133243A1
公开(公告)日：2010-06-03
申请号：US12610718
申请日：2009-11-02
申请人： Keiji Nomaru , Taiki Sawabe
发明人： Keiji Nomaru , Taiki Sawabe
IPC分类号： B23K26/00
CPC分类号： B23K26/032 , B23K26/046 , B23K26/364
摘要： A laser processing apparatus including a detecting unit. The detecting unit includes a white light source for emitting white light, a focusing lens for focusing the white light to the workpiece, a first optical fiber for guiding the white light emitted from the white light source to the focusing lens, a detector for detecting the intensity of reflected light from the workpiece, and a second optical fiber for guiding the reflected light to the detector. Accordingly, the white light to be focused to the workpiece can be easily handled and only a wavelength component focused on the workpiece can be stably propagated.
摘要翻译：一种激光加工装置，包括检测单元。检测单元包括用于发射白光的白光源，用于将白光聚焦到工件的聚焦透镜，用于将从白光源发射的白光引导到聚焦透镜的第一光纤，用于检测白光的检测器来自工件的反射光的强度和用于将反射光引导到检测器的第二光纤。因此，可以容易地处理要聚焦到工件上的白色光，并且只有聚焦在工件上的波长分量能够稳定地传播。

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