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    • 11. 发明授权
    • Process for vacuum treating workpieces, and corresponding process equipment
    • 真空处理工件的工艺及相应的加工设备
    • US06391377B1
    • 2002-05-21
    • US09441374
    • 1999-11-17
    • Rudolf WagnerJacques SchmittJerome Perrin
    • Rudolf WagnerJacques SchmittJerome Perrin
    • B65G4907
    • H01L21/67276C23C14/568C23C16/54H01L21/67253
    • A method of manufacturing workpieces, includes loading the workpieces into a treatment facility, surface treating the workpieces in at least one vacuum station of the facility grouped as a station batch and controlling at least the timing of the process by a freely programmable process controller unit. At least two stations operating each on workpiece batches can be grouped as respective station batches and be different with respect to number of workpieces. The workpieces can be transported to and from the grouped stations. An embodiment of vacuum treatment system for such a process includes at least one vacuum treatment station for workpieces grouped as a station batch. A transport system supplies the vacuum station with workpieces. A process controller unit has an output operationally connected to a drive arrangement for the transport system. The unit controls operating timing of the treatment system and is freely programmable.
    • 一种制造工件的方法,包括将工件装载到处理设备中,将设备的至少一个真空站中的工件进行表面处理,其被分组为站批次,并且通过可自由编程的过程控制器单元至少控制过程的时序。 在工件批次上操作的至少两个站可以分组为相应的站批次,并且相对于工件数量是不同的。 工件可以运送到分组的站和从分组的站。 用于这种方法的真空处理系统的一个实施例包括至少一个用于作为站批次分组的工件的真空处理站。 运输系统为真空站提供工件。 过程控制器单元具有可操作地连接到用于运输系统的驱动装置的输出。 该单元控制治疗系统的操作时间,并可自由编程。
    • 12. 发明授权
    • Process for handling workpieces and apparatus therefor
    • 处理工件及其设备的方法
    • US06177129B1
    • 2001-01-23
    • US09441373
    • 1999-11-17
    • Rudolf WagnerJacques SchmittJerome Perrin
    • Rudolf WagnerJacques SchmittJerome Perrin
    • B65G4907
    • C23C16/54C23C14/568
    • A process for the vacuum treatment of workpieces, includes loading the workpieces into a treatment facility, surface treating the workpieces in at least one vacuum station of the facility grouped as a station batch and controlling at least the timing of the process by a freely programmable process controller unit. At least two stations operating each on workpiece batches can be grouped as respective station batches and be different with respect to number of workpieces. The workpieces can be transported to and from the grouped stations. An embodiment of vacuum treatment system for such a process includes at least one vacuum treatment station for workpieces grouped as a station batch. A transport system supplies the vacuum station with workpieces. A process controller unit has an output operationally connected to a drive arrangement for the transport system. The unit controls operating timing of the treatment system and is freely programmable.
    • 一种用于真空处理工件的方法,包括将工件装载到处理设备中,将设备的至少一个真空站中的工件进行表面处理,其被分组为站批次,并且通过可自由编程的过程至少控制过程的时序 控制器单元。 在工件批次上操作的至少两个站可以分组为相应的站批次,并且相对于工件数量是不同的。 工件可以运送到分组的站和从分组的站。 用于这种方法的真空处理系统的一个实施例包括至少一个用于作为站批次分组的工件的真空处理站。 运输系统为真空站提供工件。 过程控制器单元具有可操作地连接到用于运输系统的驱动装置的输出。 该单元控制治疗系统的操作时间,并可自由编程。
    • 14. 发明授权
    • Supporting and transport apparatus
    • 支持和运输设备
    • US5100285A
    • 1992-03-31
    • US512662
    • 1990-04-20
    • Rudolf Wagner
    • Rudolf Wagner
    • B25J15/08H01L21/677H01L21/687
    • H01L21/68707
    • In order to treat disk-shaped bodies, specifically semiconductor disks in a vacuum plant, they must be transported and deposited between stations. A given disk is supported at its edge by two supporting arms each having two fingers and supporting surfaces at four edge sections of the disk distributed along the circumference of the disk. In order to grasp or release the disk by decreasing or increasing the distance between the supporting arms, both supporting arms are mounted to a respective piston/cylinder unit. In such units a respective cylinder moves relative to a stationary piston rod. The ends of both piston rods are thereby mounted oppositely of each other to a rotation axle extending perpendicularly to the axes of the cylinders by means of which the two piston/cylinder units can be pivoted together with the supporting arms from one station to the other station within the vacuum plant. The two piston/cylinder units are operated by a pressurized medium fed via conduits through the hollow piston rods to move the supporting arms away from each other and against the action of a pressure spring positioned inside of the cylinder and resting against the cylinder and the piston and active for the opposed stroke movement.
