专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明申请

US20120090056A1 MICROCONTACT PROBER 有权
公开(公告)号：US20120090056A1
公开(公告)日：2012-04-12
申请号：US13378286
申请日：2010-05-26
申请人： Motoyuki Hirooka , Makoto Okai
发明人： Motoyuki Hirooka , Makoto Okai
IPC分类号： G01Q30/02
CPC分类号： G01Q60/40 , G01Q70/12 , G01R1/06727 , G01R1/06744 , G01R31/2887
摘要： The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.
摘要翻译：当使用具有导电纳米管，纳米线或纳米柱探针的微探针探针时，探针和测量样品之间的接触引起的应力得到改善，接触界面处的绝缘层被去除，从而降低了接触电阻，并且性能的半导体器件检查得到改进。微接触探针包括悬臂探针，其中每个悬臂设置有从设置在前端的保持器突出50至100nm的纳米线，纳米柱或金属涂覆的碳纳米管探针和用于水平振动悬臂的振动机构关于这个问题。支架的前端可以从悬臂的自由端突出，并且可以从悬臂上方检查支架的前端。

12. 发明申请

US20110198558A1 GRAPHENE CIRCUIT BOARD HAVING IMPROVED ELECTRICAL CONTACT BETWEEN GRAPHENE AND METAL ELECTRODE, AND DEVICE INCLUDING SAME 失效
标题翻译：具有改善的石墨和金属电极之间的电气接触的石墨电路板和包括其的装置
公开(公告)号：US20110198558A1
公开(公告)日：2011-08-18
申请号：US13013984
申请日：2011-01-26
申请人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
发明人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
IPC分类号： H01L29/06
CPC分类号： H01L29/1606 , G02B6/4246 , H01L21/2855 , H01L29/41 , H01L29/45 , H01L29/7781 , H01L29/78603 , H01L29/78684
摘要： A circuit board having a graphene circuit according to the present invention includes: a base substrate; a patterned aluminum oxide film formed on the base substrate, the patterned aluminum oxide film having an average composition of Al2-xO3+x (where x is 0 or more), the patterned aluminum oxide film having a recessed region whose surface has one or more cone-shaped recesses therein; a graphene film preferentially grown only on the patterned aluminum oxide film, the graphene film having one or more graphene atomic layers, the graphene film having a contact region that covers the recessed region, the graphene film growing parallel to a flat surface of the recessed region and parallel to an inner wall surface of each cone-shaped recess of the recessed region; and a patterned metal film, a part of the patterned metal film covering and having electrical contact with the contact region, the patterned metal film filling each recess covered by the graphene film.
摘要翻译：根据本发明的具有石墨烯电路的电路板包括：基底; 形成在基底基板上的图案化氧化铝膜，图案化的氧化铝膜具有平均组成为Al 2-x O 3 + x（其中x为0或更大）的图案化氧化铝膜，图案化的氧化铝膜具有凹陷区域，其表面具有一个或多个锥形凹槽; 优选仅在图案化的氧化铝膜上生长的石墨烯膜，所述石墨烯膜具有一个或多个石墨烯原子层，所述石墨烯膜具有覆盖所述凹陷区域的接触区域，所述石墨烯膜平行于所述凹陷区域的平坦表面生长并且平行于凹陷区域的每个锥形凹部的内壁表面; 以及图案化的金属膜，所述图案化的金属膜的一部分覆盖并与所述接触区域电接触，所述图案化金属膜填充由所述石墨烯膜覆盖的每个凹部。

13. 发明申请

US20100064396A1 SCANNING PROBE MICROSCOPE AND SAMPLE OBSERVING METHOD USING THE SAME 有权
标题翻译：扫描探针显微镜和使用其的样品观察方法
公开(公告)号：US20100064396A1
公开(公告)日：2010-03-11
申请号：US12523369
申请日：2008-02-26
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Motoyuki Hirooka
IPC分类号： G01Q60/18 , G01Q60/24
CPC分类号： G01Q60/18 , G01Q60/22
摘要： In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.
摘要翻译：在使用孔径探针的近场扫描显微镜中，实际上孔径形成的上限为至多几十nm。在使用散射探针的近场扫描显微镜中，由于外部照明光作为背景噪声，分辨能力被限制在至多几十nm。此外，通过探针的损伤或磨损，测量再现性被严重降低。可以以nm级分辨能力和高再现性测量样品表面的光学数据和不均匀性数据，同时通过制造具有nm级光学分辨率的等离子体增强近场探针而不损害探针和样品通过将nm级圆柱形结构与nm级微粒组合，并在样品上的各个测量点处以低接触力将探针重复地移动到样品并从中离开它们的能力。

