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11. 发明授权

US08259305B2 Surface shape measuring system and surface shape measuring method using the same 有权
标题翻译：表面形状测量系统和使用其的表面形状测量方法
公开(公告)号：US08259305B2
公开(公告)日：2012-09-04
申请号：US12747763
申请日：2008-12-10
申请人： Sang-yun Lee , MinGu Kang , Ssang-gun Lim
发明人： Sang-yun Lee , MinGu Kang , Ssang-gun Lim
IPC分类号： G01B11/02
CPC分类号： G01B11/2441
摘要： The surface shape measuring system includes an illumination unit including a main light source, a focusing lens, and a projection lens; a beam splitter to split illumination light emitted respectively irradiated onto a reference surface and a measurement surface; a light detecting element to capture an interference pattern; and a control computer to obtain surface shape data through white-light interference pattern analysis from an image captured and detect whether or not the measurement surface is defective from the obtained data, wherein a subsidiary light source to provide falling illumination to the target object; and two-dimensional data and three-dimensional data regarding the surface shape of the target object are obtained by selectively intermitting the turning-on of the main light source and the subsidiary light source and the irradiation of the illumination light onto the reference surface.
摘要翻译：所述表面形状测量系统包括：包括主光源，聚焦透镜和投影透镜的照明单元; 分光器，用于将分别照射到参考表面和测量表面上的照射光分离; 用于捕获干涉图案的光检测元件; 以及控制计算机，通过从所拍摄的图像通过白光干涉图案分析获得表面形状数据，并从所获得的数据检测测量表面是否有缺陷，其中辅助光源向目标物体提供落下的照明; 并且通过选择性地将主光源和辅助光源的接通以及照射光照射到参考表面上来获得关于目标物体的表面形状的二维数据和三维数据。

12. 发明授权

US09412159B2 Method for inspecting flat panel 有权
标题翻译：平板检查方法
公开(公告)号：US09412159B2
公开(公告)日：2016-08-09
申请号：US14343345
申请日：2012-09-13
申请人： Jai-Ho Son , Hyun-Min Lee , Min-Gu Kang , Sang-Yoon Lee , Ssang-Gun Lim
发明人： Jai-Ho Son , Hyun-Min Lee , Min-Gu Kang , Sang-Yoon Lee , Ssang-Gun Lim
IPC分类号： H04N7/18 , G06T7/00 , G01N21/95 , G02F1/13
CPC分类号： G06T7/0004 , G01N21/95 , G01N2021/9513 , G02F1/1309 , G06T2207/30121 , H04N7/18
摘要： Disclosed is a method for inspecting a flat panel. The method for inspecting the flat panel includes the steps of: arranging a camera at a measurement location of the flat panel by horizontally moving at least one of the flat panel and the camera; automatically focusing the camera with respect to a measuring target of the flat panel at the measurement location; acquiring a plurality of images for the measuring target by vertically moving the focused camera within a set region on the basis of the present location of the camera when focusing the camera; selecting the image having the most definition for the measuring target among the acquired images; processing the selected image; and determining whether the measuring target is defective or not.
摘要翻译：公开了一种用于检查平板的方法。用于检查平板的方法包括以下步骤：通过水平移动平板和相机中的至少一个来将相机布置在平板的测量位置; 在测量位置相对于平板测量对象自动聚焦相机; 在对照相机进行聚焦时，基于相机的当前位置垂直移动设定区域内的聚焦照相机，来获取测量对象的多个图像; 在所获取的图像中选择具有用于测量目标的最高定义的图像; 处理所选图像; 并且确定测量目标是否有缺陷。

13. 发明授权

US08493570B2 Three-dimensional shape measuring apparatus 有权
标题翻译：三维形状测量仪
公开(公告)号：US08493570B2
公开(公告)日：2013-07-23
申请号：US12747751
申请日：2008-12-10
申请人： Joon-Ho You , MinGu Kang , Ssang-gun Lim
发明人： Joon-Ho You , MinGu Kang , Ssang-gun Lim
IPC分类号： G01B11/02
CPC分类号： G01B11/2441 , G01B9/02028 , G01B2290/35
摘要： The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.
摘要翻译：三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标对象，具有最高点和最低点之间的高度差; 参考镜，在其上照射从分束器发射的另一个光束; 光检测元件，用于检测由目标物体的表面反射的物体光束的干涉产生的干涉图案和由参考反射镜的表面反射的参考光束; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置有用于改变来自分束器的光束的光路以产生辅助参考光束的辅助参考光束产生单元。

