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11. 发明授权

US06566630B2 Thermal processing apparatus for introducing gas between a target object and a cooling unit for cooling the target object 有权
标题翻译：用于在目标物体和用于冷却目标物体的冷却单元之间引入气体的热处理装置
公开(公告)号：US06566630B2
公开(公告)日：2003-05-20
申请号：US10157190
申请日：2002-05-30
申请人： Masayuki Kitamura
发明人： Masayuki Kitamura
IPC分类号： F27B514
CPC分类号： H01L21/67115 , H01L21/67109
摘要： A thermal processing apparatus capable of rapidly increasing and decreasing a temperature of a target object in a process chamber being thermally treated. A heat source heats the target object and a cooling arrangement including a bottom part of the process chamber cools the object. A gas having high thermal conductivity is introduced into the chamber to promote heat transfer. A moving mechanism relatively moves the object with respect to the cooling arrangement.
摘要翻译：一种热处理装置，其能够快速地增加和降低在热处理的处理室中的目标物体的温度。热源加热目标物体，并且包括处理室的底部的冷却装置冷却物体。将具有高导热性的气体引入室中以促进热传递。移动机构相对于冷却装置相对地移动物体。

12. 发明授权

US06394249B1 One-way clutch 失效
标题翻译：单向离合器
公开(公告)号：US06394249B1
公开(公告)日：2002-05-28
申请号：US09139747
申请日：1998-08-25
申请人： Hajime Tazumi , Yoshitaka Nakagawa , Junya Ooitsu , Masayuki Kitamura
发明人： Hajime Tazumi , Yoshitaka Nakagawa , Junya Ooitsu , Masayuki Kitamura
IPC分类号： F16D334
CPC分类号： F16D41/067
摘要： A one-way clutch for switching a power transmitting state and a power transmission interrupting state between an inner ring member and an outer ring member. At a plurality of circumferential portions of one of the inner ring member and the outer ring member, there are formed cam faces between the circumference of the one of the inner and outer ring members for forming wedge-shaped spaces which are narrowed in one circumferential direction. These cam faces are made to have a higher hardness than that of rollers which are individually arranged in the wedge-shaped spaces. As a result, the cam faces are suppressed from wear as the time elapses, and the wedge angle of the wedge-shaped spaces is kept substantially constant.
摘要翻译：一种用于在内圈构件和外圈构件之间切换动力传递状态和动力传递中断状态的单向离合器。在内环构件和外圈构件中的一个的多个周向部分上，在内圈和外圈构件中的一个的外周之间形成凸轮面，用于形成在一个圆周方向上变窄的楔形空间。这些凸轮面的硬度比单独布置在楔形空间中的辊的硬度高。结果，随着时间的推移，凸轮面被抑制磨损，并且楔形空间的楔角保持基本上恒定。

13. 发明授权

US06007633A Single-substrate-processing apparatus in semiconductor processing system 失效
标题翻译：半导体处理系统中的单基板处理装置
公开(公告)号：US06007633A
公开(公告)日：1999-12-28
申请号：US56627
申请日：1998-04-08
申请人： Masayuki Kitamura , Harunori Ushikawa
发明人： Masayuki Kitamura , Harunori Ushikawa
IPC分类号： C23C16/44 , C23C16/455 , C23C16/48 , C30B25/14 , H01L21/205 , C23C16/00
CPC分类号： C23C16/45565 , C23C16/481 , C30B25/14
摘要： The process chamber of a thermal CVD apparatus for a semiconductor wafer W has flooring and ceiling plates made of quartz. Lower and upper heaters are arranged behind the flooring and ceiling plates. The supply for supplying a process gas into the process chamber has a shower head directly under the ceiling plate, an outer tube surrounding the shower head, and radial tubes connecting the outer tube and the shower head. The shower head is made of quartz, and its top bottom and top plates can transmit radiation heat from the upper heater.
摘要翻译：用于半导体晶片W的热CVD装置的处理室具有由石英制成的地板和顶板。下部和上部加热器布置在地板和天花板的后面。用于将处理气体供应到处理室中的供应源具有在顶板正下方的淋浴喷头，围绕淋浴头的外管以及连接外管和淋浴喷头的径向管。淋浴头由石英制成，其顶部和顶板可以从上部加热器传播辐射热。