14. 发明授权

US08476739B2 Graphene grown substrate and electronic/photonic integrated circuits using same 失效
标题翻译：石墨烯生长衬底和电子/光子集成电路使用相同
公开(公告)号：US08476739B2
公开(公告)日：2013-07-02
申请号：US12624437
申请日：2009-11-24
申请人： Makoto Okai , Motoyuki Hirooka , Takashi Kyotani , Hironori Orikasa
发明人： Makoto Okai , Motoyuki Hirooka , Takashi Kyotani , Hironori Orikasa
IPC分类号： H01L23/58
CPC分类号： H01L21/0242 , C23C16/26 , C23C16/56 , C30B25/02 , C30B29/02 , H01L21/02381 , H01L21/02488 , H01L21/02527 , H01L21/0262 , H01L29/78603 , H01L29/78684
摘要： A graphene-on-oxide substrate according to the present invention includes: a substrate having a metal oxide layer formed on its surface; and, formed on the metal oxide layer, a graphene layer including at least one atomic layer of the graphene. The graphene layer is grown generally parallel to the surface of the metal oxide layer, and the inter-atomic-layer distance between the graphene atomic layer adjacent to the surface of the metal oxide layer and the surface atomic layer of the metal oxide layer is 0.34 nm or less. Preferably, the arithmetic mean surface roughness Ra of the metal oxide layer is 1 nm or less.
摘要翻译：根据本发明的石墨烯氧化物衬底包括：在其表面上形成有金属氧化物层的衬底; 并且在所述金属氧化物层上形成包括所述石墨烯的至少一个原子层的石墨烯层。石墨烯层通常平行于金属氧化物层的表面生长，并且与金属氧化物层的表面相邻的石墨烯原子层与金属氧化物层的表面原子层之间的原子间距离为0.34 nm以下。优选地，金属氧化物层的算术平均表面粗糙度Ra为1nm以下。

15. 发明授权

US08407811B2 Scanning probe microscope and method of observing sample using the same 有权
标题翻译：扫描探针显微镜及使用其的观察样品的方法
公开(公告)号：US08407811B2
公开(公告)日：2013-03-26
申请号：US12712745
申请日：2010-02-25
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Motoyuki Hirooka
IPC分类号： G01Q60/24
CPC分类号： G01Q60/22 , G01Q70/12
摘要： In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.
摘要翻译：在扫描探针显微镜中，将纳米管和金属纳米粒子组合在一起构成具有纳米数量级的光学分辨率的等离子体增强型近场探针作为嵌入金属结构的测量探针，该等离子体激元增强的近场探头安装在高效的等离子体激元单元中，以低接触力重复接近和缩回样品上的每个测量点，从而测量样品表面的光学信息和轮廓信息分辨率为纳米级，高S / N比，高重现性，不损伤探头和样品。