14. 发明申请

US20100265517A1 THREE-DIMENSIONAL SHAPE MEASURING APPARATUS 有权
标题翻译：三维形状测量装置
公开(公告)号：US20100265517A1
公开(公告)日：2010-10-21
申请号：US12747751
申请日：2008-12-10
申请人： Joon-Ho You , MinGu Kang , Ssang-gun Lim
发明人： Joon-Ho You , MinGu Kang , Ssang-gun Lim
IPC分类号： G01B11/24
CPC分类号： G01B11/2441 , G01B9/02028 , G01B2290/35
摘要： The three-dimensional shape measuring apparatus includes a light source; a beam splitter to split illumination light from the light source; a target object to be measured, having a height difference between the highest point and the lowest point; a reference mirror, on which another beam emitted from the beam splitter is irradiated; a light detecting element to detect an interference pattern generated by the interference of an object beam reflected by the surface of the target object and a reference beam reflected by the surface of the reference mirror; and a control computer to process an image detected by the light detecting element, wherein a subsidiary reference beam generating unit to change the optical path of the beam from the beam splitter to generate a subsidiary reference beam is provided between the beam splitter and the reference mirror.
摘要翻译：三维形状测量装置包括光源; 分束器，用于分离来自光源的照明光; 要测量的目标对象，具有最高点和最低点之间的高度差; 参考镜，在其上照射从分束器发射的另一个光束; 光检测元件，用于检测由目标物体的表面反射的物体光束的干涉产生的干涉图案和由参考反射镜的表面反射的参考光束; 以及控制计算机，用于处理由光检测元件检测到的图像，其中，在分束器和参考镜之间设置有用于改变来自分束器的光束的光路以产生辅助参考光束的辅助参考光束产生单元。

15. 发明申请

US20080266391A1 Apparatus for and Method of Measuring Image 审中-公开
标题翻译：测量图像的装置和方法
公开(公告)号：US20080266391A1
公开(公告)日：2008-10-30
申请号：US12090557
申请日：2006-10-16
申请人： Sang-yoon Lee , Yi-bae Choi , Min-gu Kang , Ssang-gun Lim
发明人： Sang-yoon Lee , Yi-bae Choi , Min-gu Kang , Ssang-gun Lim
IPC分类号： H04N7/18
CPC分类号： G01B11/25 , G01B11/0608 , H01L27/148 , H04N13/207 , H04N13/254
摘要： An image measuring apparatus for acquiring an image captured by an optical system and a method thereof are disclosed. The apparatus includes a CCD camera for capturing the object and outputting the captured image, a lamp for generating light to illuminate a capturing area of the object, an illumination controller for controlling the lamp to be turned on, a projection grating formed with gratings, a projection grating driving unit for adjusting a distance between the projection grating and the object, an image capturing device for acquiring the image captured by the CCD camera, a driving signal generator for outputting a driving signal to the illumination controller, the projection grating driving unit, and the image capturing unit simultaneously according to an enable signal generated from the CCD camera, and an image signal processor for estimating a three-dimensional image of the object from data transmitted from the image capturing unit.
摘要翻译：公开了一种用于获取由光学系统捕获的图像的图像测量装置及其方法。该装置包括用于捕获物体并输出所捕获的图像的CCD照相机，用于产生用于照射被摄体的拍摄区域的光的灯，用于控制被导通的灯的照明控制器，形成有光栅的投影光栅，投影光栅驱动单元，用于调整投影光栅和物体之间的距离，用于获取由CCD照相机拍摄的图像的图像捕获装置，用于向照明控制器输出驱动信号的驱动信号发生器，投影光栅驱动单元，以及根据从CCD照相机产生的使能信号同时进行图像捕获单元，以及图像信号处理器，用于根据从图像捕获单元发送的数据估计对象的三维图像。