14. 发明授权

US5575853A Vacuum exhaust system for processing apparatus 失效
标题翻译：用于加工设备的真空排气系统
公开(公告)号：US5575853A
公开(公告)日：1996-11-19
申请号：US496480
申请日：1995-06-29
申请人： Junichi Arami , Masayuki Kitamura , Mitsuaki Komino
发明人： Junichi Arami , Masayuki Kitamura , Mitsuaki Komino
IPC分类号： F04B37/16 , C23C16/44 , H01L21/205 , H01L21/302 , H01L21/3065 , C23C16/00
CPC分类号： C23C16/4412
摘要： A main pump having a wide range of vacuum exhaust capabilities and a high exhaust speed is connected adjacent to a processing chamber and an auxiliary pump having a low exhaust speed is connected by a small-diameter auxiliary pipeline to the exhaust side of the main pump. Since a main pump having a wide range of vacuum exhaust capabilities and a high exhaust speed is connected adjacent to the processing chamber in this manner, not only can improvements in the exhaust characteristics be expected, but it is also possible to reduce the diameter of the auxiliary pipeline from the main pump onward and make the auxiliary pump smaller. Since the auxiliary pump having a low exhaust speed is connected by a small-diameter auxiliary pipeline to the exhaust side of the main pump, the size and cost of the entire system can be reduced.
摘要翻译：具有广泛的真空排气能力和高排气速度的主泵连接在处理室附近，并且具有低排气速度的辅助泵通过小直径辅助管道连接到主泵的排气侧。由于具有广泛的真空排气能力和高排气速度的主泵以这种方式连接在处理室附近，所以不仅可以预期排气特性的改善，而且还可以减小直径辅助管路从主泵向前，使辅助泵更小。由于具有低排气速度的辅助泵通过小直径辅助管道连接到主泵的排气侧，所以可以减小整个系统的尺寸和成本。

15. 发明授权

US5403545A Bearing steel 失效
标题翻译：轴承钢
公开(公告)号：US5403545A
公开(公告)日：1995-04-04
申请号：US990802
申请日：1992-12-14
申请人： Yatsuka Takata , Akira Muroga , Yoshihiro Wakikado , Takao Ooki , Masao Goto , Hazime Tazumi , Teruo Hoshino , Masayuki Kitamura , Toshihiro Kawaguchi , Yoshitaka Natsume , Akihiro Mizutani
发明人： Yatsuka Takata , Akira Muroga , Yoshihiro Wakikado , Takao Ooki , Masao Goto , Hazime Tazumi , Teruo Hoshino , Masayuki Kitamura , Toshihiro Kawaguchi , Yoshitaka Natsume , Akihiro Mizutani
IPC分类号： C22C38/18 , C22C38/22 , F16C33/30 , F16C33/62 , C22C38/46 , C22C38/60
CPC分类号： F16C33/30 , C22C38/18 , C22C38/22 , F16C33/62
摘要： A bearing steel having long rolling life comprising, by weight, 0.65 to 0.90% of C, 0.15 to 0.50% of Si, 0.15 to 1.0% of Mn and 2.0 to 5.0% of Cr, and the balance of Fe. Austenite grain size can be prevented from becoming coarser to make hardening in high temperature possible by further adding one or more of 0.0090 to 0.0200% of N, 0.010 to 0.050% of Al and 0.005 to 0.500% of Nb as optional elements to the steel. Further, rolling fatigue life can be improved by further adding one or more of 0.20 to 0.50% of Ni, 0.10 to 2.00% Of Mo and 0.05 to 1.00% of V as optional elements, and machinability can be improved by further adding one or more of 0.02 to 0.05% of S, 0.005 to 0.10% of rare earth elements, 0.02 to 0.30% of Pb, 0.0005 to 0.0100% of Ca, 0.001 to 0.200% of Bi, 0.005 to 0.20% of Se and 0.005 to 0.100% of Te in the steel as optional elements.
摘要翻译：具有滚动寿命长的轴承钢，其中C：0.65〜0.90％，Si：0.15〜0.50％，Mn：0.15〜1.0％，Cr：2.0〜5.0％可以通过进一步添加0.0090〜0.0200％的N，0.010〜0.050％的Al和0.005〜0.500％的Nb作为钢的任意元素，可以防止奥氏体晶粒尺寸变粗，使其在高温下硬化。此外，通过进一步添加0.20〜0.50％的Ni，0.10〜2.00％的Mo和0.05〜1.00％的V作为任选元素，可以提高轧制疲劳寿命，并且可以进一步添加一个或多个，0.02〜0.05％的S，0.005〜0.10％的稀土元素，0.02〜0.30％的Pb，0.0005〜0.0100％的Ca，0.001〜0.200％的Bi，0.005〜0.20％的Se和0.005〜0.100％的在钢中作为可选元素。