    • 为了处理盘形体,特别是真空设备中的半导体磁盘,它们必须在电台之间运输和存放。 给定的盘在其边缘由两个支撑臂支撑,每个支撑臂具有两个指状物,并且在盘的四个边缘部分处沿盘的圆周分布有支撑表面。 为了通过减小​​或增加支撑臂之间的距离来抓住或释放盘,两个支撑臂都安装在相应的活塞/缸体上。 在这样的单元中,相应的缸相对于固定的活塞杆移动。 因此,两个活塞杆的端部因此相对于彼此相对地安装到垂直于气缸轴线延伸的旋转轴,通过该轴可以将两个活塞/气缸单元与支撑臂一起枢转到一个站到另一个站 在真空厂内。 两个活塞/气缸单元由加压介质操作,该加压介质通过导管穿过中空活塞杆,以将支撑臂彼此远离并且抵抗位于气缸内部的压力弹簧的作用并抵靠气缸和活塞 并为对抗中风运动活跃。
    • 18. 发明授权
    • Cutting head for thread cutting machines
    • 切割机切割头
    • US4370770A
    • 1983-02-01
    • US169606
    • 1980-07-17
    • Rudolf Wagner
    • Rudolf Wagner
    • B23G5/12
    • B23G5/12Y10T408/853
    • A thread-cutting head for pipes, tubes, and the like, with cutting jaws arranged in a cutting-jaw holder. The cutting jaws are radially adjustable by a control disc which is displaceably supported on the cutting-jaw holder and is adjustable by a clamping screw. The control disc for the cutting position of the cutting jaws relative to the cutting jaw holder is adapted to be tensioned and arrested against the force of a spring. The thead-cutting head also has a clamping lever as well as an unlatching abutment projecting into the thread-cutting range. The clamping lever is pivotally journaled on an arresting piece arranged on the control disc about a pivot pin directed transverse to the thread-cutting axis. A catch member is arranged between the cutting-jaw holder and the arresting piece. The clamping lever has a release pin directed against the catch member, and is embodied as an unlatching abutment at that end thereof directed toward the cutting jaw side. The clamping lever may have an additional pivot pin bore, the distance of which to the unlatching abutment of the clamping lever is less than the distance between the pivot pin and the greatest possible thread-cutting diameter of the cutting jaw.
    • 用于管道,管子等的切线头,切割爪布置在切割夹持器中。 切割爪可通过可移动地支撑在切割夹持器上的控制盘径向调节,并且可通过夹紧螺钉调节。 用于切割爪相对于切割夹持器的切割位置的控制盘适于克服弹簧的力被张紧和阻止。 切割头还具有夹紧杆以及突出到切线范围内的解锁基座。 夹紧杆枢转地轴颈安装在控制盘周围的止动件上,围绕横向于切线轴线的枢轴销。 在切割夹持器和止动件之间布置有卡扣构件。 夹紧杆具有指向卡扣构件的释放销,并且在其朝向切割钳口侧的端部处被实施为解锁支座。 夹紧杆可以具有附加的枢转销孔,其与夹紧杆的解锁邻接部的距离小于枢轴销与切割钳口的最大切削直径之间的距离。
    • 20. 发明授权
    • Die for cutting screw-threads
    • 用于切割螺纹的模具
    • US4282618A
    • 1981-08-11
    • US58507
    • 1979-07-18
    • Rudolf Wagner
    • Rudolf Wagner
    • B23G5/00B23G5/10B23G5/08
    • B23G5/10
    • A die for cutting screw-threads, especially for cutting threads into steel for reinforcing concrete and the like with an external thread cutting machine to which the die is operatively connectible by means of a mounting portion having a support surface is disclosed. The die includes a cutting portion having a plurality of cutting teeth arranged in a cutting plane and a guide portion adjacent said cutting portion, which guide portion has a plurality of teeth arranged in a guide plane. The length of the guide portion corresponds to about 3 to 6 times the length of the cutting portion and is approximately 10 to 20 times the length of the cutting plane.
    • 公开了一种用于切割螺纹的模具,特别是用于将螺纹切割成钢,用于加强混凝土等,其中外螺纹切割机通过具有支撑表面的安装部分可操作地连接模具。 模具包括具有布置在切割平面中的多个切割齿和与所述切割部相邻的引导部的切割部,该引导部具有布置在引导平面中的多个齿。 导向部分的长度对应于切割部分的长度的约3至6倍,并且是切割平面长度的大约10至20倍。