16. 发明申请

US20110175060A1 GRAPHENE GROWN SUBSTRATE AND ELECTRONIC/PHOTONIC INTEGRATED CIRCUITS USING SAME 失效
标题翻译：石墨基片和电子/光电集成电路
公开(公告)号：US20110175060A1
公开(公告)日：2011-07-21
申请号：US13010075
申请日：2011-01-20
申请人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
发明人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
IPC分类号： H01L29/16 , H01L21/20 , B82Y99/00 , B82Y40/00
CPC分类号： H01L21/02645 , B82Y40/00 , H01L21/02381 , H01L21/0242 , H01L21/02488 , H01L21/02494 , H01L21/02502 , H01L21/02527 , H01L21/0262 , H01L27/1218 , H01L29/1606 , H01L29/7781 , H01L29/78603 , H01L29/78684 , H01L31/028 , H01L31/08 , H01L31/1136 , H01L33/40 , Y02E10/547
摘要： A substrate having a graphene film grown thereon according to the present invention includes: a base substrate; a patterned aluminum oxide film formed on the base substrate, the patterned aluminum oxide film having an average composition of Al2-xO3+x (where x is 0 or more); and a graphene film preferentially grown only on the patterned aluminum oxide film, the graphene film having one or more graphene atomic layers, the graphene film growing parallel to a surface of the patterned aluminum oxide film, the graphene film having an electrical conductivity of 1×104 S/cm or more measured by a four-probe resistive method using an inter-voltage-probe distance of 0.2 mm.
摘要翻译：根据本发明的在其上生长的石墨烯膜的基板包括：基底; 形成在基底基板上的图案化氧化铝膜，平均组成为Al 2-x O 3 + x（x为0以上）的图案化氧化铝膜; 并且仅在图案化的氧化铝膜上生长的石墨烯膜，所述石墨烯膜具有一个或多个石墨烯原子层，所述石墨烯膜平行于所述图案化氧化铝膜的表面生长，所述石墨烯膜的导电率为1× 通过使用0.2mm的电压 - 探针距离的四探针电阻法测量为104S / cm以上。

17. 发明申请

US20100325761A1 Scanning Probe Microscope and Method of Observing Sample Using the Same 有权
标题翻译：扫描探针显微镜及其使用方法
公开(公告)号：US20100325761A1
公开(公告)日：2010-12-23
申请号：US12864196
申请日：2008-12-18
申请人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
发明人： Toshihiko Nakata , Masahiro Watanabe , Takashi Inoue , Kishio Hidaka , Makoto Okai , Toshiaki Morita , Motoyuki Hirooka
IPC分类号： G01Q60/24
CPC分类号： G01Q60/06 , G01N21/648 , G01Q60/22 , G01Q70/12
摘要： Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
摘要翻译：以纳米级分辨率和高重现性测量样品表面的光学信息和地形信息，而不损害探针和样品，通过将纳米级圆柱结构与纳米级微结构组合以形成等离子体激元附近具有纳米级光学分辨率并且以低接触力重复将样品上的每个测量点的探针接近/退回。

18. 发明申请

US20070051887A1 Cantilever and inspecting apparatus 审中-公开
标题翻译：悬臂和检查仪器
公开(公告)号：US20070051887A1
公开(公告)日：2007-03-08
申请号：US11513411
申请日：2006-08-31
申请人： Kishio Hidaka , Motoyuki Hirooka , Mitsuo Hayashibara , Tadashi Fujieda , Hiroki Tanaka , Noriaki Takeshi , Takafumi Morimoto , Satoshi Sekino , Masato Takashina , Yuki Uozumi
发明人： Kishio Hidaka , Motoyuki Hirooka , Mitsuo Hayashibara , Tadashi Fujieda , Hiroki Tanaka , Noriaki Takeshi , Takafumi Morimoto , Satoshi Sekino , Masato Takashina , Yuki Uozumi
IPC分类号： G21K7/00
CPC分类号： G01Q60/38 , G01Q70/12
摘要： The present invention provides a cantilever having a base fixed to an inspecting apparatus, a beam protruding from the base, and a probe fixed to an end of the beam, wherein: the probe is formed by use of a carbon nanotube; and the probe is fixed by metal layers from at least two directions when the cantilever is operated, the probe protrudes in a direction in which a sample is fixed. It is possible to prevent the probe from warping and suppress image failures during observation of a sample.
摘要翻译：本发明提供了一种悬臂，其具有固定在检查装置上的基座，从基座突出的梁和固定在梁的端部的探针，其中：通过使用碳纳米管形成探针; 并且当悬臂被操作时，探针从至少两个方向由金属层固定，探针沿固定样品的方向突出。可以在观察样品期间防止探头翘曲并抑制图像故障。