16. 发明授权

US09131611B2 Wire and semiconductor device 有权
标题翻译：线和半导体器件
公开(公告)号：US09131611B2
公开(公告)日：2015-09-08
申请号：US13684297
申请日：2012-11-23
申请人： Yuichi Yamazaki , Makoto Wada , Masayuki Kitamura , Tadashi Sakai
发明人： Yuichi Yamazaki , Makoto Wada , Masayuki Kitamura , Tadashi Sakai
IPC分类号： H01L23/48 , H05K1/09 , H01L23/532 , B82Y10/00 , B82Y99/00 , B82Y30/00
CPC分类号： H01L23/53276 , B82Y10/00 , B82Y30/00 , B82Y99/00 , H01L2924/0002 , H05K1/097 , Y10S977/734 , Y10S977/762 , H01L2924/00
摘要： A wire of an embodiment includes: a substrate; a metal film provided on the substrate; a metal part provided on the metal film; and graphene wires formed on the metal part, wherein the graphene wire is electrically connected to the metal film, and the metal film and the metal part are formed using different metals or alloys from each other.
摘要翻译：实施例的线包括：基板; 设置在基板上的金属膜; 设置在金属膜上的金属部件; 以及形成在所述金属部分上的石墨烯线，其中所述石墨烯线与所述金属膜电连接，并且所述金属膜和所述金属部分使用彼此不同的金属或合金形成。

17. 发明申请

US20120049370A1 CARBON NANOTUBE INTERCONNECTION AND MANUFACTURING METHOD THEREOF 有权
标题翻译：碳纳米管互连及其制造方法
公开(公告)号：US20120049370A1
公开(公告)日：2012-03-01
申请号：US13215463
申请日：2011-08-23
申请人： Makoto Wada , Yuichi Yamazaki , Masayuki Katagiri , Masayuki Kitamura , Atsuko Sakata , Akihiro Kajita , Tadashi Sakai , Naohsi Sakuma
发明人： Makoto Wada , Yuichi Yamazaki , Masayuki Katagiri , Masayuki Kitamura , Atsuko Sakata , Akihiro Kajita , Tadashi Sakai , Naohsi Sakuma
IPC分类号： H01L23/522 , H01L21/768 , B82Y99/00
CPC分类号： H01L23/53276 , B82Y10/00 , B82Y40/00 , H01L21/76831 , H01L21/76844 , H01L21/76846 , H01L21/76855 , H01L21/76858 , H01L21/76865 , H01L21/76876 , H01L21/76877 , H01L21/76879 , H01L23/5226 , H01L23/53223 , H01L23/53238 , H01L23/53266 , H01L23/53295 , H01L2221/1089 , H01L2221/1094 , H01L2924/0002 , H01L2924/00
摘要： According to one embodiment, a carbon nanotube interconnection includes a first conductive layer, an insulating film, a catalyst underlying film, a catalyst deactivation film, a catalyst film, and carbon nanotubes. An insulating film is formed on the first conductive layer and including a hole. An catalyst underlying film is formed on the first conductive layer on a bottom surface in the hole and on the insulating film on a side surface in the hole. A catalyst deactivation film is formed on the catalyst underlying film on the side surface in the hole. A catalyst film is formed on the catalyst underlying film on the bottom surface in the hole and the catalyst deactivation film on the side surface in the hole. Carbon nanotubes are formed in the hole, the carbon nanotubes including one end in contact with the catalyst film on the bottom surface in the hole.
摘要翻译：根据一个实施例，碳纳米管互连包括第一导电层，绝缘膜，底层催化剂，催化剂失活膜，催化剂膜和碳纳米管。绝缘膜形成在第一导电层上并包括孔。在孔的底面上的第一导电层和孔的侧面的绝缘膜上形成催化剂底膜。在孔中的侧表面上的催化剂底层上形成催化剂失活膜。在孔的底面的催化剂底层和孔的侧面的催化剂失活膜上形成催化剂膜。在孔中形成碳纳米管，碳纳米管包括与孔中底表面上的催化剂膜接触的一端。