16. 发明申请

US20080260204A1 Apparatus For and Method of Measuring Image 有权
标题翻译：仪器和测量图像的方法
公开(公告)号：US20080260204A1
公开(公告)日：2008-10-23
申请号：US12090592
申请日：2006-10-18
申请人： Sang-yoon Lee , Min-gu Kang , Ssang-gun Lim
发明人： Sang-yoon Lee , Min-gu Kang , Ssang-gun Lim
IPC分类号： G06K9/00 , H04N5/228
CPC分类号： G01B9/04
摘要： An image measuring apparatus for enhancing an accuracy of an image captured by an optical system and a method thereof are disclosed. The apparatus includes a CCD camera for capturing the object and outputting the captured image, a lamp for generating white light to illuminate a capturing area of the object, an illumination controller for controlling the lamp to be turned on, a piezoelectric actuator for controlling a minute height of the optical system with respect to the object, an image capturing device for acquiring the image captured by the CCD camera, a driving signal generator for outputting a driving signal to the illumination controller and the piezoelectric actuator when an enable signal is generated from the CCD camera, and an image signal processor for estimating height information of the object from data transmitted from the image capturing unit.
摘要翻译：公开了一种用于提高由光学系统捕获的图像的精度的图像测量装置及其方法。该装置包括用于捕获物体并输出拍摄图像的CCD照相机，用于产生白光以照亮被摄体的拍摄区域的灯，用于控制被导通的灯的照明控制器，用于控制分钟的压电致动器相对于物体的光学系统的高度，用于获取由CCD照相机拍摄的图像的图像捕获装置，当从该照相机产生使能信号时，将驱动信号输出到照明控制器和压电致动器的驱动信号发生器 CCD摄像机和图像信号处理器，用于根据从图像捕获单元发送的数据来估计物体的高度信息。

17. 发明授权

US06873421B2 Method and apparatus for measuring the three-dimensional shape of an object using a moire equipment 有权
标题翻译：使用莫尔设备测量物体的三维形状的方法和装置
公开(公告)号：US06873421B2
公开(公告)日：2005-03-29
申请号：US10181679
申请日：2001-10-31
申请人： Ssang-Gun Lim , Seung-Woo Kim , Sang-Yoon Lee , Chang-Jin Chung , Yi-Bae Choi , Young-Sik Cho , Kyung-Keun Park
发明人： Ssang-Gun Lim , Seung-Woo Kim , Sang-Yoon Lee , Chang-Jin Chung , Yi-Bae Choi , Young-Sik Cho , Kyung-Keun Park
IPC分类号： H04N13/00 , G01B11/25 , G01B11/24
CPC分类号： G01B11/2527
摘要： An apparatus and method for measuring a three-dimensional shape of an object using a projection moiré device. The method comprises the steps of obtaining a grid pattern image projected on a reference plane of a moving table and applying a buckets algorithm thereto, thereby achieving a reference phase, obtaining a grid pattern image projected on the object set on the moving table and applying a buckets algorithm thereto, thereby achieving an object phase, calculating a difference phase between the object phase and the reference phase, thereby achieving a moiré phase, and unwrapping the moiré phase, thereby achieving a level information of the object. The apparatus and method measure the three-dimensional shape using a projection grid without a reference grid, thereby achieving compactness of equipment, simplicity in usage and manufacturing cost reduction.
摘要翻译：一种使用投影莫尔装置测量物体的三维形状的装置和方法。该方法包括以下步骤：获得投影在移动台的参考平面上的网格图案图像并对其施加桶算法，从而实现参考相位，获得投影在移动台上的对象上的网格图案图像，从而实现物体相位，计算物体相位与参考相位之间的差分相位，从而实现莫尔相位，并且展开莫尔相位，从而实现物体的等级信息。该装置和方法使用没有参考网格的投影网格来测量三维形状，从而实现设备的紧凑性，使用简单性和制造成本降低。

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