19. 发明授权

US08471237B2 Circuit board including a graphene film having contact region covering a recessed region and a patterned metal film covering the contact region and in direct electrical contact therewith, and device including same 失效
标题翻译：包括具有覆盖凹陷区域的接触区域的石墨烯膜和覆盖接触区域并与其直接电接触的图案化金属膜的电路板以及包括其的装置
公开(公告)号：US08471237B2
公开(公告)日：2013-06-25
申请号：US13013984
申请日：2011-01-26
申请人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
发明人： Makoto Okai , Motoyuki Hirooka , Yasuo Wada
IPC分类号： H01L29/06 , H01L29/40
CPC分类号： H01L29/1606 , G02B6/4246 , H01L21/2855 , H01L29/41 , H01L29/45 , H01L29/7781 , H01L29/78603 , H01L29/78684
摘要： A circuit board having a graphene circuit according to the present invention includes: a base substrate; a patterned aluminum oxide film formed on the base substrate, the patterned aluminum oxide film having an average composition of Al2−xO3+x (where x is 0 or more), the patterned aluminum oxide film having a recessed region whose surface has one or more cone-shaped recesses therein; a graphene film preferentially grown only on the patterned aluminum oxide film, the graphene film having one or more graphene atomic layers, the graphene film having a contact region that covers the recessed region, the graphene film growing parallel to a flat surface of the recessed region and parallel to an inner wall surface of each cone-shaped recess of the recessed region; and a patterned metal film, a part of the patterned metal film covering and having electrical contact with the contact region, the patterned metal film filling each recess covered by the graphene film.
摘要翻译：根据本发明的具有石墨烯电路的电路板包括：基底; 形成在基底基板上的图案化氧化铝膜，图案化的氧化铝膜具有平均组成为Al 2-x O 3 + x（其中x为0或更大）的图案化氧化铝膜，图案化的氧化铝膜具有凹陷区域，其表面具有一个或多个锥形凹槽; 优选仅在图案化的氧化铝膜上生长的石墨烯膜，所述石墨烯膜具有一个或多个石墨烯原子层，所述石墨烯膜具有覆盖所述凹陷区域的接触区域，所述石墨烯膜平行于所述凹陷区域的平坦表面生长并且平行于凹陷区域的每个锥形凹部的内壁表面; 以及图案化的金属膜，所述图案化的金属膜的一部分覆盖并与所述接触区域电接触，所述图案化金属膜填充由所述石墨烯膜覆盖的每个凹部。

20. 发明授权

US08438660B2 Micro contact prober 有权
标题翻译：微接触探头
公开(公告)号：US08438660B2
公开(公告)日：2013-05-07
申请号：US13378286
申请日：2010-05-26
申请人： Motoyuki Hirooka , Makoto Okai
发明人： Motoyuki Hirooka , Makoto Okai
IPC分类号： G01Q30/02
CPC分类号： G01Q60/40 , G01Q70/12 , G01R1/06727 , G01R1/06744 , G01R31/2887
摘要： The stress due to contact between a probe and a measurement sample is improved when using a microcontact prober having a conductive nanotube, nanowire, or nanopillar probe, the insulating layer at the contact interface is removed, thereby the contact resistance is reduced, and the performance of semiconductor device examination is improved. The microcontact prober comprises a cantilever probe in which each cantilever is provided with a nanowire, nanopillar, or a metal-coated carbon nanotube probe projecting by 50 to 100 nm from a holder provided at the fore end and a vibrating mechanism for vibrating the cantilever horizontally with respect to the subject. The fore end of the holder may project from the free end of the cantilever, and the fore end of the holder can be checked from above the cantilever.
摘要翻译：当使用具有导电纳米管，纳米线或纳米柱探针的微探针探针时，探针和测量样品之间的接触引起的应力得到改善，接触界面处的绝缘层被去除，从而降低了接触电阻，并且性能的半导体器件检查得到改进。微接触探针包括悬臂探针，其中每个悬臂设置有从设置在前端的保持器突出50至100nm的纳米线，纳米柱或金属涂覆的碳纳米管探针和用于水平振动悬臂的振动机构关于这个问题。支架的前端可以从悬臂的自由端突出，并且可以从悬臂上方检查支架的前端。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式