18. 发明申请

US20090020883A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE 审中-公开
标题翻译：用于制造半导体器件的半导体器件和方法
公开(公告)号：US20090020883A1
公开(公告)日：2009-01-22
申请号：US12175132
申请日：2008-07-17
申请人： Kayo Nomura , Junichi Wada , Hideto Matsuyama , Masayuki Kitamura
发明人： Kayo Nomura , Junichi Wada , Hideto Matsuyama , Masayuki Kitamura
IPC分类号： H01L23/48 , H01L21/44
CPC分类号： H01L21/76877 , H01L21/76831 , H01L21/76843 , H01L21/76855 , H01L21/76867 , H01L21/76873 , H01L23/485 , H01L23/53223 , H01L23/53238 , H01L23/53266 , H01L2924/0002 , H01L2924/00
摘要： A semiconductor device includes a first contact plug arranged above a semiconductor substrate and using aluminum (Al) as a material; a second contact plug arranged on and in contact with the first contact plug and using a refractory metal material; a first dielectric film arranged on a flank side of the first and second contact plugs; a wire arranged above the second contact plug and using copper (Cu) as a material; a second dielectric film arranged on a flank side of the wire; and a barrier film arranged at least between the wire and the first dielectric film and between the wire and the second dielectric film.
摘要翻译：半导体器件包括布置在半导体衬底之上并使用铝（Al）作为材料的第一接触插塞; 布置在第一接触插塞上并与第一接触插塞接触并使用难熔金属材料的第二接触插塞; 布置在第一和第二接触插塞的侧面上的第一电介质膜; 布置在第二接触塞上方并使用铜（Cu）作为材料的导线; 布置在所述导线的侧面侧的第二电介质膜; 以及阻挡膜，其至少布置在所述线和所述第一电介质膜之间以及所述线与所述第二电介质膜之间。

19. 再颁专利

USRE38936E1 Antifriction bearing and alternator incorporating same for use in vehicles 有权
公开(公告)号：USRE38936E1
公开(公告)日：2006-01-17
申请号：US10040627
申请日：2002-01-09
申请人： Sigenobu Nakamura , Tutomu Siga , Kenzo Mitani , Yoshiki Fujita , Masayuki Kitamura , Hiroyuki Miyazaki , Teruo Hoshino
发明人： Sigenobu Nakamura , Tutomu Siga , Kenzo Mitani , Yoshiki Fujita , Masayuki Kitamura , Hiroyuki Miyazaki , Teruo Hoshino
IPC分类号： F16C35/00 , H02K5/16
CPC分类号： F16C33/62 , H02K5/1732 , Y10T29/49709
摘要： An antifriction bearing includes a fixed ring which comprises a steel containing up to about 10% of residual austenite. An alternator for vehicles includes a stator mounted on a frame, a rotor having its rotary shaft rotatably supported by a pair of bearings on the frame and a drive pulley mounted on one end of the shaft projecting outward from the frame. The outer ring of at least the bearing toward the pulley comprises a steel containing up to about 10% of residual austenite.

20. 再颁专利

USRE37967E1 Antifriction bearing and alternator incorporating same for use in vehicles 失效
标题翻译：减速轴承和交流发电机，用于车辆
公开(公告)号：USRE37967E1
公开(公告)日：2003-01-21
申请号：US08869844
申请日：1997-06-05
申请人： Sigenobu Nakamura , Tutomu Siga , Kenzo Mitani , Yoshiki Fujita , Masayuki Kitamura , Hiroyuki Miyazaki , Teruo Hoshino
发明人： Sigenobu Nakamura , Tutomu Siga , Kenzo Mitani , Yoshiki Fujita , Masayuki Kitamura , Hiroyuki Miyazaki , Teruo Hoshino
IPC分类号： F16C3500
CPC分类号： F16C33/62 , F16C33/64 , F16C2204/66 , F16C2380/26 , H02K5/1732 , Y10T29/49709
摘要： An antifriction bearing includes a fixed ring which comprises a steel containing up to about 10% of residual austenite. An alternator for vehicles includes a stator mounted on a frame, a rotor having its rotary shaft rotatably supported by a pair of bearings on the frame and a drive pulley mounted on one end of the shaft projecting outward from the frame. The outer ring of at least the bearing toward the pulley comprises a steel containing up to about 10% of residual austenite.
摘要翻译：减摩轴承包括固定环，该固定环包括含有高达约10％的残余奥氏体的钢。用于车辆的交流发电机包括安装在框架上的定子，转子具有由框架上的一对轴承可旋转地支撑的旋转轴和安装在从框架向外突出的轴的一端上的驱动皮带轮。至少轴承的滑轮的外圈包括含有高达约10％的残余奥氏体的钢。

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